0200-06508 Sab Saum Toj Ceramic Shield 300mm

Lub 0200-06508 Top Ceramic Shield 300mm yog ib qho khoom siv tiv thaiv semiconductor-qib ceramic siv rau hauv cov chav ua plasma siab heev. Los ntawm kev tsim kho, nws yog ib feem ntawm cov khoom siv tiv thaiv plasma-facing ceramic uas sib xyaw ua ke rau hauv cov khoom sib dhos sab saud hauv cov platforms khoom siv semiconductor.

Tsis zoo li cov ntaub thaiv kev siv tshuab ib txwm muaj, cov khoom siv ceramic no ua ntau yam haujlwm tseem ceeb rau cov txheej txheem tib lub sijhawm. Nws tsis yog tsuas yog ua lub cev tiv thaiv kev puas tsuaj ntawm plasma xwb, tab sis kuj yog ib qho khoom siv kho chav uas pab txhawb rau kev ruaj khov ntawm plasma, kev sib xws ntawm RF teb, thiab kev tswj kev ua qias tuaj thaum lub sijhawm ua cov wafer semiconductor.

Cov yam ntxwv ntawm cov khoom siv thiab cov txiaj ntsig

Yuav kom tiv taus cov chaw ua haujlwm semiconductor plasma uas muaj zog heev, 0200-06508 Top Ceramic Shield 300mm feem ntau yog tsim los ntawm kev siv cov khoom siv ceramic siab-purity uas tau tsim los rau kev ua haujlwm ntev ntawm plasma, kev ruaj khov thermal, thiab kev ua haujlwm tsis muaj kuab paug.

Cov txheej txheem khoom siv feem ntau yuav suav nrog:

●Alumina Muaj Peev Xwm Siab (Al₂O₃)

●Y₂O₃-Txheej Alumina

●Cov Khoom Siv Uas Ua Los Ntawm Silicon Carbide (SiC)

●Txhuas Nitride (AlN)

Ntawm cov ntaub ntawv no, alumina uas muaj purity siab tseem yog ib qho ntawm cov kev daws teeb meem uas tau txais kev pom zoo tshaj plaws vim nws cov khoom siv hluav taws xob zoo heev, muaj zog tiv taus plasma, thiab kev ua haujlwm ruaj khov.

1. Kev Tiv Thaiv Plasma Zoo heev

Cov txheej txheem plasma semiconductor feem ntau muaj cov tshuaj fluorine hnyav xws li CF₄, NF₃, thiab fluorocarbon gases. Cov khoom siv ceramic siab heev muab kev tiv thaiv zoo tiv thaiv kev puas tsuaj ntawm plasma, pab txo qhov puas tsuaj ntawm qhov chaw thiab txuas ntxiv lub neej ntawm cov khoom hauv qab kev raug plasma tas mus li.

2. Kev Tsim Khoom Me Me

Kev ua qias tuaj ntawm cov khoom me me tseem yog ib qho teeb meem tseem ceeb tshaj plaws hauv kev tsim khoom siv semiconductor. Kev ua cov khoom siv ceramic kom raug thiab cov thev naus laus zis ua kom tiav qhov chaw zoo tshaj plaws pab txo qhov kev poob ntawm cov khoom me me, kev tawg, thiab kev tawg ntawm qhov chaw thaum lub sijhawm ua haujlwm hauv chav.

3. Kev Ua Haujlwm Dielectric Ruaj Khov

Cov khoom siv dielectric ntawm semiconductor ceramics ncaj qha cuam tshuam rau RF coupling thiab plasma tus cwj pwm hauv lub chamber. Cov yam ntxwv dielectric ruaj khov pab tswj kev faib tawm plasma density thiab txhim kho cov txheej txheem rov ua dua thoob plaws hauv cov voj voog ntau lawm.

4. Kev kub siab thermal stability

Cov khoom siv ceramic tswj tau qhov ruaj khov ntawm qhov kub thiab txias thiab cov xwm txheej thermal cycling rov ua dua. Lawv cov yam ntxwv thermal deformation qis pab txhawb rau kev ua haujlwm ruaj khov ntawm chav thiab kev ua haujlwm ntev ntev.

5. Kev Huv Si Qib Semiconductor

Cov khoom siv ceramic semiconductor raug tsim nrog cov qib kev tsis huv uas tswj tau zoo kom txo tau cov kev pheej hmoo ntawm cov hlau tsis huv thaum lub sijhawm ua cov wafer ua ntej.

Cov Haujlwm Tseem Ceeb ntawm Cov Txheej Txheem

Ib qho ntawm cov haujlwm tseem ceeb tshaj plaws ntawm 0200-06508 Top Ceramic Shield 300mm yog kev tiv thaiv chav. Thaum lub sijhawm ua plasma, lub rooj sib dhos sab saud raug rau cov ions muaj zog thiab cov tshuaj plasma uas tuaj yeem ua rau cov nplaim ntawm chav sai sai. Lub tiv thaiv ceramic ua haujlwm ua lub thaiv kev tiv thaiv uas txo cov plasma tawm tsam ncaj qha rau cov khoom kim heev, pab ua kom lub neej ntawm chav ntev dua thiab txo qhov zaus txij nkawm.

Cov khoom no kuj tseem ua lub luag haujlwm tseem ceeb hauv kev ruaj khov ntawm cov plasma. Vim tias tus cwj pwm ntawm cov plasma raug cuam tshuam los ntawm cov qauv geometry thiab kev faib tawm dielectric, lub tiv thaiv ceramic pab txhawb rau kev tsim cov teb RF ruaj khov thiab kev kaw cov plasma hauv lub chamber. Qhov no pab txhim kho kev sib xws ntawm cov plasma thiab txhawb nqa cov txiaj ntsig ua wafer sib xws.

Tsis tas li ntawd xwb, lub ntaub thaiv ceramic pab txo cov pa phem thiab cov khoom me me hauv lub chamber. Los ntawm kev muab qhov chaw plasma-facing ruaj khov nrog kev tiv taus siab rau sputtering thiab kev tawm tsam tshuaj lom neeg, cov khoom no pab tswj cov xwm txheej hauv chav huv dua thiab txhim kho tag nrho cov wafer yield.

Lwm lub luag haujlwm tseem ceeb yog qhov ua tau dua. Thaum kev tsim khoom semiconductor txuas ntxiv mus rau cov nodes siab heev thiab cov txheej txheem nruj dua, kev sib xws ntawm chav ua haujlwm yuav tseem ceeb dua. Lub tiv thaiv ceramic pab tswj cov xwm txheej ntawm chav ua haujlwm kom ruaj khov thaum lub sijhawm tsim khoom ntev, txhim kho kev sib phim ntawm chav ua haujlwm thiab txo cov txheej txheem sib txawv ntawm lub sijhawm txij nkawm.

Cov Kev daws teeb meem Semixlab Ceramic

Semixlab muab cov khoom siv semiconductor ceramic ua haujlwm siab uas tau tsim los rau plasma etch, deposition, thiab cov ntawv thov ua wafer siab heev. Peb cov khoom siv semiconductor ceramic spare yog tsim nrog kev tswj hwm kev kam rau siab, kev ntshiab ntawm cov khoom siv semiconductor, thiab cov thev naus laus zis tiav qhov chaw siab heev kom ua tau raws li qhov xav tau ntawm cov chaw tsim khoom semiconductor niaj hnub no.

Peb txhawb nqa cov semiconductor OEMs, wafer fabs, thiab cov chaw muab kev kho dua tshiab khoom siv nrog:

● Kev ua cov khoom siv ceramic precision

●Cov tshuaj ceramic uas tiv taus plasma

●Cov khoom siv hauv chav semiconductor

● Cov khoom seem ceramic uas muaj cov khoom huv siab

●Cov txheej txheem kho kom zoo nkauj

●Kev kho kom haum rau cov txheej txheem semiconductor