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SiC Coated Planetary Susceptor
Lub SiC Coated Planetary Susceptor los ntawm Semixlab yog tsim los rau cov chaw tsim khoom semiconductor siab heev uas xav tau kev sib xws ntawm thermal, kev ntseeg siab ntev, thiab kev ua haujlwm tsis muaj kuab paug. Tsim tshwj xeeb rau Si, SiC, thiab GaN epitaxial kev loj hlob, nrog rau CVD diffusion thiab high-temperature annealing, lub susceptor no muaj cov txheej tiv thaiv SiC siab-purity uas ua rau kev tuav wafer ruaj khov hauv cov huab cua tshuaj lom neeg thiab qhov kub siab dua 1500 ° C. Tsim los txo qhov tsis xws luag, txhim kho epitaxial thickness sib xws, thiab txuas ntxiv cov khoom siv uptime. Peb tos ntsoov rau koj qhov kev nug.
Hauj lwm
Semixlab's SiC Coated Planetary Susceptor yog tsim los rau tiam tom ntej semiconductor epitaxy thiab CVD thermal processing, qhov twg thermal uniformity, defect-free growth, thiab ntev chamber stability yog qhov tseem ceeb rau cov khoom siv. Lub cab kuj no yog tsim tshwj xeeb rau cov chaw kub siab tshaj 1500 ° C thiab cov pa roj sib xyaw uas feem ntau pom muaj nyob rau hauv silicon, SiC, thiab GaN epitaxial systems. Lub SiC txheej proprietary muab ib txheej tiv thaiv ntom, siab-purity uas tiv thaiv kev ua qias tuaj thiab ua kom ruaj khov, ntev-lub voj voog hauv cov khoom tsim khoom xav tau.
Hauv cov txheej txheem semiconductor epitaxial xws li Si, SiC, thiab GaN kev loj hlob, planetary wafer carriers ua haujlwm ua lub hauv paus mechanical thiab thermal platform rau kev thauj cov wafers mus rau hauv thaj chaw teb. Lawv cov thermal conductivity zoo tshaj plaws ua rau muaj kev faib tawm qhov kub thiab txias meej, thaum lub planetary rotation system ua kom muaj kev sib npaug ntawm kev loj hlob, kev sib xyaw ua ke ntawm dopant, thiab crystal zoo thoob plaws ntau cov wafers. Hauv kev tsim khoom siv hluav taws xob SiC, txawm tias ± 1-2% substrate kub hloov pauv cuam tshuam rau qhov ceev ntawm lub dav hlau basal dislocation thiab kev ua haujlwm ntawm lub cuab yeej. Qhov kev sib npaug thermal zoo dua los ntawm SiC-coated planetary wafer carriers pab cov fabs txo qhov ceev ntawm qhov tsis xws luag, txhim kho qhov tuab sib npaug, thiab nce cov khoom lag luam ntau ntau.
Ntxiv rau cov txheej txheem epitaxial, tus susceptor no kuj tseem ceeb heev rau cov tshuaj lom neeg vapor deposition diffusion thiab thermal annealing processes, ua haujlwm ua qhov chaw ruaj khov thermal interface ntawm qhov chaw cua sov thiab qhov chaw wafer. Nws cov yam ntxwv tsis muaj residue, cov yam ntxwv ntawm qhov chaw me me txo qis kev pheej hmoo ntawm kev ua qias tuaj thaum lub sijhawm thermal cycling ntev, tiv thaiv wafers los ntawm pitting, particle tsim, lossis backside contamination. Piv rau cov khoom siv graphite-based support assemblies, Semixlab's SiC coating tsim ua rau lub neej ua haujlwm ntev dua, txo lub sijhawm downtime rau kev ntxuav thiab kho dua tshiab, thiab xa cov nqi qis dua rau cov kab ntau lawm.
Txhua lub Semixlab SiC Coated Planetary Susceptor yog tsim los ntawm kev siv cov khoom siv graphite siab thiab cov thev naus laus zis CVD SiC txheej txheej kom ntseeg tau tias lub zog lo rau txheej, qhov tuab sib xws, thiab kev tiv taus thermal shock. Cov khoom muaj cov qhov ntev thiab cov qauv kho kom haum rau cov platform epitaxial ua lag luam siv hauv kev tsim khoom siv semiconductor. Semixlab cov kev pabcuam kev siv tshuab suav nrog kev ntsuam xyuas kev ua haujlwm ntawm txheej, kev sab laj txog kev sib raug zoo ntawm chav tsev, thiab kev tswj hwm lub neej, tsim los pab cov fabs nthuav dav peev xwm, tswj cov txiaj ntsig, thiab txhim kho cov voj voog tsim khoom siv. Peb tos ntsoov rau koj cov lus nug ntxiv.
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Semixlab khoom khw
