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CVD SiC Graphite Lub Tog Raj Kheej
Lub CVD SiC Graphite Lub Tog Raj Kheej yog ib qho khoom siv reactor ua haujlwm siab uas tsim los rau semiconductor epitaxy thiab chemical vapor deposition (CVD) systems. Lub khoom siv no yog tsim los ntawm kev siv cov high-density isostatic graphite substrate ua ke nrog cov txheej txheem Chemical Vapor Deposition (CVD) silicon carbide, uas ua rau muaj kev ruaj khov zoo heev, tiv taus corrosion, thiab ua kom ruaj khov hauv cov chaw ua haujlwm kub siab. Semixlab CVD SiC Graphite Lub Tog Raj Kheej yog siv dav hauv SiC epitaxy reactors, silicon epitaxy systems, GaN MOCVD khoom siv, thiab cov txheej txheem CVD deposition siab heev, muab kev ua haujlwm zoo rau cov txheej txheem semiconductor uas xav tau kev kub ntxhov. Tos ntsoov rau koj qhov kev nug.
Hauj lwm
Cov thooj voos kheej kheej graphite CVD SiC ua haujlwm ua cov khoom tseem ceeb hauv cov khoom siv ua semiconductor kub siab, suav nrog epitaxial reactors thiab cov tshuaj vapor deposition (CVD) systems. Lawv ua lub luag haujlwm tseem ceeb hauv kev tswj hwm qhov chaw ua haujlwm ruaj khov, coj cov pa roj ntws, thiab tiv thaiv cov khoom sab hauv reactor thaum lub sijhawm tsim khoom semiconductor siab heev.
Feem ntau cov khoom no yog tsim los ntawm kev siv cov khoom siv graphite isostatic graphite uas muaj cov khoom ntom ntom thiab cov txheej txheem chemical vapor deposition (CVD) silicon carbide (SiC). Cov txheej txheem graphite no muaj cov thermal conductivity zoo heev, muaj zog, thiab siv tau yooj yim, thaum cov txheej txheem SiC tsim cov nplaim tiv thaiv uas muaj cov tshuaj lom neeg tsis muaj zog.
Cov thooj voos kheej kheej Semixlab CVD SiC graphite siv dav hauv SiC epitaxy systems, silicon epitaxy reactors, GaN MOCVD khoom siv, thiab lwm yam khoom siv CVD kub siab. Hauv cov ntawv thov no, kev ruaj khov thermal siab, kev tiv thaiv corrosion, thiab kev tswj kev ua qias tuaj yog qhov tseem ceeb rau kev tswj hwm kev ua haujlwm ruaj khov.
Lub Luag Haujlwm hauv Semiconductor Epitaxy thiab CVD Reactors
Kev Ruaj Ntseg Qhov Chaw Ib puag ncig Reaction
Hauv cov reactor epitaxy thiab CVD, cov thooj voos xwmfab graphite feem ntau raug teeb tsa nyob ib puag ncig lossis ze ntawm lub hauv paus lossis wafer carrier sib dhos, ua ib feem ntawm cov qauv sab hauv ntawm thaj chaw ua haujlwm. Lawv qhov muaj nyob pab txhais cov duab ntawm qhov chaw ua haujlwm thiab ua kom muaj qhov chaw ruaj khov ntawm cov khoom tseem ceeb ntawm cov txheej txheem.
Los ntawm kev tswj hwm qhov ruaj khov ntawm lub chamber thaum lub sijhawm ua haujlwm kub siab, cov thooj voos xwmfab graphite pab txhawb kev faib tawm qhov kub thiab txias ruaj khov thiab cov xwm txheej tshuaj tiv thaiv - qhov tseem ceeb rau kev ua tiav kev loj hlob ntawm cov zaj duab xis ntawm cov wafers.
Kev Txhim Kho Cov Pa Roj ntawm Cov Txheej Txheem
Kev tswj cov roj ntws kom raug yog qhov tseem ceeb hauv cov txheej txheem tso cov khoom siv semiconductor. Cov qauv cylindrical coj cov roj ntws los ntawm thaj chaw ua haujlwm, txo qhov turbulence thiab txhawb kev faib cov roj kom sib npaug.
Qhov chaw tswj hwm no ua rau cov txheej txheem sib xws thiab txhawb nqa cov khoom siv sib xws - tshwj xeeb tshaj yog qhov tseem ceeb hauv cov txheej txheem loj hlob epitaxial uas xav tau kev tswj hwm tuab thiab doping sib xws.
Tiv thaiv cov Cheebtsam Reactor
Thaum lub sijhawm ua haujlwm kub siab, cov pa roj reactive thiab cov khoom tso tawm tuaj yeem ua rau cov nplaim ntawm lub reactor. Cov thooj voos kheej kheej graphite ua haujlwm ua cov khoom tiv thaiv, tiv thaiv cov khoom reactor rhiab heev los ntawm kev raug ncaj qha rau cov txheej txheem corrosive. Lub luag haujlwm tiv thaiv no pab txo cov kev pheej hmoo ntawm kev ua qias tuaj thiab txhim kho kev ntseeg siab ntawm cov txheej txheem tso tawm.
Specifications
| Cov yam ntxwv ntawm lub cev ntawm CVD SiC txheej | |
| Khoom | Tus Nqi Qub |
| Crystal Structure | FCC β theem polycrystalline, feem ntau (111) taw qhia |
| ceev | 3.21 g / cm³ |
| Hardness | 2500 Vickers hardness (500g load) |
| Nthuav Loj | 2 ~ 10μm |
| Tshuaj Purity | 99.99995% |
| Peev Xwm Kub | 640 XNUMXj kg-1·K-1 |
| Sublimation kub | 2700 ℃ |
| Kev Ua Tau Zoo | 415 MPa RT 4-point |
| Young's Modulus | 430 Gpa 4pt khoov, 1300 ℃ |
| Thermal Kev Coj Ua | 300W·m-1·K-1 |
| Thermal Expansion (CTE) | 4.5 × 10-6K-1 |
daim ntawv sau npe
Cov Ntawv Thov Txheej Txheem Semiconductor Ib Txwm Muaj
Semixlab CVD SiC graphite thooj voos kheej kheej siv dav hauv ntau yam txheej txheem tsim khoom semiconductor siab heev.
SiC Epitaxy rau Cov Khoom Siv Hluav Taws Xob Semiconductor
Hauv cov silicon carbide epitaxy reactors, qhov kub ntawm kev loj hlob feem ntau tshaj 1500 ° C, thiab cov txheej txheem ib puag ncig yuav muaj cov pa roj hydrogen thiab chlorine. Hauv qab cov xwm txheej hnyav no, cov khoom siv reactor yuav tsum ua kom pom kev ruaj khov thermal thiab tshuaj lom neeg zoo heev.
Cov thooj voos kheej kheej graphite CVD SiC pab tswj kom muaj ib puag ncig ruaj khov thiab txhawb nqa kev loj hlob ntawm cov txheej epitaxial hauv kev tsim khoom siv hluav taws xob SiC.
Silicon Epitaxy
Hauv cov txheej txheem silicon epitaxy rau cov khoom siv logic thiab fais fab siab heev, cov khoom siv reactor yuav tsum tswj hwm qhov ruaj khov ntawm qhov ntev kom ntseeg tau tias muaj kev faib roj thiab kev tswj kub sib xws. Cov thooj voos kheej kheej graphite pab txhawb rau cov qauv sab hauv chamber ruaj khov, yog li txhawb nqa cov txheej txheem silicon epitaxial sib xws ntawm cov wafers.
Cov Txheej Txheem MOCVD rau GaN thiab LEDs
Hauv kev tsim cov gallium nitride thiab LED, MOCVD reactors ua haujlwm ntawm qhov kub siab siv cov pa roj ua ntej uas muaj zog heev xws li ammonia thiab cov hlau organic compounds. Cov thooj voos kheej kheej roj graphite CVD SiC pab ua kom cov qauv reactor ruaj khov thiab coj cov txheej txheem roj, txhim kho kev sib npaug ntawm cov khoom tso tawm thiab kev ntseeg siab rau cov khoom siv mus sij hawm ntev.
Cov Txheej Txheem Tso Khoom CVD Kub Siab
Hauv ntau yam CVD-based deposition systems—xws li cov rau polysilicon, silicon carbide, lossis lwm yam khoom siv siab heev—graphite gas cylinders txhawb nqa kev ua haujlwm ruaj khov ntawm reactor thiab txo cov kev pheej hmoo ntawm kev ua qias tuaj.
peb pab
Semixlab khoom khw
