TaC Coated Deep UV LED Susceptor

Lub TaC Coated Deep UV LED Susceptor yog ib qho tseem ceeb ntawm cov txheej txheem hauv cov hlau-organic chemical vapor deposition (MOCVD) systems siv rau hauv kev tsim cov ultraviolet (UV) LEDs tob. Lub susceptor no tau tsim tshwj xeeb los ua haujlwm hauv qab cov txheej txheem hnyav, txhawb nqa ncaj qha rau cua sov wafer thiab muab qhov chaw sov thiab tshuaj lom neeg tsim nyog rau kev loj hlob zoo epitaxial ntawm txhuas nitride (AlN) thiab cov txheej txheem txhuas gallium nitride (AlGaN) uas muaj cov txhuas ntau.

Hauv cov txheej txheem UV LED MOCVD tob tob, kev loj hlob epitaxial feem ntau tshwm sim ntawm qhov kub siab dua li cov uas siv rau cov LEDs gallium nitride ib txwm muaj, nrog rau cov nqi ntws ammonia siab heev thiab huab cua nplua nuj nitrogen. Hauv qab cov xwm txheej no, cov ntaub ntawv susceptor ib txwm muaj peev xwm ntsib kev puas tsuaj ntawm qhov chaw, kev tso tawm carbon, thiab kev tsis ruaj khov ntawm cov tshuaj lom neeg, ua rau qhov zoo ntawm epitaxial txo qis thiab kev ua haujlwm ntawm cov cuab yeej txo qis. Lub txheej tantalum carbide (TaC) ntawm qhov chaw susceptor qhia txog kev ruaj khov ntawm thermal thiab tshuaj lom neeg, ua rau kev ua haujlwm txhim khu kev qha ntawm qhov kub siab thiab tswj cov yam ntxwv ntawm qhov chaw sib xws thoob plaws hauv lub voj voog ntau lawm.

Lub luag haujlwm tseem ceeb ntawm TaC Coated Deep UV LED Susceptor yog los muab cov cua sov wafer sib xws thiab rov ua dua thaum lub sijhawm MOCVD txoj kev loj hlob. Kev sib xyaw ua ke ntawm cov khoom siv graphite zoo thiab cov txheej txheem tantalum carbide tuab ua kom muaj kev hloov pauv cua sov zoo thiab cov khoom siv hluav taws xob ruaj khov, ua rau muaj kev tswj hwm qhov kub ntawm wafer. Qhov kev ruaj khov no yog qhov tseem ceeb rau kev tswj hwm qhov tseeb ntawm cov khoom siv txhuas hauv AlGaN epitaxial kev loj hlob, cuam tshuam ncaj qha rau qhov kev sib npaug ntawm qhov ntev ntawm lub teeb thiab kev ua haujlwm ntawm cov khoom siv UV LED tob.

Qhov tseem ceeb sib npaug yog lub luag haujlwm ntawm tantalum carbide txheej hauv kev tiv thaiv kev ua qias tuaj. Carbon doping yog qhov kev sib tw lees paub hauv kev loj hlob tob UV LED epitaxial, vim tias txawm tias cov pa roj carbon keeb kwm yav dhau los me me tuaj yeem cuam tshuam rau cov khoom siv zoo thiab lub neej ntawm lub cuab yeej. Lub txheej tantalum carbide ua haujlwm ua lub zog diffusion barrier, zoo cais cov graphite core ntawm cov txheej txheem ib puag ncig thiab txo cov pa roj carbon tawm-diffusion nyob rau hauv cov xwm txheej kub siab MOCVD. Nws cov tshuaj inertness siab kuj txo qhov kev pheej hmoo ntawm cov hlau ua qias tuaj, pab txhawb rau qhov tsis zoo qhov ceev thiab txhim kho kev ntseeg siab ntawm lub cuab yeej.

Lub TaC Coated Deep UV LED Susceptor kuj qhia tau tias muaj kev tiv thaiv zoo dua rau qhov chaw muaj tshuaj lom neeg hnyav uas tshwj xeeb rau cov txheej txheem UV MOCVD tob. Piv rau cov tshuaj silicon carbide-coated ib txwm muaj, tantalum carbide qhia tau tias muaj kev ruaj khov ntau dua hauv cov pa roj ammonia thiab hydrogen-nitrogen sib xyaw ua ke, yog li ua rau qeeb qeeb ntawm kev puas tsuaj ntawm cov txheej thiab ua kom lub neej ntawm cov khoom siv ntev dua. Qhov kev ruaj khov no txhais tau tias lub sijhawm txij nkawm ntev dua, lub sijhawm ua haujlwm ntawm cov khoom siv siab dua, thiab cov nqi tsim khoom qis dua.

Lub TaC Coated Deep UV LED Susceptor yog tsim los rau kev sib raug zoo nrog cov platform MOCVD tseem ceeb, kom ntseeg tau tias muaj kev ua haujlwm zoo sib xws thoob plaws cov wafers thiab batches, uas yog qhov tseem ceeb rau kev nthuav dav cov thev naus laus zis UV LED tob rau kev tsim khoom loj. Txhua lub susceptor yog tsim nyob rau hauv cov txheej txheem tswj hwm kom ntseeg tau tias cov txheej txheem sib xws, muaj zog lo, thiab rov ua dua qhov kev ua haujlwm thermal, uas qhia txog Semixlab txoj kev cog lus rau qhov zoo, kev ntseeg siab, thiab kev tsim qauv tsav los ntawm daim ntawv thov.

Ua ib lub tuam txhab thev naus laus zis ua lag luam hauv Suav teb cov txheej txheem semiconductor epitaxial, Semeixab cog lus tias yuav muab cov thev naus laus zis siab heev rau kev lag luam semiconductor thiab cov kev daws teeb meem khoom TaC Coated Deep UV LED Susceptor. Peb tuaj yeem phim cov haujlwm thiab cov qauv ntawm peb cov khoom rau koj cov kev xav tau tshwj xeeb, kom ntseeg tau tias kev ua haujlwm zoo ntawm koj lub tuam txhab tsim khoom. Semeixab tos ntsoov yuav los ua koj tus khub mus sij hawm ntev hauv Suav teb.