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TaC Coated Wafer Nplhaib rau SiC Epitaxy
Lub Nplhaib Wafer Uas Muaj TaC Coated rau SiC Epitaxy yog ib qho khoom siv ua tiav uas tsim los kom ruaj khov cov xwm txheej ntawm ntug wafer thaum lub sijhawm kub siab silicon carbide epitaxial loj hlob. Ua los ntawm cov graphite isostatic siab thiab tiv thaiv los ntawm cov txheej txheem tantalum carbide tuab, lub nplhaib wafer muab kev ruaj khov thermal zoo heev, kev tsis muaj tshuaj lom neeg, thiab kev tswj cov khoom me me hauv SiC CVD thiab MOCVD ib puag ncig. Los ntawm kev txhais cov ciam teb tiv thaiv ruaj khov nyob ib puag ncig wafer, nws txhawb nqa kev sib npaug ntawm ntug zoo dua, txo cov kab mob parasitic, thiab kev ua haujlwm epitaxial zoo ib yam. Kev sib xyaw ua ke ntawm cov ntaub ntawv siab heev thiab cov thev naus laus zis txheej txheem ua rau lub nplhaib wafer yog qhov kev daws teeb meem zoo rau cov ntawv thov SiC epitaxy qib siab. Peb tos ntsoov yuav tau txais koj cov lus nug.
Hauj lwm
Lub TaC Coated Wafer Nplhaib rau SiC Epitaxy yog ib qho tseem ceeb ntawm cov txheej txheem tsim los xyuas kom meej tias muaj kev ruaj khov ntawm thermal thiab tshuaj lom neeg ntawm ntug wafer thaum lub sijhawm kub siab silicon carbide epitaxial loj hlob. Hauv SiC CVD thiab MOCVD cov txheej txheem, cov xwm txheej ntawm ntug wafer cuam tshuam rau qhov kub thiab txias sib xws, tus cwj pwm ntws roj, thiab kev tso tawm parasitic. Los ntawm kev txhais meej txog ciam teb tshuaj tiv thaiv nyob ib puag ncig SiC wafers, lub nplhaib wafer ua lub luag haujlwm tseem ceeb hauv kev ruaj khov ntawm qhov chaw loj hlob hauv zos. Qhov no ua kom ntseeg tau tias muaj qhov tuab epitaxial sib xws, kev faib tawm doping sib xws, thiab cov txiaj ntsig ntawm ntug siab dua thoob plaws hauv kev tsim khoom.
Cov khoom no siv cov graphite isostatic siab purity ua nws cov khoom siv substrate, uas ua rau pom kev ua haujlwm thermal conductivity zoo heev, kev ua haujlwm ruaj khov, thiab kev siv tshuab tau zoo hauv qab cov txheej txheem hnyav. Lub ntsej muag graphite substrate yog coated sib npaug nrog ib txheej Tantalum Carbide (TaC) tuab, tsim ib lub thaiv kev tiv thaiv zoo nrog kev tiv thaiv zoo rau kev xeb tshuaj thiab kev puas tsuaj thermal. Hauv qhov chaw SiC epitaxy uas xav tau - ua haujlwm ntawm qhov kub tshaj 1600 ° C nrog cov pa roj reactive uas muaj hydrogen thiab halogens - Tantalum Carbide Coating zoo suppresses graphite corrosion, txo cov khoom me me, thiab tswj cov xwm txheej ruaj khov thoob plaws hauv kev ua haujlwm ntev.
Los ntawm qhov kev xam pom ntawm cov txheej txheem, TaC coated wafer rings ncaj qha pab txhawb rau kev ruaj khov ntawm ntug thermal teb thiab kev tswj cov roj ntws, txo cov ntug tsis sib xws thiab txo cov kab mob parasitic deposition ntawm cov khoom siv ib puag ncig. TaC cov tshuaj lom neeg inertness thiab qhov kub melting (3880 ° C) ua rau muaj kev cuam tshuam ntev rau cov tshuaj lom neeg epitaxial corrosive yam tsis muaj kev puas tsuaj lossis delamination txheej, qhov tseem ceeb rau kev tswj hwm qhov tsis zoo tsawg thiab kev ua haujlwm rov ua dua. Piv rau cov khoom SiC tsis muaj txheej lossis cov khoom siv ib txwm muaj, TaC-coated cov qauv ua rau lub neej ua haujlwm ntev dua, txhim kho cov txheej txheem sib xws, thiab txo tag nrho cov nqi ntawm kev muaj tswv cuab hauv kev tsim khoom ntau.
Ua ib lub tuam txhab ua lag luam hauv Suav teb uas muab cov txheej txheem SiC epitaxy, peb cov TaC Coated Wafer Rings muab cov kev daws teeb meem tsim tshwj xeeb rau koj cov kev xav tau tshwj xeeb. Peb tos ntsoov yuav los ua koj tus khub mus sij hawm ntev hauv Suav teb.
Tantalum carbide (TaC) txheej nyob rau hauv ib qho kev sib txuas ntawm microscopic
Specifications
| Lub cev muaj zog ntawm TaC txheej | |
| ceev | 14.3 (g / cm³) |
| Tshwj xeeb emissivity | 0.3 |
| Thermal expansion coefficient | 6.3*10-6/K |
| Hardness (HK) | 2000 HK ib |
| Kuj | 1 × 10-5 Aw* cm |
| Thermal ruaj khov | <2500 ℃ |
| Graphite loj hloov | -10 ~ 20 hli |
| Txheej thickness | ≥20um tus nqi raug (35um ± 10um) |
peb pab
Semixlab khoom khw
