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Peb-petal Graphite Crucible
Peb-petal Graphite Crucibles
Peb-petal Graphite Crucible
Peb-petal Graphite Crucibles

Peb-petal Graphite Crucible


Lub Crucible Graphite Three-petal uas Semixlab muab yog cov khoom siv graphite siab-purity tsim rau Czochralski (CZ) ib leeg siv lead ua silicon loj hlob systems. Tsim los daws qhov teeb meem thermal stress thiab structural distortion hauv cov txheej txheem rub cov siv lead ua loj-txoj kab uas hla, cov qauv peb-petal segmented txhim kho thermal symmetry, txhim kho qhov ruaj khov, thiab ntev lub neej ua haujlwm nyob rau hauv cov xwm txheej kub siab tshaj 1400 ° C. Lub Crucible yog tsim los ntawm cov graphite isostatic zoo-grain thiab tshwj xeeb tshaj yog haum rau 200 mm thiab 300 mm CZ silicon ingot ntau lawm. Tos ntsoov rau koj qhov kev nug.

Hauj lwm

Semixlab's Three-petal Graphite Crucible yog tsim tshwj xeeb rau cov txheej txheem loj hlob ntawm Czochralski (CZ) ib leeg-crystal silicon. Nws qhov kev ruaj khov thermal zoo dua, kev ua haujlwm ntawm cov qauv, thiab cov khoom siv purity ncaj qha cuam tshuam rau qhov zoo ntawm cov siv lead ua thiab cov txiaj ntsig ntawm cov khoom.

Hauv cov txheej txheem CZ, polycrystalline silicon yaj hauv lub quartz crucible ntawm qhov kub siab tshaj 1420 ° C, thaum cov graphite crucible thiab cov khoom kub hauv cheeb tsam muab kev txhawb nqa thiab txhais cov chaw sov. Kev ruaj khov ntawm cov qauv graphite yog qhov tseem ceeb: nws tswj cov radial thiab axial kub gradients, cuam tshuam rau tus cwj pwm yaj convection, thiab thaum kawg txiav txim siab cov duab ntawm cov khoom khov-kua interface thaum lub sijhawm loj hlob ntawm crystal. Txawm tias cov qauv me me lossis kev ntxhov siab ua rau deformations tuaj yeem ua rau muaj kev hloov pauv ntawm lub taub hau crystal, kev hloov pauv ntawm cov pa oxygen, thiab kev nce ntxiv ntawm qhov tsis xws luag.

Lub Crucible Graphite Peb-petal siv cov qauv sib cais, faib lub cev crucible ua peb ntu uas raug tshuab ua kom raug. Lub hom phiaj ntawm kev tsim no yog los txo cov kev ntxhov siab thermal circumferential uas tsim los ntawm kev ua haujlwm kub ntev thiab rov ua dua thermal cycling. Tsis zoo li cov monolithic graphite crucibles ib txwm muaj, uas tuaj yeem khaws cov kev ntxhov siab raws li tag nrho cov qauv nplhaib, cov qauv peb-ntu tso cai rau kev tswj hwm kev nthuav dav thiab kev faib tawm kev ntxhov siab ntawm cov interfaces tshwj xeeb. Qhov tshwm sim yog kev ruaj khov ntawm qhov ntev, txo qhov kev pheej hmoo ntawm kev tawg, thiab txhim kho kev ntseeg siab mus sij hawm ntev hauv CZ qhov cub tawg.

Los ntawm kev xav txog kev tsim kho cua sov, kev tswj hwm qhov kub thiab txias ruaj khov thiab sib npaug yog qhov tseem ceeb rau kev tswj cov qauv ntws thiab qhov nkhaus ntawm cov khoom siv lead ua kom loj hlob. Peb-petal Graphite Crucible txhim kho qhov sib npaug ntawm radial thermal los ntawm kev txo qis deformation thiab tswj hwm geometric sib xws thoob plaws hauv lub voj voog loj hlob. Qhov no pab txhawb rau cov xwm txheej rub siv lead ua kom ruaj khov, kev tswj hwm txoj kab uas hla kom meej dua, thiab kev nkag mus rau hauv cov pa oxygen sib npaug ntau dua rau hauv cov silicon yaj los ntawm quartz crucible. Qhov kev ruaj khov thermal no yog qhov tseem ceeb tshwj xeeb hauv kev tsim cov ingots loj, uas feem ntau muaj cov kub sib txawv ntau dua thiab cov khoom siv kho tshuab siab dua.

Cov khoom siv huv thiab qhov ceev ntawm cov qauv kuj tseem ceeb heev rau cov khoom siv graphite semiconductor. Peb-petal Graphite Crucible yog tsim los ntawm kev siv cov graphite uas muaj qhov ceev ceev, nplua-grained isostatically nias nrog cov ntsiab lus tsis huv uas tswj hwm nruj me ntsis kom txo qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm cov hlau hauv cov kab noj hniav siv lead ua. Cov txheej txheem ua tiav siab heev ua kom muaj kev kam rau siab thiab kev sib haum xeeb ntawm cov ntu, tswj kev sib dhos thiab txo qis kev xau cua sov ntawm cov interfaces. Nyob ntawm qhov xav tau ntawm ib puag ncig txheej txheem tshwj xeeb, Semixlab kuj tseem tuaj yeem koom ua ke cov txheej txheem tiv thaiv nto (SiC txheej, TAC txheej, Pyrolytic Carbon Txheej) los txhim kho kev tiv thaiv oxidation thiab ntev lub neej.

Semixlab's Three-petal Graphite Crucible yog ib qho khoom siv thev naus laus zis txhim khu kev qha rau kev tsim cov khoom siv silicon CZ niaj hnub. Lub caij no, Semixlab cog lus tias yuav muab cov thev naus laus zis ua ntej thiab cov khoom lag luam tshwj xeeb rau cov txheej txheem loj hlob ntawm cov siv lead ua los ntawm semiconductor. Peb tos ntsoov yuav los ua koj tus khub mus sij hawm ntev hauv Suav teb.

Specifications
Lub cev muaj zog ntawm isostatic graphite
Khoom Tsev Tus Nqi Qub
Kev ceev ntau g / cm³ 1.83
Hardness H.S.D. 58
Hluav taws xob Resistivity μΩ m 10
Kev Ua Tau Zoo MPa 47
Hloov zog MPa 103
Tensile Zog MPa 31
Young's Modulus GPa 11.8
Thermal Expansion (CTE) 10-6K-1 4.6
Thermal Kev Coj Ua W·m-1· K-1 130
Nruab Nrab Loj Loj μm 8-10
Porosity % 10
Tshauv Ntsiab Lus ppm ≤5 (tom qab ua kom huv)
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