Quartz Insulator Pedestal 300mm

Lub AMAT Quartz Insulator Pedestal 300mm (Part No. 0200-14197) yog ib qho khoom siv quartz uas muaj kev ua haujlwm zoo, muaj kev ntshiab siab uas tsim los siv rau hauv 300mm semiconductor process equipment, suav nrog PVD, CVD, thiab plasma etching systems.

Ua ib qho tseem ceeb ntawm cov qauv thiab kev ua haujlwm hauv lub chamber, qhov khoom no sib xyaw ua ke kev txhawb nqa tshuab, kev rwb thaiv hluav taws xob, thiab kev cais cov txheej txheem rau hauv ib qho kev daws teeb meem siab. Nws yog tsim tshwj xeeb los ua kom tau raws li cov kev cai nruj ntawm kev tsim cov wafer siab heev, qhov twg kev ruaj khov ntawm cov txheej txheem, kev tswj kev ua qias tuaj, thiab kev ntseeg siab ntawm cov khoom siv yog qhov tseem ceeb.

Ntawm Semixlab, peb tsim cov khoom siv quartz pedestal siv cov khoom siv ultra-high purity fused quartz thiab cov thev naus laus zis siab heev los xyuas kom meej tias muaj qhov tseeb zoo heev, kev ua haujlwm dielectric, thiab kev ua haujlwm ntev nyob rau hauv cov chaw plasma hnyav.

Vim li cas thiaj xaiv Semicera Semiconductor?

Semixlab muab kev txawj ntse ntawm cov ntaub ntawv, kev paub txog cov txheej txheem semiconductor, thiab kev tsim khoom kom raug los xa cov khoom siv quartz txhim khu kev qha rau cov fab siab heev.

Peb zoo:

● Kev tswj cov khoom siv quartz uas muaj purity siab heev

● Kev ua haujlwm kom ruaj khov rau qhov loj me tseem ceeb

● Kev ua tau zoo uas tau lees paub hauv cov ntawv thov plasma-intensive

● Cov kev daws teeb meem OEM-sib xws rau AMAT platforms

● Kev muab khoom thoob ntiaj teb thiab kev txhawb nqa engineering ruaj khov

Daim Ntawv Thov Txheej Txheem & Txoj Haujlwm Chav

Lub Quartz Insulator Pedestal feem ntau yog siv rau hauv cov txheej txheem tsim khoom semiconductor pem hauv ntej, tshwj xeeb tshaj yog nyob rau hauv cov chaw muaj RF plasma, cov xwm txheej siab, thiab kev ua haujlwm nqus tsev.

Txoj Haujlwm Hauv Chav

Cov khoom no tau teeb tsa rau hauv qab ntawm chav ua haujlwm, feem ntau yog hauv qab lossis nyob ib puag ncig lub rooj sib dhos txhawb nqa wafer (piv txwv li, electrostatic chuck lossis theem cua sov).

Nws ua haujlwm nyob ze rau:

● Thaj chaw tuav wafer

● Lub electrostatic chuck (ESC) lossis cov qauv pedestal

● Cov cheeb tsam plasma uas siv RF

Lub Luag Haujlwm hauv Kev Tsim Kho Khoom Siv

Hauv lub kaw lus chamber, Quartz Insulator Pedestal ua haujlwm ua qhov sib txuas tseem ceeb ntawm cov khoom siv hluav taws xob thiab cov qauv kho tshuab uas tau av.

Nws txoj haujlwm ua rau nws muaj peev xwm:

● Tshem tawm cov khoom siv hluav taws xob siab lossis RF

● Txhawb nqa kev ua haujlwm ntawm theem wafer

● Tswj kom muaj ib puag ncig ruaj khov thiab tswj tau cov txheej txheem

Cov Haujlwm Tseem Ceeb & Cov Kev Zoo ntawm Kev Ua Haujlwm

1) Kev rwb thaiv hluav taws xob hauv RF Plasma Ib puag ncig

Ib qho ntawm cov haujlwm tseem ceeb tshaj plaws ntawm cov khoom no yog los muab cov dielectric zog rwb thaiv tsev siab hauv cov kab ke ua haujlwm hauv qab RF bias thiab plasma tej yam kev mob.

● Tiv thaiv kev xau hluav taws xob thiab txoj kev tam sim no uas tsis xav tau

● Txo qhov kev pheej hmoo ntawm kev arcing thiab plasma tsis ruaj khov

● Xyuas kom meej tias muaj kev faib tawm ntawm RF teb sib xws

Qhov Tshwm Sim: Txhim kho qhov ua tau rov ua dua ntawm cov txheej txheem thiab kev nyab xeeb ntawm cov khoom siv

2) Kev Txhawb Nqa Mechanical & Kev Ruaj Ntseg ntawm Cov Qauv

Ua ib feem ntawm lub rooj sib txoos pedestal, cov khoom muab:

● Kev txhawb nqa ruaj khov rau cov txheej txheem tuav wafer

● Kev ntsuas qhov ntev siab kom tswj tau qhov sib phim

● Kev tiv thaiv kev hloov pauv hauv qab kev hloov pauv thermal

Qhov Tshwm Sim: Kev txhim kho qhov tseeb ntawm wafer thiab kev sib npaug ntawm zaj duab xis

3) Kev Sib Xws ntawm Plasma & Kev Tswj Xyuas Kev Ua Paug

Ua los ntawm ultra-high purity quartz, cov khoom no muaj:

● Cov qib tsis muaj hlau ntau

● Kev tiv thaiv zoo heev rau kev puas tsuaj ntawm cov ntshav

● Tsawg kawg nkaus tsim cov khoom me me

Qhov Tshwm Sim: Txo qhov kev pheej hmoo ntawm kev ua qias tuaj thiab txhim kho cov wafer yield

4) Kev Ua Haujlwm Rho Tawm Kub

Quartz inherently exhibits low thermal conductivity, tso cai rau lub pedestal rau:

● Cais cov cua sov hloov ntawm lub tshuab cua sov/ESC thiab cov qauv chamber

● Tswj cov wafer ruaj khov ताप profiles

● Txo qhov kev ntxhov siab thermal hauv lub cev

Qhov Tshwm Sim: Kev tswj cov txheej txheem zoo dua thiab lub neej ntawm cov khoom siv ntev dua