0200-09977 Quartz Npog 200mm Notch

Lub AMAT 0200-09977 Quartz Cover 200mm Notch yog ib qho khoom siv fused quartz uas muaj purity siab uas tsim los rau cov khoom siv semiconductor plasma processing. Nws yog ib feem ntawm pawg ntawm cov khoom siv quartz cover, uas ua haujlwm ua cov khoom tiv thaiv thiab ua kom ib puag ncig ruaj khov hauv cov etch chambers.

Tsim los rau 200mm wafer platforms, cov khoom no muaj qhov tsim qauv meej, ua kom haum raws li qhov kev taw qhia wafer thiab sib xws nrog cov txheej txheem tuav chamber.

Tsim tawm raws li kev tswj hwm zoo, lub hau quartz no yog qhov zoo tshaj plaws rau:

● Kev raug mob plasma muaj zog heev

● Cov chaw muaj tshuaj lom neeg (piv txwv li, cov pa roj uas muaj fluorine thiab chlorine)

● Kev hloov pauv thermal rov ua dua hauv cov txheej txheem semiconductor

Ntawm Semixlab Technology, cov khoom no yog tsim los ntawm kev siv:

● Cov khoom siv quartz uas muaj purity siab heev los txo cov kev pheej hmoo ntawm kev ua qias tuaj

● Kev ua haujlwm kom raug kom ntseeg tau tias muaj kev kam rau siab thiab OEM sib xws

● Kev ua kom tiav nto zoo heev kom txo tau cov khoom me me

Qhov no ua kom ntseeg tau tias muaj kev ua tau zoo thiab rov ua dua hauv cov chaw tsim khoom semiconductor uas nyuaj heev.

Txoj Haujlwm hauv Cov Khoom Siv thiab Lub Luag Haujlwm

Teeb Chaw

Lub Quartz Cover feem ntau yog ntsia:

● Nyob ib ncig ntawm lossis siab dua thaj tsam ntug wafer

● Nyob ze ntawm lub electrostatic chuck (ESC)

● Nyob rau hauv thaj chaw uas muaj plasma nyob rau hauv lub etch chamber

Nws ua haujlwm ua ib feem ntawm kev tiv thaiv chav thiab kev tswj hwm ib puag ncig ntug, feem ntau ua haujlwm ua ke nrog cov nplhaib tsom thiab cov nplhaib duab ntxoov ntxoo.

Txoj Haujlwm Tseem Ceeb

1. Kev Tiv Thaiv Chav (Lub Luag Haujlwm Tseem Ceeb)

Lub Quartz Cover ua haujlwm ua ib qho kev tiv thaiv kev txi, tiv thaiv kev raug ncaj qha ntawm cov khoom tseem ceeb (piv txwv li, ESC, phab ntsa chamber) rau:

● Plasma ion bombardment

● Kev xeb los ntawm tshuaj lom neeg

● Hlau sputtering

Qhov Tshwm Sim: Lub neej ntev ntawm cov khoom siv hauv chav tsev muaj nqis thiab txo qhov kev pheej hmoo ntawm kev ua qias tuaj.

2. Kev Ruaj Ntseg Ib puag ncig ntawm ntug

Los ntawm nws cov geometry thiab qhov chaw, cov khoom no pab:

● Tswj cov plasma density ze ntawm ntug wafer

● Tswj kom muaj kev faib roj sib xws hauv thaj chaw ntug

Qhov Cuam Tshuam: Txhim kho qhov ua tau rov ua dua ntawm cov txheej txheem thiab txo qhov sib txawv ntawm ntug.

3. Kev Tswj Xyuas Cov Pa Roj thiab Cov Khoom Siv Los Ntawm

Cover Quartz muaj feem cuam tshuam rau:

● Cov qauv roj ntws hauv zos

● Tus cwj pwm tso tawm ntawm cov khoom lag luam txheej txheem

Cov txiaj ntsig: Txo cov polymer tsis xav tau thiab txhim kho qhov huv ntawm chav tsev thaum lub sijhawm khiav ntev.

4. Tsim Notch rau Kev Sib Tov thiab Kev Sib Xws

Cov qauv notch integrated ua rau:

● Kev sib phim nrog wafer notch orientation

● Kev sib raug zoo nrog cov pins nqa thiab cov txheej txheem tuav wafer

● Kev sib xyaw ua ke nrog cov khoom sib txuas ntawm ntug

Qhov Tseem Ceeb: Xyuas kom ruaj khov thiab qhov chaw tseeb hauv lub rooj sib dhos.

Hom Kev Ua Tsis Zoo

Raws li ib qho khoom siv tau ua haujlwm nyob rau hauv cov xwm txheej plasma hnyav, Quartz Cover yog raug rau cov txheej txheem degradation kwv yees tau:

1. Kev puas tsuaj los ntawm Plasma

● Kev siv ion bombardment tas mus li ua rau qhov chaw ntxhib

● Kev poob ntawm cov khoom maj mam hloov pauv geometry

Kev Cuam Tshuam: Kev hloov pauv ntawm cov pa roj thiab cov cwj pwm plasma, uas yuav cuam tshuam rau kev ruaj khov ntawm cov txheej txheem.

2. Kev Tso Tawm thiab Kev Ua Phem ntawm Cov Khoom Siv Los Ntawm Lwm Yam

● Kev sib sau ua ke ntawm cov polymer lossis cov khoom lag luam uas cuam tshuam los ntawm kev ua haujlwm

● Cov nyiaj tso tawm yuav poob thaum lub sijhawm ua haujlwm

Kev Cuam Tshuam: Cov khoom me me ua rau muaj kuab paug thiab ua rau muaj qhov tsis zoo ntxiv rau ntawm cov wafers.

3. Kev tawg ntawm kev ntxhov siab thermal

● Kev ua kom sov thiab txias rov ua dua ua rau muaj kev ntxhov siab sab hauv

● Tej kab nrib pleb me me yuav tshwm sim thiab nthuav dav

Kev Cuam Tshuam: Kev pheej hmoo ntawm kev tawg tam sim ntawd thiab lub sijhawm tsis ua haujlwm ntawm cov khoom siv uas tsis tau npaj tseg.

4. Kev Tsim Cov Khoom Me Me Los Ntawm Kev Poob Qis ntawm Cov Khoom Siv

● Kev raug tshuaj ntev ua rau lub quartz tsis muaj zog

● Cov pob txha tawg me me tso cov khoom me me rau hauv chav

Qhov Cuam Tshuam: Kev poob ntawm cov khoom tsim tau thiab txo qis kev ntseeg tau ntawm cov khoom siv.

Vim li cas ho xaiv Semixlab Technology?

Nrog kev txawj ntse tob hauv cov ntaub ntawv semiconductor thiab cov khoom siv txheej txheem, Semixlab Technology muab cov khoom siv quartz zoo uas ua tau raws li qhov xav tau ntawm cov fab niaj hnub no:

● Ultra-high purity quartz rau cov ntawv thov uas rhiab heev rau kev ua qias tuaj

● Cov qauv tsim kho kom raug rau kev ua haujlwm ntawm chav sib xws

● Lub neej ua haujlwm ntev dua los txo tus nqi ntawm kev muaj (CoO)

● Cov kev daws teeb meem OEM-sib xws rau kev sib koom ua ke nrog AMAT systems

Peb cov khoom siv Quartz Cover tau ntseeg siab los ntawm cov tuam txhab tsim khoom semiconductor uas tab tom nrhiav lwm txoj hauv kev txhim khu kev qha, pheej yig yam tsis muaj kev cuam tshuam rau kev ua tau zoo.