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0200-10377 Lub nplhaib ib leeg 195 hli DPS Chamber
Ntawm Semixlab, peb muab cov khoom siv semiconductor ceramic ua haujlwm siab uas tsim los rau cov chaw ua haujlwm plasma uas xav tau ntau. Peb lub AMAT 0200-10377 Ring Single 195mm DPS Chamber yog tsim los rau Applied Materials (AMAT) DPS etching systems, xa cov plasma stability zoo heev, kev tiv thaiv chamber, thiab kev sib xws ntawm cov txheej txheem rau kev tsim khoom semiconductor siab heev.
Hauj lwm
Tsim los ntawm cov khoom siv ceramic semiconductor-qib siab purity thiab cov thev naus laus zis precision machining, cov khoom siv ceramic ring no muaj kev tiv thaiv zoo rau plasma erosion, thermal cycling, thiab particle generation hauv cov chaw qhuav etching.
Lub AMAT 0200-10377 Ring Single 195mm DPS Chamber yog ib qho khoom siv ceramic ring uas siv rau hauv AMAT DPS (Decoupled Plasma Source) systems rau 200mm wafer processing applications.
Ntsiab Nta:
● Cov khoom siv ceramic uas muaj cov khoom huv si
● Kev sib raug zoo ntawm RF plasma zoo heev
● Tsawg kev ua qias tuaj thiab kev tsim cov khoom me me
● Kev tiv thaiv kev tawg ntawm cov ntshav zoo heev
● Kev ruaj khov kho tshuab thiab thermal siab
● Kev ua haujlwm kom raug rau kev koom ua ke ntawm DPS chamber
Lub Luag Haujlwm hauv AMAT DPS Systems
Hauv AMAT DPS plasma etching systems, lub Ring Single 195mm Ceramic Component ua haujlwm ua ib qho tseem ceeb ntawm kev tswj plasma thiab kev tiv thaiv chav.
Kev Tswj Xyuas Ntug Plasma
Lub nplhaib ceramic pab ua kom zoo dua qhov kev faib tawm plasma ze ntawm ntug wafer, txhim kho qhov sib xws ntawm etching thiab txo qhov kev hloov pauv ntawm ntug thaum lub sijhawm ua cov plasma siab.
ESC & Kev Tiv Thaiv Chav
Nruab ib ncig ntawm thaj chaw electrostatic chuck (ESC), lub nplhaib ua haujlwm ua ib qho kev tiv thaiv tiv thaiv cov tshuaj plasma uas muaj zog, pab txo qhov kev puas tsuaj ntawm chav thiab ua kom lub neej ntawm cov khoom siv ntev dua.
Kev Ruaj Ntseg Plasma RF
Nrog cov yam ntxwv dielectric ruaj khov, lub nplhaib ceramic pab txhawb rau kev txhim kho RF coupling thiab plasma stability hauv DPS chamber.
Kev Txo Kev Ua Phem
Nws cov qauv ceramic uas muaj purity siab txo qhov kev tsim cov khoom me me thiab cov hlau ua qias tuaj, txhawb nqa cov kev xav tau kev huv ntawm cov txheej txheem semiconductor.
Cov Ntawv Thov Ib Txwm Muaj Hauv Cov Txheej Txheem Semiconductor
Lub AMAT 0200-10377 Ring Single 195mm DPS Chamber siv dav hauv kev siv tshuab etching qhuav thiab plasma processing, suav nrog:
Dielectric Etching: Txhawb nqa tus cwj pwm plasma ruaj khov thaum lub sijhawm oxide thiab dielectric txheej etching txheej txheem.
Oxide & Contact Etch: Pab txhim kho qhov sib xws ntawm etch thiab kev tswj hwm ntug wafer hauv kev sib cuag thiab ntawm cov txheej txheem tsim.
Kev Txiav Hlau: Muab kev tiv thaiv chav thiab kev ruaj khov ntawm cov txheej txheem hauv cov chaw ua hlau plasma etching.
Kev Ua Haujlwm Plasma Siab Tshaj Plaws: Haum rau cov ntawv thov plasma siab uas xav tau kev ua qias tuaj tsawg thiab kev ua haujlwm RF ruaj khov.
200mm Semiconductor Kev Tsim Khoom: Zoo rau AMAT DPS cov txheej txheem ua cov wafers 8-nti hauv cov semiconductor fabs.
Vim li cas Semixlab?
Semixlab tshwj xeeb hauv cov khoom siv semiconductor ceramic rau plasma etching, deposition, thiab cov khoom siv thermal processing.
Peb muab:
● Cov khoom siv ceramic semiconductor-grade
● Kev ua haujlwm precision machining muaj peev xwm
● Cov khoom siv semiconductor uas siv tau rau OEM
● Kev tswj xyuas zoo ruaj khov
● Cov kev daws teeb meem ceramic uas hloov kho raws li koj xav tau
Peb lub hom phiaj yog txhawb nqa cov chaw tsim khoom semiconductor nrog cov khoom siv txhim khu kev qha, ua tau zoo rau cov khoom siv tsim wafer tiam tom ntej.
peb pab
