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CVD SiC-Coated Wafer Carrier
Semixlab's CVD SiC coated wafer carrier yog ib qho khoom siv graphite ua tau zoo uas tsim tshwj xeeb rau semiconductor epitaxy thiab high-temperature deposition. Nws muab cov txiaj ntsig thermal ntawm high-purity isostatic graphite nrog rau cov tshuaj lom neeg resilience ntawm cov txheej silicon carbide ntom ntom uas siv los ntawm kev tso cov pa tshuaj lom neeg. Lub carrier tau txais kev pom zoo dav dav rau SiC, GaN, thiab silicon epitaxy, nrog rau kev tsim cov khoom sib xyaw semiconductor. Nws haum rau cov chaw lag luam loj thiab tuaj yeem hloov kho rau cov neeg siv khoom luam tawm thiab cov kev xav tau ntawm qhov ntev.
Hauj lwm
Hauv kev xyaum ua, Semixlab's CVD SiC coated wafer carrier ua haujlwm ua lub platform ruaj khov, tsis muaj kuab paug rau wafers thaum lub sijhawm loj hlob epitaxial, CVD, PVD, thiab cov txheej txheem zoo sib xws. Nws pab tswj kom muaj qhov kub thiab txias sib npaug thoob plaws wafer, txo qhov kev pheej hmoo ntawm cov khoom me me, thiab txuas ntxiv lub neej siv tau ntawm qhov khoom txawm tias nyob hauv cov chaw ua haujlwm reactor hnyav.
Ntawm ib nrais muag
Lub npe khoom: CVD SiC-coated wafer carrier
Kuj tseem hu ua: SiC-coated graphite wafer carrier, epitaxy carrier, graphite wafer holder, SiC-coated susceptor, semiconductor wafer carrier
Cov khoom siv hauv paus: High-purity isostatic graphite nrog CVD SiC txheej
Qhov kub ua haujlwm ntau yam: 1000 ° C - 1600 ° C
Cov ntawv thov tseem ceeb: SiC epitaxy, GaN MOCVD, silicon epitaxy, CVD/PVD cov txheej txheem, cov khoom siv semiconductor dav dav
Cov yam ntxwv tseem ceeb
● Txheej CVD SiC - Cov txheej no yog ib txheej tuab thiab ntshiab heev uas kaw tau zoo rau lub graphite substrate. Nws tiv taus kev tawm tsam los ntawm tshuaj lom neeg thiab txo qhov poob ntawm cov khoom me me thaum lub sijhawm thermal cycling.
● Kev ruaj khov kub - Tus neeg nqa khoom tuav nws qhov kev ncaj ncees thiab cov khoom siv kho tshuab ntawm qhov kub siab tshaj 1400 ° C, uas yog qhov tseem ceeb rau kev khiav epitaxial tas mus li.
● Kev huv ntawm qhov chaw - Nrog rau qib kev tsis huv hauv qhov ntau ntawm ib feem-ib-billion, qhov chaw SiC txo qhov kev pheej hmoo ntawm kev doping lossis kev ua qias tuaj uas tsis xav tau, txhawb nqa ncaj qha rau cov txiaj ntsig wafer siab dua.
● Tshuaj lom neeg thiab kev hnav tsis kam - Lub txheej txheem sawv ntsug zoo tiv thaiv hydrogen, ammonia, chlorides, thiab lwm yam tsiaj txhu uas feem ntau ntsib hauv cov chav reactor.
● Kev sib npaug ntawm cov cua sov - Lub graphite core muab cov thermal conductivity siab, thaum SiC txheej ua kom muaj kev faib tawm cua sov sib npaug, pab ua kom tiav cov zaj duab xis tuab thiab cov qauv doping.
● Lub neej ua haujlwm ntev dua - Piv nrog cov graphite hloov pauv, cov khoom siv coated kav ntev dua, uas txhais tau tias muaj tsawg dua qhov hloov pauv thiab qis dua cov nqi siv mus sij hawm ntev.
Vim Li Cas Nws Sawv Lawm
● Cov khoom siv raw semiconductor-qib
● Cov txheej txheem CVD SiC uas tuab thiab tsis muaj qhov pinhole nrog cov tuab sib npaug
● Kev ua kom sov tau zoo rau kev hloov pauv cua sov sai
● Kev tiv thaiv zoo heev rau cov pa roj corrosive
● Tsawg cov khoom me me - pab kom cov txheej txheem huv dua
● Tiv thaiv kev poob siab zoo
● Lub neej ua haujlwm ntev
● Sib xws nrog ntau hom reactor qauv
● Qhov loj me raws li qhov xav tau
Txog Semixlab
Peb tshwj xeeb hauv kev daws teeb meem txheej txheem siab heev thiab cov khoom siv graphite precision rau semiconductor, hluav taws xob hluav taws xob, thiab kev lag luam crystal-growth. Peb lub zog suav nrog:
● Kev txawj ntse hauv CVD SiC txheej txheem
● Kev ua kom raug thiab kev ua tiav ntawm graphite
● Kev tswj xyuas zoo raws li cov qauv kev lag luam semiconductor
● Kev txhawb nqa kev tsim kho tshwj xeeb - txij li kev tsim qauv mus rau kev tsim khoom ntau
● Kev paub tob txog kev siv cov txheej txheem epitaxial
● Kev ntseeg tau thoob ntiaj teb cov saw hlau
Txawm koj tab tom tsim ib txoj kev tshiab lossis nthuav dav cov khoom uas twb muaj lawm, peb muab cov kev daws teeb meem wafer uas tsim los txhim kho kev ruaj khov ntawm cov txheej txheem, txo qhov tsis zoo, thiab siv koj cov khoom siv kom zoo tshaj plaws.
Specifications
| Cov yam ntxwv ntawm lub cev ntawm CVD SiC txheej | |
| Khoom | Tus Nqi Qub |
| Crystal Structure | FCC β theem polycrystalline, feem ntau (111) taw qhia |
| ceev | 3.21 g / cm³ |
| Hardness | 2500 Vickers hardness (500g load) |
| Nthuav Loj | 2 ~ 10μm |
| Tshuaj Purity | 99.99995% |
| Peev Xwm Kub | 640 XNUMXj kg-1· K-1 |
| Sublimation kub | 2700 ℃ |
| Kev Ua Tau Zoo | 415 MPa RT 4-point |
| Hluas lub Modulus | 430 Gpa 4pt khoov, 1300 ℃ |
| Thermal Kev Coj Ua | 300 Wm-1· K-1 |
| Thermal Expansion (CTE) | 4.5 × 10-6K-1 |
daim ntawv sau npe
Cov Khoos phaub Siv
SiC epitaxy - Tus neeg nqa khoom yog qhov haum rau cov kab ke loj hlob silicon carbide, qhov twg ob qho tib si kev ruaj khov ntawm qhov kub thiab kev tswj hwm kev ua qias tuaj yeem tsis sib tham tau.
GaN MOCVD - Rau LED thiab cov khoom siv fais fab, nws muab kev ua haujlwm thermal ruaj khov thiab kev ua haujlwm txhim khu kev qha hauv cov huab cua uas muaj ammonia ntau, hydrogen.
Silicon epitaxy - Kuj tsim nyog rau cov txheej txheem tso silicon ib txwm muaj uas xav tau kev tswj hwm qhov kub thiab txias thiab kev huv si.
Cov khoom siv CVD/PVD - Nws muab kev tso rau ntawm wafer kom ruaj ntseg thiab kev sib cuag thermal tas li thoob plaws ntau lub voj voog deposition.
peb pab
Semixlab khoom khw
