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SiC Coated Ib Nrab Hli Cheebtsam
LPE Half Moon Components yog cov khoom siv reactor uas tsim los rau cov chaw kub siab semiconductor epitaxy. Ua los ntawm cov graphite isostatic siab thiab tiv thaiv los ntawm cov txheej SiC tuab, cov khoom no ua lub luag haujlwm tseem ceeb hauv kev ua kom zoo dua qhov kev faib tawm thermal, tswj cov roj ntws dynamics, thiab txo cov khoom me me hauv LPE, CVD, thiab MOCVD epitaxy systems. Lawv cov geometry ib nrab-hli yog tsim tshwj xeeb los txhim kho cov txheej txheem sib xws, txo cov teebmeem ntug, thiab txhim kho cov txheej epitaxial zoo rau cov ntawv thov uas muaj Si, SiC, thiab GaN cov ntaub ntawv. Peb tos ntsoov rau koj qhov kev nug ntxiv.
Hauj lwm
Cov khoom siv SiC coated ib nrab hli no yog cov khoom siv graphite precision siv rau hauv cov tshuaj SiC epitaxy kub siab. Thaum ntsia rau hauv thaj chaw kub ntawm lub reactor, lawv pab ua kom lub chamber ruaj khov, tswj kev sib npaug ntawm thermal, thiab txhawb nqa cov roj ntws tas li thoob plaws lub sijhawm tsim khoom ntev.
Lawv tau ua los ntawm graphite uas muaj cov khoom siv siab thiab muaj CVD SiC txheej rau saum. Yog tias koj tab tom khiav lub reactor platform uas sib xws nrog LPE SpA-type epitaxy systems, cov khoom no tuaj yeem hloov pauv ncaj qha lossis kho raws li qhov xav tau.
Ntsiab nta
-High-purity isostatic graphite substrate
-Cov txheej txheem tiv thaiv CVD SiC tuab
-Zoo tsis kam rau thermal shock
-Cov khoom me me uas tsis tshua muaj nyob rau hauv kev ua haujlwm
-Txheej txheej nyob zoo
-Ua haujlwm zoo rau lub voj voog ntev epitaxy
Peb muab dab tsi?
Peb ua ntau yam khoom siv reactor uas haum rau LPE-style chamber qauv:
- Cov khoom ntawm lub hli ib nrab
-Kev tiv thaiv npog
-Cov khoom qhia ntws
-Qhov chaw txhawb nqa Wafer
-Shielding rings
- Kev sib dhos graphite tshwj xeeb
Manufacturing
Txhua qhov khoom raug tshuab ua ntej los ntawm cov qib graphite xaiv, tom qab ntawd coated nrog CVD SiC, thiab thaum kawg kuaj xyuas qhov loj me. Peb tswj cov tuab ntawm txheej, qhov xwm txheej ntawm qhov chaw, thiab qhov loj me tseem ceeb kom ntseeg tau tias muaj kev ua tau zoo tas li hauv cov chaw tsim khoom semiconductor.
Kev Pabcuam Kev Cai
Peb tuaj yeem pab nrog:
- Kev tsim khoom hloov OEM
- Kev kho kom haum raws li koj cov duab kos
- Kev tsim kho dua tshiab los ntawm cov qauv
-Kev txhawb nqa ntau lawm
Specifications
Cov Kev Ntsuas Txuj Ci Ib Txwm Muaj
| parameter | Tus Nqi Qub |
| Khoom Siv Hauv Paus | Cov khoom siv graphite isostatic siab purity |
| Txheej | CVD SiC |
| Kev Ntshiab ntawm Txheej | > 99.99999% |
| Qhov Ceev (Graphite) | 1.75-1.90g / cm³ |
| Kev khiav hauj lwm Kub | Kub txog li 2000°C+ |
| Txheej Thickness | 50 – 200 μm (kho tau) |
| Nto Roughness (Ra) | Tswj tau ib daim ntawv thov |
| Adhesion zog | Tsis muaj delamination nyob rau hauv thermal cycling |
| Tshuaj tiv thaiv | Ruaj khov hauv H₂, Si-muaj cov pa roj |
daim ntawv sau npe
Cov khoom no siv dav hauv:
-SiC epitaxy reactors
-Cov khoom siv CVD semiconductor
-Cov txheej txheem loj hlob ntawm cov siv lead ua kub siab
Lawv tshwj xeeb tshaj yog tsim rau cov reactor platforms sib xws nrog LPE SpA epitaxy khoom siv.
peb pab
Semixlab khoom khw
