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CVD sic coated cub tawg raj
Cov raj cua sov Semixlab CVD SiC Coated yog tsim los rau cov txheej txheem ua haujlwm thermal semiconductor siab heev uas cov khoom siv purity, thermal stability, thiab tshuaj lom neeg tsis kam yog qhov tseem ceeb rau kev ua haujlwm thiab cov khoom siv. Cov raj cua sov no yog tsim los ntawm kev siv cov khoom siv graphite isostatic siab, thiab tau txhim kho nrog cov tshuaj lom neeg vapor deposited (CVD) silicon carbide txheej. Hauv cov txheej txheem ua haujlwm thermal siab heev, suav nrog diffusion, oxidation, epitaxy, thiab SiC / GaN crystal growth equipment, Semixlab cov raj cua sov ua haujlwm ua cov khoom tseem ceeb rau kev tswj hwm cov txheej txheem sib xws thiab kev tswj hwm kev ua qias tuaj. Peb txais tos koj cov lus nug.
Hauj lwm
Ntawm Semixlab, peb tshwj xeeb hauv kev muab cov raj xa hluav taws xob CVD SiC Coated Furnace Tubes uas ua haujlwm tau zoo uas tsim los rau cov chaw tsim khoom semiconductor uas xav tau kev kub ntxhov. Kev sib xyaw ua ke ntawm cov khoom siv muaj zog nrog cov txheej txheem Chemical Vapor Deposited (CVD) Silicon Carbide uas huv heev, peb cov raj xa hluav taws xob muab kev ruaj khov thermal zoo heev, tiv taus corrosion, tswj kev ua qias tuaj, thiab lub neej ua haujlwm ntev.
Tsim los rau cov ntawv thov ua kom sov siab heev, Semixlab CVD SiC coated furnace tubes siv dav hauv cov cub tawg diffusion, oxidation systems, epitaxy reactors, SiC crystal growth equipment, thiab high-temperature vacuum processing systems.
Cov Tubes Rauv Uas Muaj CVD SiC Coated Yog Dab Tsi?
Lub raj xa dej CVD SiC coated yog cov qauv sib xyaw ua ke uas muaj cov khoom siv substrate xaiv zoo (High-Purity Isostatic Graphite) coated nrog ib txheej tuab ntawm high-purity Silicon Carbide (SiC) los ntawm Chemical Vapor Deposition technology.
Ntawm cov khoom siv no, cov graphite isostatic siab ua ke nrog CVD SiC txheej tau lees paub dav dav tias yog ib qho ntawm cov kev daws teeb meem zoo tshaj plaws rau cov khoom siv ua thermal semiconductor. Cov yam ntxwv ntawm lub cev ntawm CVD SiC Coated Furnace Tubes
Cov Nto Uas Muaj Kev Ntshiab Siab CVD Silicon Carbide
Cov txheej txheem CVD SiC muab:
● Muaj kev huv huv heev nrog rau kev ua qias tuaj tsawg heev ntawm cov hlau
● Cov qauv me me uas ntom thiab tsis muaj qhov porous
● Kev tiv thaiv oxidation zoo heev
● Kev tiv thaiv zoo heev rau cov pa roj uas ua rau cov txheej txheem corrosive
● Kev ua haujlwm tsawg ntawm cov khoom me me
● Cov Khoom Siv Graphite Isostatic Purity Siab
Isostatic Graphite substrate pab txhawb rau:
● Kev ua tau zoo heev ntawm cov cua sov
● Kev faib cua sov sib npaug
● Kev tiv taus kub siab
● Kev ntxhov siab tsawg ntawm thermal expansion
● Cov qauv sib dua tab sis ruaj khov
Qhov kev sib xyaw ua ke no ua rau cov raj cua sov ua haujlwm tau zoo hauv qhov kub siab tshaj 1400 ° C thaum tswj kev ruaj khov thiab kev ua haujlwm huv.
Vim li cas ho xaiv Semixlab?
Semixlab tsom mus rau kev muab cov ntaub ntawv siab heev thiab cov khoom siv precision rau cov khoom siv tsim khoom semiconductor.
Peb lub zog muaj xws li:
● Kev txawj ntse hauv cov khoom siv semiconductor thermal processing
● Kev tsim cov khoom siv graphite thiab SiC uas muaj cov khoom huv si
● Kev siv tshuab txheej txheem CVD siab heev
● Kev daws teeb meem kev tsim kho tshwj xeeb
● Kev ruaj khov zoo thiab kev xa khoom txhim khu kev qha
● Kev txhawb nqa rau SiC, GaN, silicon, thiab cov ntawv thov semiconductor sib xyaw
Los ntawm kev sib txuas cov kev txawj ntse txog kev tshawb fawb txog cov khoom siv nrog kev paub txog kev lag luam semiconductor, Semixlab pab cov neeg siv khoom txhim kho kev ruaj khov ntawm cov txheej txheem, txo cov kev pheej hmoo ntawm kev ua qias tuaj, thiab txuas ntxiv lub neej ua haujlwm ntawm cov khoom siv.
Txawm koj tab tom tsim cov cub tawg diffusion, epitaxy reactors, SiC crystal growth systems, lossis cov khoom siv ua thermal processing siab heev, Semixlab xa cov kev daws teeb meem CVD SiC coated furnace tube uas tsim los kom ua tau raws li cov kev cai nruj ntawm kev tsim khoom semiconductor niaj hnub no.
Tiv tauj Semixlab hnub no los tham txog koj cov kev xav tau ntawm daim ntawv thov thiab tshawb nrhiav seb peb cov raj xa dej semiconductor-grade CVD SiC coated tuaj yeem txhim kho koj cov txheej txheem kev ua haujlwm thiab kev ntseeg siab ntawm kev ua haujlwm li cas.
Specifications
| Cov yam ntxwv ntawm lub cev ntawm CVD SiC txheej | |
| Khoom | Tus Nqi Qub |
| Crystal Structure | FCC β theem polycrystalline, feem ntau (111) taw qhia |
| ceev | 3.21 g / cm³ |
| Hardness | 2500 Vickers hardness (500g load) |
| Nthuav Loj | 2 ~ 10μm |
| Tshuaj Purity | 99.99995% |
| Peev Xwm Kub | 640 XNUMXj kg-1· K-1 |
| Sublimation kub | 2700 ℃ |
| Kev Ua Tau Zoo | 415 MPa RT 4-point |
| Young's Modulus | 430 Gpa 4pt khoov, 1300 ℃ |
| Thermal Kev Coj Ua | 300 Wm-1· K-1 |
| Thermal Expansion (CTE) | 4.5 × 10-6K-1 |
daim ntawv sau npe
Kev siv hauv Semiconductor Manufacturing
Qhov kev sib xyaw ua ke ntawm cov khoom siv siab-purity thiab cov txheej txheem CVD silicon carbide ua rau cov raj cua sov no ua haujlwm tau zoo thoob plaws ntau yam txheej txheem tsim khoom semiconductor. Hauv cov txheej txheem diffusion thiab thermal oxidation, qhov chaw SiC-coated muab kev tiv thaiv zoo heev rau cov huab cua oxidizing kub siab thaum txo qis kev tsim khoom me me thiab cov hlau ua qias tuaj. Qhov porosity qis thiab tshuaj inertness ntawm CVD SiC txheej pab tswj cov txheej txheem sib xws thaum lub sijhawm ntev ntawm cov voj voog tsim khoom.
Hauv cov ntawv thov kev loj hlob epitaxial, suav nrog silicon, silicon carbide (SiC), thiab kev tsim cov khoom siv semiconductor sib xyaw, kev huv ntawm lub raj cua sov thiab kev ruaj khov thermal yog qhov tseem ceeb rau kev ua tiav cov yeeb yaj kiab sib xws thiab cov txiaj ntsig rov ua dua. Lub txheej SiC ntom ntom ua haujlwm ua lub thaiv tiv thaiv cov pa roj corrosive thaum khaws cov yam ntxwv thermal uas xav tau rau kev tswj qhov kub thiab txias thoob plaws hauv chav reactor.
Rau kev tsim cov khoom siv hluav taws xob semiconductor siab heev, tshwj xeeb tshaj yog hauv kev tsim khoom siv SiC thiab GaN, cov raj xa hluav taws xob CVD SiC coated pab txhawb rau kev ruaj khov ntawm thaj chaw thermal, txo cov kev pheej hmoo ntawm kev ua qias tuaj, thiab txhim kho kev ntseeg siab ntawm cov khoom siv. Lawv lub peev xwm los tiv taus kev hloov pauv thermal rov qab hauv qab qhov kub thiab txias thiab qhov chaw nqus tsev ua rau lawv yog cov khoom siv zoo tshaj plaws rau cov kab ke loj hlob siv lead ua, cov khoom siv annealing, thiab lwm yam cuab yeej ua haujlwm thermal tseem ceeb.
peb pab
Semixlab khoom khw
