GaN / GaAs CVD SiC Coated Epitaxy Susceptor Carrier

Qhov kev tsim kho yooj yim yog qhov yooj yim heev. Peb siv lub plawv graphite uas muaj qhov ceev ceev, isostatic thiab loj hlob ib txheej β-SiC tuab rau saum toj ntawm CVD. Qhov ntawd muab rau koj qhov kev ua kom sov uas koj xav tau los ntawm graphite, thaum daim tawv nqaij SiC tswj cov tshuaj lom neeg. NH₃, H₂, thiab lwm yam uas cov txheej txheem pov rau nws - lub txheej txheej khaws txhua yam ntawd kom deb ntawm graphite hauv qab. Qhov tshwm sim yog ib feem uas tuav tau hauv GaN, GaAs, Micro-LED, RF, thiab fais fab semiconductor fabs.

Dab tsi ua rau lawv ua haujlwm hauv lub ntiaj teb tiag?

Txog qhov huv: peb xaiv cov khoom siv graphite raw. Cov qib isostatic peb siv pib huv, thiab CVD SiC txheej xaus rau qhov ntom heev. Cov hlau tsis huv yog qhov tsawg txaus uas koj tsis tas yuav txhawj txog nws ua rau lub chamber epitaxy huv si.

Tus cwj pwm thermal tseem ceeb ib yam nkaus. Peb siv zog rau kev sib phim cov thermal profile kom lub wafer pom qhov kub sib xws thoob plaws nws qhov chaw. Kev khiav ntev ntawm qhov kub siab, cua sov sai thiab txias - tus susceptor tseem ruaj khov thoob plaws nws. Qhov kev sib xws ntawd tshwm sim hauv qhov tuab sib xws thiab kev tswj cov khoom sib xyaw khiav tom qab khiav.

Kev tawm tsam tshuaj lom neeg yog qhov kev txhawj xeeb loj tshaj plaws hauv GaN MOCVD. Yog tias koj tau pom ib feem graphite liab qab ploj mus tom qab ob peb lub voj voog, koj paub kuv txhais li cas. Lub txheej SiC hloov qhov dynamic ntawd. Nws tiv taus cov txheej txheem gases zoo dua, thiab vim tias nws tsis poob cov khoom thaum nws laus, koj tau txais tsawg dua cov khoom ntab ncig lub chamber. Lub chamber huv dua, cov txiaj ntsig zoo dua - nws yog qhov ncaj qha.

Nyob rau hauv kev siv tshuab, cov txheej txheej yuav lo. Peb tau siv zog ntau rau kev lo, yog li koj tsis ua rau mob lossis tev tawm txawm tias qhov khoom pom kev kub hnyiab. Cov qauv CVD ntom ntom kuj pab tau rau qhov ntawd. Cov neeg siv feem ntau pom lub neej ntev dua ntau zaus dua li lawv tau txais los ntawm cov graphite tsis muaj txheej, uas txhais tau tias lub sijhawm tsis ua haujlwm tsawg dua rau kev ntxuav chav thiab hloov qhov chaw.

Feem ntau koj yuav pom lawv nyob qhov twg?

GaN MOCVD thiab HVPE — LEDs, cov khoom siv fais fab, RF chips, Micro-LEDs. Cov txheej txheem kub nyob ib puag ncig 1000 ° C txog 1100 ° C, yog qhov chaw zoo tshaj plaws rau cov khoom siv no.

GaAs MOCVD — VCSELs, optical communication lasers, infrared sensors, RF parts. Cov kev xav tau thermal zoo sib xws, cov tshuaj sib txawv me ntsis, tib yam kev xav tau rau lub carrier huv si, ruaj khov.

Cov cuab yeej semiconductor kub siab dav dav - dhau ntawm tsuas yog epitaxy reactors, lawv tig mus rau hauv wafer carrier assemblies thiab thermal zone Cheebtsam qhov twg kev huv thiab thermal stability tseem ceeb.

Peb ua li cas kom qhov zoo sib xws

Koj tuaj yeem muaj cov graphite zoo tshaj plaws thiab cov tshuaj pleev xim zoo tshaj plaws, tab sis yog tias cov txheej txheem tsis tau hu rau hauv, qhov khoom yuav tsis ua haujlwm. Peb xaiv cov qib graphite raws li kev ua kom sov, qhov ceev, thiab kev ruaj khov mus sij hawm ntev. Tom qab ntawd cov kauj ruam CVD tau hloov kho rau txhua tus qauv - tshwj xeeb tshaj yog qhov tseem ceeb rau cov susceptors loj lossis txhua yam nrog cov duab geometry nyuaj. Lub hom phiaj yog kev npog sib npaug thiab kev nplaum zoo, tsis muaj cov pob nyias lossis cov npoo tsis muaj zog.

Txhua pawg khoom yuav dhau los ntawm ntau qhov kev kuaj xyuas: qhov tuab ntawm txheej, qhov ntxhib ntawm qhov chaw, qhov loj me tseem ceeb, qhov huv, thiab kev ua tiav ntawm tag nrho cov txheej. Nws tsis zoo nkauj heev, tab sis nws yog qhov ua rau cov khoom me me suav thiab cia koj rov ua koj cov txheej txheem yam tsis muaj kev xav tsis thoob.

Vim li cas ho mus nrog SiC txheej es tsis txhob siv graphite liab qab?

Hais yooj yim xwb: graphite liab qab raug noj. graphite uas muaj SiC tsis raug noj. Yog hais meej dua, koj tau txais:

● Zoo dua tiv taus cov pa roj corrosive

● Tsawg dua qhov tsim cov khoom me me dhau sijhawm

● Lub neej siv tau ntev dua ua ntej hloov pauv

● Cov txheej txheem ruaj khov dua

● Cov wafer yields siab dua thiab sib xws dua

Nws yog qhov kev sib xyaw ua ke uas ua rau muaj kev nkag siab - graphite txav cua sov, SiC siv cov tshuaj lom neeg tsis zoo. Hauv cov khoom sib xyaw semiconductor epitaxy, qhov ntawd tau dhau los ua qhov kev daws teeb meem mus-rau rau ib qho laj thawj.

customization

Peb yuav luag tsis tau ua tib yam khoom ob zaug. Feem ntau ntawm yam peb xa khoom yog ua raws li tus neeg siv khoom daim duab lossis kho kom haum rau tus qauv reactor tshwj xeeb. Peb tuaj yeem hloov kho:

● Qhov loj ntawm Wafer thiab qhov chaw teeb tsa hnab tshos

● Tus naj npawb thiab kev teeb tsa ntawm cov hnab ris

● Cov qauv ntawm cov qhov thiab cov qhov hla

● Tag nrho tuab

● Qhov yuav tsum tau ua tiav

Cov qauv thiab cov ntim ntau lawm zoo ib yam - peb yuav ua haujlwm nrog koj txawm tias koj xav tau ob peb qhov khoom sim lossis kev xa khoom tas mus li.

Lus nug cov lus nug

Lub SiC coated susceptor ua dab tsi tiag?

Nws tuav cov wafers thaum lub sijhawm epitaxial loj hlob, kis cua sov sib npaug thoob plaws qhov chaw ntawm wafer, thiab siv cov txheej SiC los tiv thaiv graphite los ntawm cov pa roj corrosive.

Vim li cas ho tsis siv cov graphite uas tsis muaj txheej?

Cov graphite uas tsis muaj txheej yuav xeb sai dhau hauv cov pa roj xws li ammonia kub thiab hydrogen. Qhov ntawd ua rau muaj cov khoom me me, ua rau lub neej luv dua, thiab ua rau cov khoom tsim tau tsawg. Cov txheej SiC daws tau tag nrho peb qhov teeb meem no.

Koj puas tuaj yeem tsim cov no rau ntau lub reactors sib txawv?

Muaj tseeb tiag. Peb kho qhov loj me, cov qauv hnab tshos, thiab cov qauv qhov kom phim txhua yam cuab yeej MOCVD lossis HVPE uas koj siv.

Lawv tsim nyog rau cov txheej txheem twg?

GaN LED, fais fab, thiab RF epi; Micro-LED; VCSEL thiab GaAs epitaxy - txhua qhov chaw koj xav tau lub tshuab nqa khoom huv si, ruaj khov ntawm qhov kub siab.