SiC Coated Graphite Carrier Rau Hnub Ci Wafer

Peb lub SiC Coated Graphite Carrier yog ib qho kev daws teeb meem txhawb nqa substrate siab uas tsim tshwj xeeb rau kev ua cov wafer hnub ci thiab cov ntawv thov semiconductor. Tsim los ntawm cov graphite qib siab thiab coated nrog ib txheej sib xws ntawm cov pa tshuaj lom neeg tso (CVD) silicon carbide (SiC), lub cab kuj no ua ke lub zog ntawm graphite nrog rau kev ruaj khov, kev ruaj khov tshuaj lom neeg, thiab kev ua haujlwm thermal ntawm SiC. Nws ua kom muaj kev tuav wafer zoo dua, lub neej ua haujlwm ntev dua, thiab kev txhim kho kev ntseeg siab hauv qhov kub thiab txias thiab qhov chaw corrosive.

Cov ntawv thov hauv Semiconductor thiab Solar Wafer Processing

Cov khoom siv graphite uas muaj SiC ua lub luag haujlwm tseem ceeb hauv kev tsim cov wafer hnub ci. Lawv tsis yog tsuas yog ua cov khoom siv wafer xwb tab sis kuj yog cov khoom tseem ceeb rau kev ua kom ruaj khov ntawm cov txheej txheem thiab cov khoom tsim tawm. Lawv cov ntawv thov tshwj xeeb suav nrog:

1. Cov Txheej Txheem Kub Siab thiab Annealing

Hauv kev tsim cov roj teeb hnub ci, kev sib kis ntawm cov tshuaj dopant thiab kev kub siab annealing yog cov kauj ruam tseem ceeb hauv kev txiav txim siab txog kev ua haujlwm ntawm cov roj teeb. Cov txheej txheem diffusion feem ntau tshwm sim ntawm qhov kub ntawm 900–1250 ° C, uas yuav tsum tau ua kom cov wafer tswj tau qhov kub thiab txias ruaj khov rau lub sijhawm ntev.

Function: Cov khoom siv graphite uas tau txheej SiC txhawb nqa cov wafers hauv cov cub tawg diffusion lossis cov cub tawg raj, kom ntseeg tau tias qhov tiaj tus thiab qhov chaw raug nyob rau hauv qhov kub siab.

Zoo: Lub graphite substrate muab kev ua kom sov zoo heev, ua kom lub wafer sov sib npaug. Lub txheej SiC tiv thaiv cov pa roj carbon tawm ntawm graphite thaum kub siab thiab hauv cov huab cua oxidizing, yog li txo qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm wafer.

2. PECVD thiab Kev Tso Zaj Duab Xis Nyias

Cov txheej txheem PECVD (plasma-enhanced chemical vapor deposition) yog ib kauj ruam tseem ceeb hauv kev tso cov silicon nitride (SiNx) anti-reflection thiab passivation txheej rau cov hnub ci cell. Cov txheej txheem no cuam tshuam ncaj qha rau kev nqus lub teeb thiab cov khoom siv sib xyaw ua ke ntawm cov hnub ci cell.

Function: Tus neeg nqa khoom graphite uas tau txheej SiC txhawb nqa lub wafer hauv chav PECVD, ua kom nws txoj haujlwm ruaj khov nyob rau hauv kev ua haujlwm ntawm cov plasma.

Zoo: Qhov chaw SiC no tiv taus cov pa roj plasma xws li hydrogen, fluorine, thiab chlorine heev, tiv taus kev xeb thiab kev tso tawm cov khoom me me. Nws qhov chaw du kuj ua rau cov zaj duab xis nyias sib xws.

3. Kev Txhawb Nqa Kev Loj Hlob ntawm CVD/Epitaxial

Kev tsim cov roj teeb hnub ci ua haujlwm tau zoo (xws li HJT, TOPCon, lossis III-V cov ntaub ntawv) cuam tshuam nrog CVD lossis MOCVD epitaxial deposition txheej txheem.

Function: Cov khoom siv graphite uas tau txheej SiC ua haujlwm ua cov khoom nqa, txhawb nqa cov wafers kom ruaj khov thaum lub sijhawm loj hlob epitaxial thiab pab txhawb kev hloov pauv cua sov thiab kev tswj cov roj ntws.

Zoo: SiC tus coefficient ntawm thermal expansion yog ze rau ntawm silicon thiab epitaxial zaj duab xis, txo cov thermal kev ntxhov siab thiab tiv thaiv kev tawg lossis delamination ntawm epitaxial txheej. Ntxiv mus, nws cov tshuaj inertness txo cov tshuaj byproducts thiab kev ua qias tuaj.

4. Kev Tswj thiab Kev Hloov Wafer

Thoob plaws hauv cov txheej txheem tsim cov wafer hnub ci, cov wafer raug xa mus rau ntau cov kauj ruam sib txawv ntau zaus. Vim tias cov wafer nyias thiab tawg yooj yim, txawm tias qhov tsis saib xyuas me me tuaj yeem ua rau chipping lossis microcracks.

Function: Cov khoom thauj graphite uas tau txheej SiC tuaj yeem ua haujlwm ua cov tais thauj khoom lossis cov cuab yeej thauj khoom loj, thauj cov wafers ntawm cov cub tawg thiab cov kauj ruam ua haujlwm.

Zoo: Lub txheej SiC qhov tawv thiab ruaj khov tiv thaiv cov khoom me me uas poob los ntawm kev sib txhuam thiab kev co, ua rau txo tau qhov puas tsuaj ntawm wafer.

5. Kev Ua Haujlwm Sai Sai (RTP/RTA)

Cov thev naus laus zis ua cov txheej txheem thermal sai feem ntau siv los txhim kho cov khoom sib txuas ntawm cov hnub ci wafers, xws li hauv passivation lossis kev sib cuag hlau annealing. Nws cov yam ntxwv yog cua sov thiab txias sai, ua rau muaj kev xav tau siab heev rau kev tiv thaiv thermal shock ntawm tus neeg nqa khoom.

Function: Cov khoom siv graphite uas tau coated nrog SiC muab kev txhawb nqa thiab kev sib xws ntawm thermal rau cov wafers thaum lub sijhawm RTP.

Zoo: Cov txheej SiC muaj kev tiv taus cua sov zoo heev thiab kev ruaj khov thermal, tswj kev ruaj khov ntawm cov qauv txawm tias dhau los ntawm ntau pua qhov kev ua kom sov thiab txias sai sai.

Tsim los ua kom tau raws li qhov yuav tsum tau ua ntawm cov kab tsim khoom ntawm lub hnub ci, lub tshuab no muab kev ruaj khov ntawm qhov chaw thiab tsawg kawg nkaus tsim cov khoom me me, ua rau nws yog ib qho tseem ceeb rau kev ua tiav cov txiaj ntsig zoo thiab kev ua haujlwm zoo hauv kev tsim khoom photovoltaic.

Ntawm Semixlab, peb tshwj xeeb hauv kev xa cov khoom siv graphite thiab SiC-coated rau kev lag luam semiconductor thiab hnub ci. Peb cov SiC Coated Graphite Carriers tau tsim los pab cov chaw tsim khoom ua tiav cov wafer yield siab dua, cov khoom siv ua haujlwm ntev dua, thiab kev txhim kho kev ntseeg siab. Txais tos kom sab laj nrog peb txhua lub sijhawm.