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TaC Coated Pedestal Support Plate
Semixlab TaC Coated Pedestal Support Plate yog ib qho khoom siv ua haujlwm siab uas tsim los rau cov semiconductor epitaxy reactors thiab cov tshuab tso dej kub siab. Cov khoom no yog tsim los ntawm kev siv cov khoom siv graphite siab ua ke nrog cov txheej txheem CVD tantalum carbide (TaC) uas tiv thaiv cov graphite substrate los ntawm cov pa roj ua haujlwm hnyav thiab qhov kub thiab txias heev. Semixlab TaC Coated Pedestal Support Plates yog siv dav hauv SiC epitaxy reactors, GaN MOCVD systems, thiab cov khoom siv semiconductor CVD siab heev. Peb tos ntsoov yuav tau txais koj cov lus nug txhua lub sijhawm.
Hauj lwm
TaC Coated Pedestal Support Plate ua haujlwm ua ib qho tseem ceeb hauv cov khoom siv hluav taws xob semiconductor epitaxial uas kub heev. Nws yog tsim los muab kev txhawb nqa ruaj khov rau cov khoom siv substrate thiab cov khoom sib dhos thaum tswj hwm kev ruaj khov tshuaj lom neeg thiab thermal zoo heev nyob rau hauv cov txheej txheem hnyav.
Cov khoom no siv cov graphite substrate uas muaj purity siab ua ke nrog cov txheej CVD tantalum carbide (TaC) uas tuab. Cov qauv sib xyaw no siv graphite txoj kev ua haujlwm zoo tshaj plaws thiab kev ua haujlwm thermal conductivity nrog rau TaC txoj kev tiv taus kub thiab kev ruaj khov tshuaj lom neeg.
Cov phaj txhawb nqa Semixlab TaC-coated substrate siv dav hauv cov khoom siv tsim khoom semiconductor siab heev, suav nrog SiC epitaxial systems, GaN MOCVD reactors, thiab cov reactors CVD kub siab. Hauv cov kab ke no, kev ruaj khov ntawm cov qauv, kev tiv thaiv corrosion, thiab kev tswj hwm kev ua qias tuaj yog qhov tseem ceeb rau kev tswj hwm kev tsim khoom wafer sib xws.
Lub Luag Haujlwm hauv Semiconductor Epitaxial Reactors
Hauv cov khoom siv semiconductor epitaxial, cov khoom sib dhos txhawb nqa dais lub substrate thiab wafer thaum lub sijhawm kub siab. Lub phaj txhawb nqa ua lub luag haujlwm tseem ceeb hauv cov qauv sib dhos no.
Nws lub luag haujlwm tseem ceeb yog los muab kev txhawb nqa ruaj khov rau cov qauv substrate, kom ntseeg tau qhov chaw tseeb ntawm cov khoom tseem ceeb reactor thaum lub sijhawm ua haujlwm.
Vim tias cov txheej txheem epitaxial feem ntau ua haujlwm ntawm qhov kub tshaj 1000 ° C txog 1600 ° C, txawm tias qhov kev hloov pauv me me lossis kev tsis sib haum xeeb tuaj yeem cuam tshuam tsis zoo:
● Qhov kub ntawm lub reactor sib npaug zos
● Kev faib cov roj ntws
● Kev loj hlob ntawm txheej Epitaxial sib xws
Los ntawm kev tswj hwm qhov ruaj khov ntawm cov qauv substrate, TaC Coated Pedestal Support Plate pab tswj hwm qhov thermal thiab geometric stability thoob plaws hauv qhov chaw ua haujlwm - qhov tseem ceeb rau kev ua tiav kev loj hlob epitaxial sib xws thoob plaws wafer.
Specifications
| Lub cev muaj zog ntawm TaC txheej | |
| ceev | 14.3 (g / cm³) |
| Tshwj xeeb emissivity | 0.3 |
| Thermal expansion coefficient | 6.3*10-6/K |
| Hardness (HK) | 2000 HK ib |
| Kuj | 1 × 10-5 Aw* cm |
| Thermal ruaj khov | <2500 ℃ |
| Graphite loj hloov | -10 ~ 20 hli |
| Txheej thickness | ≥20um tus nqi raug (35um ± 10um) |
daim ntawv sau npe
Cov Khoos phaub Siv
Cov phaj txhawb nqa Semixlab TaC-coated yog siv dav hauv cov khoom siv semiconductor txheej txheem siab heev, suav nrog:
● SiC epitaxial reactors rau kev tsim hluav taws xob semiconductor
● Cov kab ke GaN thiab LED MOCVD
● Cov tshuaj tiv thaiv CVD thiab epitaxial uas kub thiab txias heev
● Cov txheej txheem tso tawm semiconductor siab heev
Kev Tshaj Loj (Competitive Advantage)
Cov txiaj ntsig hauv Kev Siv Epitaxy Kub Siab
Kev Ruaj Ntseg Kub Siab Tshaj Plaws: TaC muaj qhov kub yaj siab heev (kwv yees li 3880 ° C), ua rau nws zoo tagnrho rau cov xwm txheej kub hauv cov reactors epitaxial. Lub txheej txheej tswj kev ruaj khov thiab qhov chaw ruaj khov thaum lub sijhawm ua haujlwm kub ntev.
Superior Corrosion Resistance: Cov txheej txheem loj hlob ntawm Epitaxial feem ntau cuam tshuam nrog cov pa roj reactive xws li hydrogen, ammonia, thiab chlorine-muaj cov tshuaj sib xyaw. TaC coatings qhia tau tias muaj kev tiv thaiv zoo rau cov chaw ib puag ncig tshuaj lom neeg no, tiv thaiv kev puas tsuaj ntawm graphite substrates.
Txo Kev Ua Phem Rau Cov Khoom Me Me: Kev tsim cov khoom me me yog qhov teeb meem tseem ceeb hauv kev tsim khoom semiconductor. Lub txheej TaC uas tuab thiab sib xws txo qhov kev puas tsuaj ntawm qhov chaw thiab kev tawg, pab tswj kom muaj ib puag ncig reactor huv si thiab tiv thaiv qhov zoo ntawm wafer.
Extended Component Lifespan: Los ntawm kev tiv thaiv cov graphite substrates los ntawm kev kub siab corrosion thiab mechanical hnav, TaC coatings ntev lub neej kev pabcuam ntawm cov substrate support plates. Qhov no txo qhov zaus txij nkawm hauv cov chaw tsim khoom semiconductor thiab txhim kho tag nrho cov khoom siv uptime.
peb pab
Semixlab khoom khw
