Cov Khoom Siv Thermal Field Graphite

Cov Khoom Siv Graphite Thermal Field tsim cov qauv tseem ceeb ntawm qhov chaw sov hauv cov reactors epitaxial, qhov twg qhov kub thiab txias sib xws ncaj qha txhais tau tias qhov zoo ntawm cov siv lead ua, qhov tseeb ntawm doping, thiab qhov tsis xws luag. Hauv Si thiab SiC epitaxy—qhov twg qhov kub ua haujlwm tuaj yeem tshaj 1600 ° C—peb cov cua sov graphite isostatic, susceptors, reflectors, thiab insulation shields tsim kom muaj qhov chaw sov thiab sib npaug uas tseem ceeb rau kev loj hlob ntawm zaj duab xis.

Cov khoom no yog tsim los ntawm kev siv cov qib graphite ultra-high-purity nrog cov hlau tsis tshua muaj kuab paug kom ntseeg tau tias muaj tsawg kawg nkaus ntawm cov khoom me me thiab qhov zoo tshaj plaws ntawm wafer-edge thiab nruab nrab-rau-ntug sib xws. Ua ke nrog cov txheej txheem SiC siab heev uas tau tsim los rau kev tiv taus H₂, Cl₂, NH₃, thiab cov khoom siv hydrocarbon precursors, Semixlab's graphite qhov chaw tswj hwm kev ua haujlwm zoo thiab kev ua haujlwm thermal los ntawm lub sijhawm ntev, kub siab, ntev lub sijhawm nruab nrab ntawm kev saib xyuas hauv ob qho tib si kab rov tav thiab ntsug epitaxy systems.

Tshaj li epitaxy, cov khoom siv graphite thermal field ua lub luag haujlwm tseem ceeb hauv kev ua kom sov siab rau cov khoom siv dav dav, tshwj xeeb tshaj yog SiC MOSFETs. Cov ntawv thov no xav tau kev ruaj khov ntawm qhov kub thiab txias ze li ntawm 1700–1800 ° C nyob rau hauv inert lossis vacuum atmospheres. Semixlab's engineered graphite heaters, susceptor trays, thiab insulation cylinders ua kom muaj kev sib npaug thermal rau lub wafer thaum lub sijhawm dopant activation, ohmic contact formation, thiab kho qhov tsis zoo. Peb cov khoom txo cov thermal gradients uas tuaj yeem ua rau wafer bow, slip lines, lossis crystalline stress - txhua yam ua rau lub cuab yeej ua haujlwm thiab cov txiaj ntsig tsis zoo. Lub tshav kub thermal optimized tsim los ntawm Semixlab cov kev daws teeb meem txhim kho dopant activation efficiency thiab txo cov thermal shock, ua rau cov txheej txheem kub siab rov ua dua thiab tswj hwm nruj.

Czochralski ib lub cub tawg siv lead ua ke thermal field

Hauv RTP thiab RTA systems, qhov twg cov semiconductor wafers yuav tsum tau dhau los ntawm kev cua sov thiab txias sai sai ntawm qhov kev txiav txim ntawm pua ​​pua degrees ib ob, cov khoom siv thermal field precision kuj tseem ceeb heev. Txawm hais tias RTP feem ntau siv cov teeb ci cua sov, cov qauv thermal sab hauv - feem ntau yog tsim los ntawm cov pyrolytic graphite reflectors, cov graphite low-outgassing supports, thiab cov khoom siv tiv thaiv - txhais tau tias lub zog radiative ncav cuag lub wafer li cas.

Cov khoom siv graphite ntawm Semixlab yog tsim los kom ruaj khov qhov kev faib tawm cua sov, tiv thaiv cov teebmeem ntawm ntug-hotspot, thiab txhawb nqa kev hloov pauv thermal sai heev yam tsis muaj kev sib txhuam lossis tawm pa tawm. Qhov no ua kom ntseeg tau tias cov txheej txheem sib xws rau cov kauj ruam tseem ceeb xws li kev ua kom dopant, kev tsim silicide, kev sib xyaw ntawm cov kev sib tshuam ultra-shallow, kev ua kom zoo dua ntawm lub rooj vag, thiab kev kho mob strain-engineering hauv cov CMOS nodes siab heev.

Thoob plaws txhua yam txheej txheem kub siab no, Semixlab's Txhua Thermal Field Graphite Part yog tsim los ua kom zoo dua qhov cua sov ntws, txo qhov kub thiab txias, thiab ua haujlwm tau zoo nyob rau hauv kev poob siab thermal rov ua dua, cov tshuaj lom neeg corrosive, thiab cov chaw nqus tsev huv si. Peb lub kaw lus zoo sib xyaw ua ke ua kom ntseeg tau tias qhov tseeb ntawm qhov ntev, qhov huv ntawm qhov chaw, thiab kev sib txuas ntawm cov txheej txheem uas ua tau raws li lossis tshaj qhov xav tau ntawm cov tuam txhab tsim khoom siv semiconductor. Semixlab vam tias yuav los ua koj tus khub mus sij hawm ntev hauv Suav teb.