0200-10073 Cov Khoom Siv Hluav Taws Xob Quartz 200mm

Lub AMAT 0200-10073 Insulator Quartz 200mm yog ib qho khoom siv fused quartz uas tau tsim los muab kev rwb thaiv hluav taws xob thiab kev ruaj khov ntawm cov qauv hauv cov khoom siv ua semiconductor plasma. Nws feem ntau siv ua lub cathode insulator hauv 200mm etch thiab deposition systems.

Ua los ntawm ultra-high purity quartz, cov khoom no yog tsim tshwj xeeb los ua haujlwm hauv cov chaw muaj kev nyuaj uas muaj xws li:

● Lub zog RF zaus siab

● Kev raug mob plasma muaj zog heev

● Cov tshuaj lom neeg ntawm cov txheej txheem ua haujlwm (piv txwv li, cov pa roj fluorine, chlorine)

● Cov xwm txheej kub ceev ceev

Tsis zoo li cov khoom siv tiv thaiv quartz txheem, cov insulator no ua lub luag haujlwm tseem ceeb hauv hluav taws xob, ua kom muaj kev sib txuas RF ruaj khov thiab tiv thaiv cov kev tam sim no tsis xav tau hauv chav.

Ntawm Semixlab Technology, AMAT 0200-10073 sib npaug yog tsim tawm hauv qab kev tswj hwm zoo kom ua tau raws li lossis tshaj OEM cov lus qhia, kom ntseeg tau tias muaj kev ua tau zoo thiab rov ua dua hauv kev tsim khoom semiconductor siab heev.

Txoj Haujlwm hauv Cov Khoom Siv thiab Lub Luag Haujlwm

Teeb Chaw

Feem ntau, Quartz Insulator raug teeb tsa:

● Nyob ib puag ncig lossis hauv qab cathode sib dhos

● Nyob ze ntawm lub electrostatic chuck (ESC)

● Hauv thaj tsam electrode uas siv RF ntawm lub chamber

Nws nyob hauv lub hauv paus plasma tiam thiab RF kev sib cuam tshuam cheeb tsam, qhov twg kev rho tawm hluav taws xob yog qhov tseem ceeb.

Txoj Haujlwm Tseem Ceeb

1. Kev Rho Tawm Hluav Taws Xob (Lub Luag Haujlwm Tseem Ceeb)

Cov khoom ua haujlwm ua ib qho kev ua haujlwm siab dielectric barrier, muab:

● Kev rho tawm ntawm cov electrodes conductive thiab cov qauv chamber

● Kev tiv thaiv kev xau RF thiab cov kev tam sim no tsis xav tau

2. Kev Ruaj Ntseg Hauv RF

Los ntawm kev tswj cov ciam teb hluav taws xob uas tau teev tseg, cov insulator pab:

● Tswj kev ua haujlwm ntawm RF coupling kom ruaj khov

● Tswj kom muaj kev faib tawm ntawm cov ntshav plasma uas sib xws

3. Kev Txhim Kho Plasma Stability

Lub quartz insulator pab txhawb rau:

● Kev tswj hwm plasma confinement

● Txo qhov suab nrov thiab kev tsis ruaj khov ntawm hluav taws xob

Cov txiaj ntsig: Kev faib hluav taws xob ion sib npaug ntau dua thiab cov txiaj ntsig ntawm cov txheej txheem sib xws.

4. Kev Txhawb Nqa Mechanical thiab Thermal Stability

Nrog nws cov qauv cylindrical lossis cov yeeb nkab zoo li, cov khoom kuj muab:

● Kev txhawb nqa rau cov khoom sib dhos cathode

● Kev tiv taus cua sov zoo heev nyob rau hauv cov xwm txheej cua sov cyclic

Hom Kev Ua Tsis Zoo

Raws li ib qho tseem ceeb ntawm hluav taws xob thiab plasma-ntsib tivthaiv, Quartz Insulator raug rau ntau txoj hauv kev puas tsuaj:

1. Kev puas tsuaj ntawm hluav taws xob

● Kev ua qias tuaj ntawm qhov chaw ua rau muaj cov kab hluav taws xob

● Kev ua haujlwm dielectric txo qis dhau sijhawm

Kev Cuam Tshuam: RF tsis ruaj khov, cov dej ntws tawm, lossis cov txheej txheem hloov pauv.

2. Kev puas tsuaj los ntawm Plasma

● Kev siv ion bombardment ua rau qhov chaw ntxhib

● Kev poob ntawm cov khoom maj mam hloov pauv geometry

Kev Cuam Tshuam: Kev hloov pauv ntawm kev faib hluav taws xob thiab tus cwj pwm plasma.

3. Kev puas tsuaj los ntawm Arc (Kev tso tawm hluav taws xob)

● Lub zog hluav taws xob siab ua rau muaj hluav taws xob arcing

● Kub hnyiab los yog khawb av

Kev Cuam Tshuam: Kev ua qias tuaj loj heev thiab kev puas tsuaj rau chav tsev.

4. Kev tawg ntawm kev ntxhov siab thermal

● Kev ua kom sov thiab txias rov ua dua

● Cov kab nrib pleb me me nthuav dav raws sijhawm

Kev Cuam Tshuam: Kev puas tsuaj ntawm lub tshuab thiab lub sijhawm tsis ua haujlwm uas tsis tau xav txog.

5. Kev Tsim Cov Khoom Me Me

● Quartz laus zuj zus tso tawm cov khoom me me

● Kev puas tsuaj ntawm qhov chaw ua rau muaj kev pheej hmoo ntawm kev ua qias tuaj

Qhov Cuam Tshuam: Kev poob qoob loo thiab kev ua tsis zoo ntxiv.

Vim li cas ho xaiv Semixlab Technology?

Nrog kev txawj ntse tob hauv cov ntaub ntawv semiconductor thiab cov khoom siv txheej txheem, Semixlab Technology muab cov kev daws teeb meem quartz ua tau zoo uas tsim rau cov chaw plasma uas xav tau ntau:

✔ Ultra-High Purity Quartz: Txo cov kuab paug thiab ua kom muaj kev ua haujlwm dielectric ruaj khov.

✔ Kev Ua Haujlwm Precision: Kev kam rau siab rau qhov sib nrug hluav taws xob thiab OEM sib xws.

✔ Kev Kho Mob Nto Zoo Tshaj Plaws: Txo cov khoom me me thiab txhim kho kev sib raug zoo ntawm cov ntshav.

✔ Lub Neej Pabcuam Ntev: Txhim kho kev ruaj khov nyob rau hauv RF thiab plasma raug, txo tus nqi ntawm kev muaj (CoO).

✔ OEM-Compatible Design: Kev sib koom ua ke nrog AMAT platforms yam tsis muaj kev cuam tshuam rau cov txheej txheem.

Lub AMAT 0200-10073 Insulator Quartz siv dav hauv:

● Cov Khoom Siv Siv 200mm Etch Systems

● Cov txheej txheem etching plasma (poly, dielectric, conductor etch)

● Cov chav CVD thiab PVD uas xav tau kev rwb thaiv tsev RF

Nws yog qhov tseem ceeb heev rau kev tsim khoom qub thiab tshwj xeeb semiconductor, suav nrog:

● Cov khoom siv fais fab (IGBT, SiC)

● Kev tsim khoom MEMS

● Kev tsim cov teeb liab analog thiab sib xyaw ua ke