0200-10246 Quartz GDP (Phaj Faib Roj)

Lub AMAT 0200-10246 Quartz GDP (Gas Distribution Plate) yog ib qho khoom siv fused quartz uas muaj qhov tseeb siab uas tsim los xa cov roj faib sib npaug thiab tswj kev sib cuam tshuam plasma hauv cov khoom siv ua semiconductor. Feem ntau teeb tsa ua Uni-Insert liner nrog tus qauv 88-qhov, nws ua haujlwm ua qhov sib txuas tseem ceeb ntawm cov txheej txheem xa roj thiab thaj chaw ua haujlwm plasma.

Tsim los rau kev siv plasma etch thiab CVD siab heev, cov khoom no ua haujlwm hauv qab qhov xwm txheej hnyav, suav nrog:

● Kev raug mob plasma muaj zog heev

● Cov pa roj uas ua rau muaj kev hloov pauv (piv txwv li, cov tshuaj lom neeg uas muaj fluorine thiab chlorine)

● High ताप thermal cycling environments

● Cov kev cai kom ua tiav cov txheej txheem sib xws

Tsis zoo li cov khoom tiv thaiv chav tsis ua haujlwm, Quartz GDP yog ib qho khoom tseem ceeb uas cuam tshuam ncaj qha rau kev sib npaug ntawm cov roj ntws, kev faib tawm ntawm cov ntshav, thiab kev tswj hwm qhov tseem ceeb (CD).

Ntawm Semixlab Technology, peb cov Quartz GDP inserts yog tsim los ntawm kev siv ultra-high purity fused quartz, ua ke nrog precision qhov machining thiab kev tswj hwm zoo nruj, kom ntseeg tau tias muaj kev ua tau zoo thiab rov ua dua hauv cov txheej txheem semiconductor uas xav tau.

Txoj Haujlwm hauv Cov Khoom Siv thiab Lub Luag Haujlwm

Teeb Chaw

Quartz GDP feem ntau yog ntsia:

● Nyob rau sab saum toj ntawm lub chamber txheej txheem

● Hauv lossis hauv qab lub taub hau da dej

● Ncaj qha saum toj ntawm qhov chaw wafer, tig mus rau thaj chaw plasma

Nws ua haujlwm ua lub hauv paus tseem ceeb rau kev nkag mus rau hauv thaj chaw plasma.

Txoj Haujlwm Tseem Ceeb

1. Kev Faib Roj Sib Xws (Lub Luag Haujlwm Tseem Ceeb)

● Tus qauv 88-qhov precision ua kom ntseeg tau tias:

● Kev faib tawm ntawm cov pa roj txheej txheem thoob plaws hauv wafer

● Kev tswj tus nqi thiab kev coj ntawm cov roj ntws

Qhov Tshwm Sim: Txhim kho qhov sib xws ntawm cov plasma thiab cov nqi etch / deposition sib xws thoob plaws lub wafer.

2. Kev Tsim Plasma thiab Kev Tswj Xyuas Kev Ruaj Ntseg

Los ntawm kev tswj hwm seb cov pa roj nkag mus rau hauv thaj chaw plasma li cas, GDP:

● Cuam tshuam rau kev kub hnyiab thiab kev txhawb nqa ntawm plasma

● Cov duab ntawm cov plasma density distribution

Qhov Cuam Tshuam: Txhim kho cov txheej txheem ruaj khov thiab txo qhov sib txawv ntawm cov wafers.

3. Kev Sib Xws ntawm Cov Txheej Txheem thiab CD Control

Tus qauv geometry thiab qhov tsim qhov cuam tshuam ncaj qha rau:

● Kev faib tawm ntawm ion thiab radical

● Kev sib xyaw ua ke ntawm qhov chaw ntawm cov wafer

Cov txiaj ntsig: Zoo tshaj plaws etch profile, CD uniformity, thiab wafer-to-wafer repeatability.

4. Kev Tiv Thaiv Chav thiab Kev Tswj Xyuas Kev Ua Phem

Ua ib lub liner quartz, GDP kuj:

● Tiv thaiv cov khoom siv da dej hlau los ntawm kev raug plasma

● Txo cov kev pheej hmoo ntawm kev ua qias tuaj ntawm cov hlau

Hom Kev Ua Tsis Zoo

Vim nws raug rau cov plasma thiab cov pa roj reactive, Quartz GDP raug rau ntau txoj hauv kev ua kom tsis zoo:

1. Qhov Txhaws (Kev Tso Tawm Cov Khoom Los Ntawm)

● Cov polymer lossis cov khoom siv los ntawm kev ua haujlwm sib sau ua ke hauv cov qhov

● Cov pa roj ntws tsawg dua lossis tsis sib npaug

Kev Cuam Tshuam: Kev poob ntawm kev faib roj thiab kev tsis ruaj khov ntawm cov txheej txheem.

2. Kev puas tsuaj los ntawm Plasma

● Kev siv ion bombardment ua rau qhov loj dua

● Kev ntxhib ntawm qhov chaw hloov pauv cov dynamics ntawm cov dej ntws

Qhov Cuam Tshuam: Kev hloov pauv ntawm kev faib tawm ntawm cov ntshav thiab CD drift.

3. Kev tawg thiab kev tsim cov khoom me me

● Cov yeeb yaj kiab uas tau muab tso rau hauv cov yeeb yaj kiab yuav tawm mus raws sijhawm

● Cov khoom me me nkag mus rau hauv chav tsev ib puag ncig

Qhov Cuam Tshuam: Ua rau muaj qhov tsis zoo ntau ntxiv thiab ua rau cov qoob loo poob qis.

4. Kev tawg ntawm kev ntxhov siab thermal

● Kev kub hnyiab ntau zaus ua rau muaj qhov tawg me me

● Kev ruaj khov ntawm cov qauv tsis muaj zog zuj zus raws sijhawm

Kev Cuam Tshuam: Kev ua tsis tiav ntawm ib feem thiab lub sijhawm tsis tau xav txog.

5. Kev Nqus Pa Roj

● Kev hnav mus sij hawm ntev hloov pauv qhov geometry sab hauv

● Kev hloov pauv maj mam ntawm kev faib cov roj ntws

Qhov Cuam Tshuam: Kev hloov pauv me me tab sis tseem ceeb heev, nyuaj rau kuaj mob.

Vim li cas ho xaiv Semixlab Technology?

Nrog kev paub dhau los hauv cov ntaub ntawv semiconductor thiab kev tsim cov quartz precision, Semixlab Technology muab cov kev daws teeb meem Quartz GDP ua tau zoo uas tsim rau cov chaw plasma siab heev:

● Ultra-High Purity Quartz: Xyuas kom muaj kev sib kis tsawg thiab kev sib cuam tshuam ntawm cov ntshav ruaj khov.

● Kev Siv Tshuab Ntau Qhov Kom Tseeb: Qhov loj ntawm qhov, qhov sib nrug, thiab geometry kom raug rau kev faib roj zoo tshaj plaws.

● Kev Txhim Kho Qhov Chaw: Txo qhov tsim cov khoom me me thiab ua kom cov txheej txheem huv si.

● Kev Ua Haujlwm Ntev Mus Ib Txhis: Txhim kho kev tiv taus rau kev puas tsuaj ntawm cov plasma thiab kev ntxhov siab thermal.

● OEM-Compatible Design: Kev sib koom ua ke nrog AMAT systems thiab cov txheej txheem.

Lub AMAT 0200-10246 Quartz GDP siv dav hauv:

● Cov Khoom Siv Siv 200mm plasma etch systems

● Cov chav ua haujlwm CVD thiab PECVD

● Cov txheej txheem tsim khoom semiconductor zoo sib xws

Nws yog qhov tseem ceeb heev rau cov ntawv thov uas xav tau kev tswj hwm nruj, suav nrog:

● Kev txiav cov node siab heev

● Kev tsim cov khoom siv hluav taws xob semiconductor (SiC, IGBT)

● MEMS thiab kev tsim khoom siv tshwj xeeb