Quartz Ring 150mm

Ua ib qho khoom siv plasma-exposed, lub nplhaib quartz yog tsim los ua haujlwm hauv cov chaw muaj zog siab thaum tswj kev ruaj khov thiab cov txheej txheem sib xws.

Cov ntaub ntawv tseem ceeb ntawm cov khoom

Cov Khoom Siv thiab Cov Zoo

Lub AMAT Quartz Ring 150mm yog tsim los ntawm semiconductor-grade fused quartz (SiO₂), ib yam khoom siv uas tau lees paub dav rau nws qhov kev ua tau zoo heev hauv cov chaw ua plasma.

Cov txiaj ntsig tseem ceeb ntawm Fused Quartz:

Kev Ua Phem Tsawg Kawg Nkaus

Cov quartz uas muaj purity siab muaj cov khoom tsis huv uas tsis muaj zog heev, txo qhov kev pheej hmoo ntawm kev ua qias tuaj ntawm wafer thiab txhawb nqa cov qauv tsim khoom semiconductor siab heev.

Kev Tiv Thaiv Plasma Zoo heev

Quartz muaj zog tiv taus ion bombardment thiab plasma erosion, ua rau nws tsim nyog rau kev siv mus sij hawm ntev hauv sputter etch thiab plasma chambers.

Siab Thermal stability

Cov khoom siv no tswj tau nws cov qauv kom ruaj khov thaum muaj qhov kub thiab txias siab thiab kev hloov pauv sai sai, ua kom muaj kev ua haujlwm zoo sib xws thaum lub sijhawm ua haujlwm.

Hluav taws xob rwb thaiv tsev

Ua ib yam khoom siv uas tsis yog conductive, quartz pab kom lub zog hluav taws xob ruaj khov hauv chav, pab txhawb rau kev faib cov plasma sib xws.

Tshuaj Inertness

Quartz tiv taus cov pa roj reactive uas siv rau hauv cov txheej txheem semiconductor, txo qhov kev puas tsuaj thiab ua kom lub neej ntawm cov khoom ntev dua.

Cov khoom no ua rau fused quartz yog cov khoom siv zoo tagnrho rau cov khoom siv hauv chav uas raug rau cov ntshav thiab cov xwm txheej kub siab.

Kev Ua Haujlwm Sab Hauv Cov Khoom Siv Semiconductor

Lub AMAT Quartz Ring 150mm ua ntau yam haujlwm tseem ceeb hauv cov chav ua plasma, uas cuam tshuam ncaj qha rau kev ruaj khov ntawm cov txheej txheem thiab qhov zoo ntawm wafer.

1. Kev Kaw thiab Tswj Plasma

Lub nplhaib quartz pab txhais thaj tsam ciam teb plasma, tswj kev faib tawm ion thiab tswj tus cwj pwm plasma hauv chav. Qhov no pab txhawb rau cov txheej txheem rov ua dua thiab sib xws.

2. Kev Txhim Kho Qhov Sib Xws Ntawm Ntug

Nyob ze ntawm ntug wafer, lub nplhaib ua lub luag haujlwm tseem ceeb hauv:

● Kev tswj cov plasma density ntawm lub wafer perimeter

● Txo cov teebmeem ntawm ntug

● Txhim kho qhov sib npaug ntawm kev txiav los yog kev tso tawm

Qhov no yog qhov tseem ceeb rau kev tswj hwm qhov tseem ceeb (CD) kev tswj hwm thiab tag nrho cov wafer yield.

3. Kev Tiv Thaiv Chav

Ua ib qho khoom siv fij tseg, lub nplhaib quartz nqus tau:

● Cov ntaub ntawv uas tau txau

● Cov khoom siv los ntawm kev txiav

● Kev raug mob ntawm cov ntshav

Qhov no pab tiv thaiv cov khoom tseem ceeb hauv chav xws li phab ntsa hlau, cov ntaub thaiv, thiab cov chucks electrostatic los ntawm kev puas tsuaj thiab kev ua qias tuaj.

4. Kev Txhim Kho Kev Ruaj Ntseg ntawm Cov Txheej Txheem

Los ntawm kev tswj cov qauv geometry thiab cov khoom siv sib xws, lub nplhaib quartz txhawb nqa:

● Cov qauv roj ntws ruaj khov

● Kev sib cuam tshuam ntawm cov ntshav uas tswj tau

● Txo cov khoom me me

Qhov no thaum kawg ua rau muaj kev txhim kho cov txheej txheem rov ua dua thiab txo qis lub sijhawm tsis ua haujlwm.