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High-Purity Opaque Quartz Shield & Shutter Rau MOCVD
Cov khoom siv Opaque Quartz uas muaj qhov huv si siab yog tsim los rau cov txheej txheem semiconductor MOCVD, suav nrog cov khoom siv tseem ceeb xws li Heat Shields thiab precision Shutters. Siv lub tshuab tshwj xeeb sab hauv micro-bubble scattering, cov khoom no hloov cov hluav taws xob thermal hauv zos mus rau hauv cov hluav taws xob infrared surface uas sib xws heev, ua rau cov txheej epitaxial uniformity zoo dua. Muaj qhov huv si ≥99.999% thiab cov coefficient qis heev ntawm thermal expansion, lawv muab cov cua sov zoo dua ntawm qhov kub siab tshaj 1100 ℃ thaum txo cov kev siv hluav taws xob thiab tiv thaiv kev ua qias tuaj ntawm cov hlau - ua rau lawv yog qhov kev daws teeb meem zoo tshaj plaws, pheej yig rau cov kab ntau lawm.
Hauj lwm
Microstructure: Cov qauv micro-bubble ntom ntom muab kev ua tau zoo thermal scattering.
Opaque Quartz: Qhov "Uniform Temperature Barrier" rau MOCVD Cov Txheej Txheem
Peb Cov Khoom Siv Quartz Uas Muaj Kev Phem Siab Tshaj Plaws yog ntau dua li cov khoom siv quartz txheem. Nws yog tsim los ntawm cov txheej txheem fusion tshwj xeeb uas qhia txog cov ntim loj ntawm cov npuas me me, nrog rau cov kab uas tswj tau meej ntawm 10-100µm. Cov npuas no yog lub hauv paus ntawm cov khoom siv ua haujlwm thermal zoo tshaj plaws:
● Kev Sib Tov Infrared thiab Kev Hloov Pauv Far-Infrared (FIR):
Cov hluav taws xob tseem ceeb los ntawm MOCVD cov khoom cua sov (xws li tungsten filaments lossis graphite) feem ntau yog lub teeb ze-Infrared (NIR). Cov pob zeb pob tshab yuav luag nkag mus rau NIR, ua rau muaj qhov kub thiab "qhov chaw kub" ntawm lub substrate. Cov npuas sab hauv hauv cov quartz opaque pab txhawb kev cuam tshuam sab hauv thiab kev tawg, zoo thaiv kev nkag mus rau NIR ncaj qha. Cov cua sov raug nqus thiab rov tso tawm ua cov hluav taws xob Far-Infrared (FIR) ntau dua. Qhov kev hloov pauv no ua kom muaj lub tshav kub zoo sib xws hauv MOCVD chamber, uas yog qhov tseem ceeb rau kev ua tiav cov txheej txheem epitaxial zoo, sib xws.
● Ultra-High Purity & Low Hydroxyl (OH) Cov Ntsiab Lus:
For front-end semiconductor processes, we strictly control SiO2 purity at the 5N (99.999%) level and maintain Hydroxyl (OH) content at < 5ppm. This ensures that in high-vacuum environments exceeding 1000℃, no harmful metallic ions or moisture are released, protecting the integrity of sensitive quantum well structures.
| caij | Cov Ntsiab Lus Ib Txwm Muaj (ppm) | Txoj Kev Nrhiav Kom Tau |
| Txhuas (Al) | <15 | ICP-OES |
| Calcium (Ca) | <1.0 | ICP-OES |
| Hlau (Fe) | <0.5 | ICP-OES |
| Sodium (Na) | <1.0 | ICP-OES |
| Hydroxyl (OH) | <5 | FTIR |
| Tag Nrho Kev Huv Si | ≥99.999% | Xam |
daim ntawv sau npe
Hom Daim Ntawv Thov Scenarios
Peb cov khoom siv quartz opaque tsis yog tsuas yog hloov pauv xwb; lawv yog cov kev daws teeb meem zoo tshaj plaws rau cov teeb meem ua haujlwm thermal tshwj xeeb.
Xwm Txheej A: Kev Tiv Thaiv Chav MOCVD rau Compound Semiconductors (GaN, SiC)
● Qhov Mob: Thaum lub sij hawm GaN lossis SiC loj hlob, qhov kub thiab txias siab thiab cov dej ntws ua ntej corrosive (xws li Ammonia NH3 thiab TMGa) ua rau muaj cov khoom seem ntau ntawm cov phab ntsa kim thiab cov cua sov graphite. Qhov no ua rau muaj kev tsis ua haujlwm ntau zaus rau Kev Txij Nkawm Tiv Thaiv (PM) thiab nce tus nqi ntawm Kev Muaj Tswv (CoO).
● Kev daws teeb meem: Siv cov quartz opaque uas muaj purity siab ua lub Heat Shield (Chamber Liner) muab ib txheej "txheej txi" uas pheej yig. Thaum sau cov nyiaj tso cia, nws cov rwb thaiv tsev zoo tiv thaiv cov phab ntsa stainless hlau, txuas ntxiv lub voj voog PM ntau dua 30%.
Xwm Txheej B: Kev Tswj Xyuas Kev Sib Txuas Lus hauv Cov Qauv Multi-Quantum Well (MQW)
● Qhov Mob: Kev tsim cov qauv MQW ultra-thin rau LEDs lossis lasers xav tau qhov tseeb ntawm atomic hauv kev hloov pauv roj ua ntej. Txhua qhov kev hloov pauv thermal lossis kev lag luam hauv Shutter ua rau "Interface Broadening," ua rau lub cuab yeej ua haujlwm optoelectronic tsis zoo.
● Kev daws teeb meem: Peb cov Precision Quartz Shutters siv cov coefficient qis heev ntawm thermal expansion ntawm opaque quartz. Qhov no ua kom muaj kev tiaj tiaj thiab kev ruaj khov ntawm cov qauv thaum lub sijhawm hloov pauv ceev thiab kev hloov pauv thermal sai, ua rau muaj "Atomic Layer Control" tiag tiag.
