Cov thaiv thiab cov chunks CVD-SiC uas muaj purity siab

Hauv kev tsim cov 6-nti thiab 8-nti SiC wafers, txoj kev thauj mus los ntawm lub cev (PVT) feem ntau cuam tshuam rau qhov tsis zoo: Cov hmoov av carbon (C-dust) kev ua qias tuaj thiab cov nqi sublimation tsis ruaj khov los ntawm SiC hmoov.

Peb tau tsim peb cov khoom siv CVD-SiC uas muaj qhov huv si thiab cov khoom me me tshwj xeeb los daws cov kev txwv ntawm cov hmoov ib txwm muaj. Pib nrog cov khoom siv semiconductor-qib CVD-SiC, peb ua cov khoom siv los ntawm kev sib tsoo thiab kev ntsuas qib. Qhov no tsis yog hais txog kev ntxuav qhov chaw xwb - nws yog ib qho txheej txheem ntxuav tob uas hloov cov khoom siv rov qab los ua cov khoom siv ua tau zoo rau tiam tom ntej ntawm SiC wafers. Qhov tshwm sim yog cov khoom siv 7N-qib uas ua kom zoo dua qhov kub thiab txias thiab ua rau cov khoom siv lead ua kom loj hlob sai.

Cov Lus Qhia & Kev Txiav Txim

● Qhov Huv Si: 6N5 txog 7N

● Loj: 5mm - 50mm (Kho tau)

● Ntim Khoom: Ob txheej, hnab PE tiv thaiv hluav taws xob kaw hauv lub tshuab nqus tsev.

● Lub Sijhawm Ua Ntej: Cov khoom xa tuaj ruaj khov nrog kev xa khoom thoob ntiaj teb.

Cov ntawv thov phiaj xwm

PVT SiC Crystal Growth: Zoo tagnrho rau 4H-SiC conductive thiab semi-insulating substrates.

8-Nti Wafer Scale-up: Tsim rau cov teb thermal loj dua ntawm cov reactors tiam tom ntej uas qhov tsis ruaj khov ntawm hmoov tau nthuav dav.

Kev Tshawb Fawb thiab Kev Txhim Kho Qib Siab: Rau cov chaw kuaj mob uas xav tau EPD (Etch Pit Density) thiab MPD qis tshaj plaws.

Lub Semixlab Ntug: Kev Ntseeg Tau Los Ntawm Cov Ntaub Ntawv

Thaum kev lag luam txav mus rau kev tsim khoom SiC 8-nti, qhov sib xws ntawm cov khoom siv tau los ua qhov tseem ceeb ntawm kev ua haujlwm ntawm cov khoom siv. Cov khoom sib xyaw CVD-SiC muab qhov ceev ceev thiab kev hloov pauv sai sai uas xav tau rau kev khiav siv lead ua haujlwm ntev, muaj txiaj ntsig zoo.

GDMS Tau Ntawv Pov Thawj: Txhua pawg khoom raug xa nrog daim ntawv qhia txog kev tshuaj xyuas GDMS tag nrho.

Kev Ntsuas Qib Tshwj Xeeb: Peb muab kev ntsuas qhov loj me kom raug (piv txwv li, 5-20mm lossis 20-50mm) kom phim koj qhov geometry crucible tshwj xeeb.

Qhov Zoo ntawm Semixlab: Cov Nyiaj Tau Los Ntau Dua, Cov Nqi Qis Dua

7N Ultra-Purity: Kev tswj cov khoom tsis huv ntawm cov hlau tsis yog ib lub hom phiaj xwb—nws yog peb tus qauv. Siv cov khoom siv raw CVD, peb muab 99.99999% qhov chaw ntshiab uas ua kom koj cov siv lead ua 4H-SiC tsis muaj qhov tsis zoo txij thaum pib.

Kev Ua Txhaum Txoj Kev Loj Hlob: Feem ntau cov fabs raug daig ntawm 0.5 hli / teev. Semixlab chunks pab txhawb kev hloov pauv loj dua, thawb koj cov txheej txheem PVT mus rau 1.46 hli / teev. Nws yog txoj hauv kev ceev tshaj plaws los nthuav koj cov khoom tsim tawm 8-nti.

Kev Sau Ntawv Huv Si: Cov hmoov ib txwm muaj kev phom sij los ntawm "C-dust". Peb cov khoom khov kho ua kom tsis muaj cov khoom me me hauv cov pa dej, txo MPD thiab ua kom cov lej dislocation nyob ib puag ncig 3000 cm⁻².

Kev Ua Haujlwm Zoo Hauv Kev Lag Luam: Peb muab lwm txoj hauv kev uas ruaj khov thiab muaj kev ntshiab siab los ntawm kev siv cov khoom siv semiconductor-grade CVD-SiC rov qab. Koj tau txais cov khoom siv uas huv dua li cov hmoov hluavtaws tab sis tus nqi yog rau kev tsim khoom ntau.

Kev Sib Piv Txog Kev Siv Tshuab: Cov Chunks vs. Hmoov Ib Txwm Muaj