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Silicon Carbide Diffusion Rauv Raj
Silicon Carbide Diffusion Furnace Tube yog ib qho tseem ceeb ntawm cov khoom siv thermal processing uas tsim los rau kev ua kom sov siab ntawm semiconductor oxidation, diffusion, annealing, thiab lwm yam kev siv wafer fabrication. Ua los ntawm cov khoom siv silicon carbide (SiC) uas muaj purity siab, cov raj furnace no muab kev ruaj khov thermal zoo heev, tiv taus tshuaj lom neeg, thiab ua kom ruaj khov, ua rau cov chaw tsim khoom semiconductor ua tiav cov txheej txheem ua haujlwm tas mus li hauv cov chaw kub siab. Semixlab muab cov raj Silicon Carbide Diffusion Furnace zoo uas tsim los rau cov ntawv thov semiconductor thermal processing siab heev, txhawb nqa cov neeg tsim khoom siv thev naus laus zis, cov chaw tsim khoom siv, thiab cov chaw tsim khoom semiconductor thoob ntiaj teb.
Hauj lwm
Hauv cov cub tawg semiconductor diffusion, lub raj cua sov ua haujlwm ua lub chamber tseem ceeb uas cov wafers raug rau cov xwm txheej kub thiab cov pa roj ua haujlwm. Qhov zoo thiab kev ruaj khov ntawm lub raj cua sov cuam tshuam ncaj qha rau qhov kub thiab txias sib xws, kev faib roj, kev tswj kev ua qias tuaj, thiab tag nrho cov txheej txheem rov ua dua. Nrog nws cov khoom siv zoo tshaj plaws, lub raj cua sov SiC diffusion pab cov tuam txhab semiconductor tswj cov txheej txheem oxidation thiab diffusion txhim khu kev qha thaum txhim kho lub neej khoom siv thiab txo cov kev xav tau txij nkawm.
Lub raj cua sov Silicon Carbide Diffusion yog dab tsi?
Lub raj Silicon Carbide Diffusion Furnace yog lub raj ua haujlwm kub siab uas tsim los ntawm silicon carbide ceramics thiab siv rau hauv cov tshuab semiconductor diffusion furnace systems. Nws tsim ib puag ncig tswj tau rau kev ua wafer, uas tso cai rau kev kho cua sov kom raug hauv qab ntau yam huab cua ua haujlwm, suav nrog oxygen, nitrogen, hydrogen, pa dej, thiab cov pa roj uas muaj dopant.
Piv nrog cov raj cua sov quartz ib txwm muaj, cov raj cua sov SiC muab kev ua tau zoo dua nyob rau hauv cov xwm txheej kub heev vim lawv:
● Kev ua kom sov tau zoo
● Kev ruaj khov kub zoo heev
● Lub zog kho tshuab zoo heev
● Kev tiv thaiv oxidation zoo heev
● Tsawg thermal expansion coefficient
● Ua haujlwm tau zoo rau kev xeb tshuaj lom neeg
Cov khoom no ua rau silicon carbide yog cov khoom siv zoo tshaj plaws rau cov khoom siv ua haujlwm thermal semiconductor qhov twg kev ntseeg siab mus sij hawm ntev thiab kev ua haujlwm sib xws yog qhov tseem ceeb.
daim ntawv sau npe
Cov raj cua sov Silicon Carbide Diffusion siv dav hauv cov txheej txheem tsim khoom semiconductor, suav nrog:
● Kev Ua Kub Kub
● Kev Sib Kis Tshuaj Dopant
● Kev Kub Siab Annealing
● Kev ua kom tsis muaj nitrogen
● Kev Tsim Khoom Siv Hluav Taws Xob Semiconductor
● Kev Ua Haujlwm SiC thiab GaN
Lawv lub peev xwm los tswj cov cua sov thiab tshuaj lom neeg ruaj khov ua rau lawv yog ib qho khoom tseem ceeb hauv cov khoom siv ua haujlwm thermal semiconductor siab heev.
peb pab
Semixlab khoom khw
