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Silicon Carbide Sic Porous Ceramic Disc
Lub Silicon Carbide (SiC) Porous Ceramic Disc los ntawm Semixlab yog tsim los rau kev ua haujlwm siab semiconductor wafer ua cov ntawv thov uas xav tau kev ua haujlwm siab, kev huv si, thiab kev ruaj khov. Nrog rau kev tswj hwm micro-porosity, kev ua haujlwm thermal zoo dua, thiab kev tsis muaj tshuaj lom neeg, cov khoom no ua lub luag haujlwm tseem ceeb hauv kev nqus tsev vacuum chucking, CMP (Chemical Mechanical Polishing), epitaxy, thiab wafer handling systems.
Hauj lwm
Zoo tagnrho rau: CMP platforms, MOCVD epitaxy reactors, wafer transfer modules, plasma cleaning systems, thiab ESC substrate assemblies.
Ⅰ. Cov Khoom Siv thiab Cov Yam Ntxwv ntawm Lub Cev
Cov Qauv SiC Ceramic Uas Muaj Kev Ntshiab Siab
Ua los ntawm ≥99.9% ultra-pure α-SiC lossis β-SiC hmoov, txhua lub porous disc yog tsim los ntawm kev tswj hwm precision sintering thiab infiltration txheej txheem. Qhov tshwm sim yog ib lub network pore sib xws uas ua kom muaj roj ntws ruaj khov thiab kev ua haujlwm zoo hauv qab qhov chaw ua haujlwm hnyav.
Cov Khoom Siv Tseem Ceeb:
| Khoom | specification |
| khoom | α-SiC / β-SiC |
| purity | ≥99.9% |
| Porosity | 10–40% (kho tau) |
| Pore Loj | 0.1-10 m |
| Thermal Tus Cwj Pwm | 120-200 W/m·K |
| Max ua haujlwm Temp | 1600-1800 ° C |
| Hardness | Mohs 9.3 |
| Tshuaj tiv thaiv | Zoo heev hauv HF, HCl, Cl₂, H₂ |
| ceev | 2.8-3.1 g / cm³ |
Cov ntsiab lus tseem ceeb:
● Kev Nkag Tau Lub Tshuab Nqus Tsev Sib Xws: Kev faib cov qhov hws kom raug ua kom cov pa roj ntws sib npaug thoob plaws qhov chaw ntawm lub wafer.
● Kev Ruaj Ntseg Zoo Kawg Nkaus: Tswj tau qhov ruaj khov ntawm lub cev thaum kub siab.
● Kev Tsim Cov Khoom Me Me Tsawg: Cov nplaim SiC uas tau txhuam kom txo qhov kev pheej hmoo ntawm kev ua qias tuaj.
● Kev Siv Tau Ntev Tshaj Plaws: Lub neej ua haujlwm ntev dua txawm tias nyob rau hauv cov chaw muaj tshuaj lom neeg thiab cov chaw muaj ntshav ntau.
Ⅱ. Cov Teeb Meem Feem Ntau ntawm Cov Txheej Txheem thiab Cov Kev daws teeb meem Semixlab
| kev sib tw | Cag Tus | Cov Kev daws teeb meem Semixlab |
| Lub Tshuab Nqus Tsev Tsis Sib Npaug | Qhov loj ntawm qhov pore tsis sib xws lossis txhaws | Kev faib tawm ntawm qhov loj me ntawm cov qhov hws thiab kev ntxuav cov ntshav tsis tu ncua |
| Kev Ua Paug Rau Cov Khoom Me Me | Cov kab nrib pleb me me los ntawm kev hloov pauv thermal | Siv CVD SiC txheej rau kev txhim kho qhov chaw |
| Kev tsis sib xws ntawm thermal | Qhov ceev tsis sib xws lossis kev ua qias tuaj | Siv cov SiC uas muaj kev coj ua hluav taws xob siab (>150 W/m`K) thiab cov nplaim ci ntsa iab |
| Tshuaj Erosion | Kev raug cov pa roj HF lossis Cl ntev heev | Txais yuav cov CVD SiC hybrid sintering ntom ntom kom txhim kho kev tiv thaiv corrosion |
| Txo Lub Zog Kho Tshuab Raws Li Lub Sijhawm | Kev ntxhov siab ntawm wafer loading rov ua dua | Kev nkag mus rau theem ob kom txhim kho qhov tawg thiab ua kom lub neej ua haujlwm ntev dua |
Semixlab txoj kev tswj cov khoom siv thiab kev tsim kho nto ua kom muaj kev ua haujlwm zoo sib xws, kev ntseeg siab mus sij hawm ntev, thiab txo cov khoom siv tsis ua haujlwm thoob plaws ntau lub voj voog ua haujlwm. Txais tos kom sab laj nrog peb kom tau txais kev sab laj ntxiv thiab kev pabcuam kho khoom.
daim ntawv sau npe
Kev siv hauv cov txheej txheem semiconductor
1. Wafer Nqus Tsev Chucking thiab Kev Tswj
Cov phaj SiC uas muaj qhov me me (porous SiC discs) feem ntau siv ua cov phaj nqus tsev lossis cov khoom txhawb nqa hauv cov txheej txheem thauj khoom thiab hloov pauv wafer. Lawv cov porosity uas tau tsim tshwj xeeb ua kom muaj kev nqus tsev sib npaug, tshem tawm kev hloov pauv ntawm wafer thiab txhim kho qhov tseeb ntawm kev sib dhos.
2. Kev Siv Tshuaj Txhuam Txhuam (CMP)
Thaum lub sijhawm CMP, lub porous SiC disc ua haujlwm ua tus nqa lossis lub phaj thaub qab, ua rau:
● Kev faib cov slurry sib npaug
● Kev txhawb nqa wafer ruaj khov
● Txhim kho qhov planarity thiab kev tswj qhov tsis zoo
Piv rau cov alumina lossis quartz ib txwm muaj, SiC muaj qhov nyuaj dua thiab thermal conductivity dua, ua kom lub neej ntev dua thiab ua kom cov txheej txheem zoo dua.
3. Epitaxy thiab Kev Ua Haujlwm Kub Siab
Hauv MOCVD thiab LPE epitaxial reactors, SiC porous disc ua haujlwm ua lub hauv paus thermal susceptor lossis lub platform txhawb nqa, kom ntseeg tau tias:
● Kev hloov pauv cua sov sib xws thoob plaws lub wafer
● Cov txheej txheem epitaxial ruaj khov
● Muaj kev tiv taus siab rau cov pa roj uas ua rau muaj kev hloov pauv sai
4. Cov Tshuab Ntxuav Dej Thiab Plasma
Ua tsaug rau nws txoj kev tiv taus xeb tshuaj lom neeg thiab plasma, lub porous SiC disc ua haujlwm tau zoo ua lub phaj roj diffusion lossis cov tshuaj lim dej hauv cov rooj zaum ntub thiab cov chav ntxuav.
5. ESC (Electrostatic Chuck) Txheej Txheem
Hauv cov theem wafer siab heev, cov khoom siv SiC porous ua haujlwm ua lub hauv paus thermal rau ESCs, sib txuas ua ke kev hloov pauv cua sov zoo heev thiab kev rwb thaiv hluav taws xob rau kev tswj qhov kub ntawm wafer kom meej.
peb pab
Semixlab khoom khw
