Tsev> ua yeeb yam
Puas tau xav paub tias cov khoom siv hluav taws xob me me xws li xov tooj ntse thiab khoos phis tawj tau ua li cas? Ib kauj ruam tseem ceeb hauv kev tsim cov khoom siv no hu ua photolithography. Cov txheej txheem siv cov khoom siv tshwj xeeb hu ua photoresist. Niaj hnub no, peb yuav nrhiav seb Semixlab yog dab tsi photolithography photoresist yog thiab yog vim li cas nws thiaj li tseem ceeb hauv kev tsim cov semiconductors.
Photoresist yog ib yam khoom siv uas ua rau lub teeb ci ntsa iab. Nws yog ib qho tseem ceeb ntawm photolithography, uas yog cov txheej txheem ntawm kev tsim cov qauv me me ntawm cov wafers semiconductor. Rau kev tsim cov integrated circuits, cov khoom me me uas ua rau peb cov khoom siv ua haujlwm, cov qauv no yog qhov tseem ceeb.
Muaj ob hom photoresists loj: positive thiab negative. Positive photoresist yooj yim dua rau tshem tawm thaum raug lub teeb, thiab negative photoresist nyuaj dua rau tshem tawm. Txhua tus muaj nws tus kheej qhov zoo thiab raug xaiv raws li qhov yuav tsum tau ua rau semiconductors.
Thickness ntawm Semixlab photoresist yog ib qho tseem ceeb heev hauv kev thaij duab photolithography. Nws qhov tuab tuaj yeem txiav txim siab tias nws tuaj yeem tiv thaiv cov khoom hauv qab nws zoo npaum li cas thaum lub sijhawm etching tshwm sim. Etching yog kev tshem tawm cov khoom ntau dhau los ntawm semiconductor wafer los tsim cov qauv xav tau. Los ntawm kev hloov pauv qhov tuab ntawm photoresist tuaj yeem ua rau cov chaw tsim khoom khaws qhov tob etching kom raug rau qhov spec, uas thaum kawg ua rau muaj cov khoom siv sib xyaw ua ke zoo.
Lub Luag Haujlwm ntawm Nws zoo li cov xuab zeb qias neeg lossis cov av abrasive uas tau sib xyaw zoo rau hauv qhov chaw asphalt vim yog kev hnav tsheb thiab kev hnav cua ib puag ncig tsim cov txheej masking thiab cov qauv peripheral thaum lub photoresist yaj.
Semixlab cov khoom siv photoresist yog qhov tseem ceeb rau kev tsim cov qauv me me hauv cov voj voog sib xyaw. Lub wafer uas tau txheej los ntawm photoresist raug rau lub teeb los ntawm lub ntsej muag, thiab nyob ntawm hom photoresist, cov ntu uas raug (teeb pom kev zoo) ntawm photoresist yuav yaj tau ntau dua lossis tsawg dua. Cov qauv los ntawm lub ntsej muag ces tuaj yeem theej los ntawm tus neeg tsim khoom mus rau ntawm lub wafer, tsim cov yam ntxwv me me uas ua ke ua lub voj voog sib xyaw.
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