SIC Ceramics

Cov khoom siv SiC ceramics siv ntau dua thiab ntau dua hauv cov khoom siv semiconductor, feem ntau vim tias lawv tuav tau zoo dua hauv cov xwm txheej nyuaj. Thaum kub siab lossis cov txheej txheem ua rau muaj kev kub ntxhov ntau dua, cov ntaub ntawv zoo li quartz lossis silicon tuaj yeem pib qhia cov kev txwv, thiab qhov ntawd feem ntau yog qhov chaw SiC los rau hauv. Hauv cov txheej txheem cub tawg xws li oxidation lossis diffusion, cov khoom zoo li wafer boats lossis paddles ua los ntawm SiC feem ntau kav ntev dua. Lawv khaws lawv cov duab thiab tsis coj ntau yam kev ua qias tuaj, txawm tias tom qab khiav ntev. Tib neeg feem ntau hloov ntawm quartz rau qhov laj thawj no, tshwj xeeb tshaj yog thaum kev saib xyuas dhau los ua ntau dhau.

Rau kev txiav, SiC feem ntau raug xaiv vim nws muaj sia nyob hauv plasma ntev dua. Qhov sib txawv ntawm lub neej piv rau cov khoom silicon pom tseeb hauv ntau qhov kev teeb tsa, txawm hais tias nws tseem nyob ntawm cov txheej txheem tseeb. Nws kuj pab me ntsis nrog kev tswj hwm cov khoom me me, uas ua rau muaj kev nkag siab ntau dua thaum cov nodes ntsws. Koj tseem yuav pom SiC siv ua cov neeg raug mob hauv MOCVD lossis CVD. Hauv cov xwm txheej ntawd, nws tsis yog hais txog "lub zog" thiab ntau ntxiv txog kev ua kom qhov kub thiab txias ruaj khov. Sab nraud ntawm qhov ntawd, nws tshwm sim hauv cov khoom hauv chav xws li cov ntaub thaiv lossis cov taub hau da dej, thiab qee zaum hauv kev tuav cov khoom ib yam nkaus.