CVD Silicon Carbide (SiC) Txheej

CVD SiC txheej yog ib txheej silicon carbide uas tso rau ntawm graphite, thiab nws siv dav hauv cov cuab yeej epitaxy qhov twg ob qho tib si kub thiab huv si tseem ceeb. Hauv cov kab ntau lawm tiag tiag, koj yuav pom nws hauv cov kab ke los ntawm AIXTRON, ASM / LPE, Veeco, nrog rau qee lub platform AMAT. Dab tsi ua rau nws muaj txiaj ntsig tsis yog qhov kub tsis kam xwb, tab sis qhov ruaj khov tag nrho thaum lub sijhawm ntev. Hauv qab cov xwm txheej epitaxy ib txwm muaj - hydrogen, ammonia, lossis txawm tias cov pa roj chlorinated - txheej txheej tseem ruaj khov thiab tiv thaiv graphite hauv qab. Qhov ntawd pab ua kom lub tshav kub kub sib xws thiab txo qhov muaj feem ntawm cov khoom me me tshwm sim thaum loj hlob.

Feem ntau, cov txheej no yog siv rau cov khoom xws li cov khoom siv susceptors, cov khoom nqa wafer, cov nplhaib graphite, lossis cov khoom ib nrab-hli. Cov no txhua tus koom nrog ncaj qha rau hauv kev ua kom sov lossis kev tso chaw ntawm wafer, yog li txhua qhov tsis ruaj khov me me tuaj yeem cuam tshuam rau cov txiaj ntsig. Vim li ntawd, cov khoom uas tau pleev xim feem ntau raug kho raws li cov khoom siv uas tseem yuav tsum tau txhim khu kev qha dhau ntau lub voj voog, tshwj xeeb tshaj yog hauv 4 txog 12 nti kev tsim khoom.