CVD SiC Coated Graphite Susceptor rau MOCVD

Name: CVD SiC Coated Graphite Susceptor rau MOCVD
Brand: Semixlab
Price: 60.0 USD
Availability: InStock
Rating: 4.5 (19 reviews)

Ua ib qho khoom siv tseem ceeb hauv Metal-Organic Chemical Vapor Deposition (MOCVD) epitaxy, CVD SiC Coated Graphite Susceptor rau MOCVD Epitaxy yog tsim los ua kom tau raws li qhov xav tau thermal, tshuaj lom neeg, thiab kev kho tshuab ntawm cov txheej txheem loj hlob ntawm cov khoom siv semiconductor. Tsim los nrog lub hauv paus graphite purity siab thiab cov tshuaj lom neeg vapor-deposited silicon carbide (CVD SiC) txheej, lub susceptor no muab cov thermal uniformity zoo heev, tiv taus zoo heev rau cov pa roj corrosive, thiab lub neej ntev hauv qab kev kub siab rov ua dua uas feem ntau ntsib hauv III-V thiab II-VI epitaxial ntau lawm. Peb txais tos koj cov lus nug.

NCO NTSOOV

Hauj lwm

Hauv kev lag luam compound-semiconductor niaj hnub no, cov cuab yeej MOCVD raug thawb hnyav dua li yav dhau los. Cov zog ntau dua, cov qauv khoom siv nruj dua, thiab cov hom phiaj tsim khoom nruj dua txhais tau tias txhua qhov khoom siv yuav tsum ua haujlwm tau zoo, voj voog tom qab voj voog. Ntawm cov no, cov graphite susceptor feem ntau raug saib tsis taus - tab sis nws yog ib qho khoom uas feem ntau ncaj qha ua rau wafer-kub sib xws, txheej-zoo sib xws, thiab tag nrho cov txiaj ntsig tsim khoom.

Qhov ntawd yog qhov uas Semixlab's coated susceptor los rau hauv. Peb pib nrog high-purity isostatic graphite, tom qab ntawd siv ib txheej silicon carbide ntom ntom los ntawm kev tso pa tshuaj lom neeg. Qhov tshwm sim yog ib feem uas sawv ntsug rau cov tshuaj lom neeg epi, xa cov cua sov hloov pauv tau zoo, thiab tsis muaj cov khoom me me - txawm tias tom qab ntau pua qhov kev khiav. Nws yog qhov kev xaiv pov thawj rau kev loj hlob GaN, SiC, AlN, AlGaN, thiab lwm yam khoom siv III-V, txawm tias koj ua cov khoom siv hluav taws xob, LEDs, lossis RF Cheebtsam.

Vim Li Cas Tus Susceptor Tseem Ceeb Ntau Dua Li Koj Xav

Hauv kev xyaum, tus susceptor tsis yog tsuas yog lub wafer tuav xwb. Nws cuam tshuam rau cov pa roj dynamics, thermal gradients hla lub hnab tshos, thiab qhov kev pheej hmoo ntawm kev sib kis ntawm cov pawg. Ib txheej SiC tsim zoo ua peb yam ib zaug: nws kaw lub graphite nto, tiv thaiv kev tawm pa tawm, thiab tiv thaiv kev tawm tsam los ntawm ammonia, hydrogen, thiab halide precursors. Qhov ntawd txhais tau tias tsawg dua kev ntxuav tsis ua haujlwm, rov ua dua zoo dua los ntawm kev khiav mus rau kev khiav, thiab - thaum kawg - ntau dua qhov tuag zoo ib wafer.

Cov Khoom Tseem Ceeb Peb Tau Tsim Rau Hauv Cov Txheej Txheem

● Ib lub tshav kub uas nyob ruaj khov thoob plaws hauv thaj chaw hnab tshos, yog li koj tsis tau txais cov chaw kub lossis cov npoo txias.

● Ib qho CVD Txheej SiC uas ntom tag nrho, nrog rau qhov porosity ze li xoom - uas yog qhov ua rau cov khoom me me tsawg.

● Kev tiv thaiv tshuaj lom neeg uas tiv taus cov zaub mov MOCVD uas tawv tshaj plaws, suav nrog cov uas muaj NH₃ thiab H₂ kub siab.

● Kev ruaj khov ntawm lub cev uas tiv taus cua sov thiab txias sai yam tsis tawg lossis tawg.

● Kev ua haujlwm kam rau siab txog li ob peb microns, nrog kev txhawb nqa OEM tag nrho rau kev tsim cov hnab tshos, cov qauv qhov, thiab cov kab uas hla.

Qhov twg peb cov Susceptors feem ntau siv

● GaN-based LED epitaxy (ob qho tib si ib txwm muaj thiab microLED)

● Cov qauv hluav taws xob GaN (piv txwv li HEMTs)

● SiC homoepitaxy thiab heteroepitaxy rau lub zog thiab RF

● Kev loj hlob ntawm AlN rau cov txheej deepUV thiab piezoelectric

● Lwm yam IIIIV ua ke – InGaN, AlGaN, thiab ntau dua

Ib Saib Ib Muag: Yam Koj Tau Txais

feature	Nws txhais li cas rau koj
Substrate	Isostatic graphite, cov tshauv ntsiab lus < 5 ppm
Txheej	CVD silicon carbide, tag nrho crystalline
Kev ua haujlwm thermal	Ruaj khov txog li 1400 ° C hauv H₂/NH₃ ib puag ncig
corrosion kuj	Dhau 100 teev NH₃ kev sim dej tsis hloov pauv qhov hnyav
lub neej	Feem ntau ntev dua 3–5 × dua li lwm cov uas tsis tau pleev xim lossis pleev xim
Kev xaiv kev cai	Txoj kab uas hla, suav lub hnab tshos, ntug geometry, qhov chaw ntawm lub qhov - txhua yam raws li koj daim duab kos

Vim Li Cas Peb Cov Neeg Siv Khoom Rov Qab Los

Peb tsis yog ib lub tuam txhab txheej xwb - peb yog ib tus khub uas nkag siab txog epitaxy los ntawm sab hauv mus rau sab nraud. Peb pab neeg tau ua haujlwm rau ob qho tib si lub reactor thiab sab txheej txheem, yog li peb paub tias qhov tseem ceeb yog dab tsi: kev sib cuag thermal tas li, txo qis kev hloov pauv, thiab kev tig rov qab sai thaum koj xav tau cov qauv rov ua dua. Txawm hais tias koj xaj tsib daim rau kab tsav lossis tsib puas rau kev tsim khoom ntau, peb siv tib txoj kev tshuaj xyuas thiab tib lub siab nyiam hloov kho.

Cov Lus Nug Feem Ntau - Cov Lus Teb Ncaj Qha

Q1: "CVD SiCcoated graphite susceptor" txhais li cas tiag?

A: Nws yog ib lub graphite disc uas tau muab ib txheej nyias nyias ntawm silicon carbide siv cov txheej txheem tso pa tshuaj lom neeg. Lub txheej txheej kaw cov graphite uas muaj qhov porous, yog li nws tsis tso cov khoom me me lossis cuam tshuam nrog cov pa roj hauv MOCVD chamber.

Q2: Vim li cas ho txhawj xeeb nrog SiC es tsis txhob tsuas yog graphite liab qab lossis txheej pyrolytic?

A: SiC muaj ib qho kev sib xyaw ua ke tsis tshua muaj - nws nyuaj, tshuaj lom neeg tsis muaj zog, thermally conductive, thiab muaj tus coefficient ntawm thermal expansion ze li ntawm graphite. Qhov ntawd txhais tau tias lub txheej tseem nyob ruaj khov los ntawm kev hloov pauv kub, tsis zoo li lwm cov ntaub ntawv uas tawg lossis tawg.

Q3: Cov ntaub ntawv epitaxial twg koj tuaj yeem khiav ntawm cov susceptors no?

A: Peb tau pom lawv siv tau zoo rau GaN, SiC, AlN, AlGaN, InGaN, thiab txawm tias qee cov hlau sib xyaw ternary thiab quaternary. Lub txheej txheej no yeej pom tseeb rau cov tshuaj lom neeg, yog li nws tsis cuam tshuam nrog kev doping lossis kev sib xyaw.

Q4: Koj puas ua tau cov qauv tsis raws li tus qauv lossis ntau lub hnab tshos?

A: Muaj tseeb tiag. Peb ib txwm siv tshuab ua cov hnab tshos tshwj xeeb - ntau txoj kab uas hla, qhov tob, thiab qhov sib nrug - raws li koj qhov loj me ntawm wafer thiab reactor layout. Tsuas yog xa peb daim duab kos hauv DXF lossis STEP hom ntawv.

Q5: Qhov no ua rau muaj kev tsim khoom ntau npaum li cas?

A: Peb txoj kev - tsawg dua cov khoom me me txhais tau tias muaj txiaj ntsig ntau dua ib zaug khiav; lub neej txheej ntev dua txhais tau tias hloov tsawg dua thiab tsis muaj sijhawm ua haujlwm; thiab tus cwj pwm thermal ruaj khov txhais tau tias koj tuaj yeem siv cov txheej txheem tib yam rau ntau lub hlis yam tsis tas rov ua kom zoo dua. Qhov ntawd ntxiv rau kev txhim kho tus nqi perwafer.