SiC Coated Kev Txhawb Nqa rau LPE PE2061S

Kev Txhawb Nqa SiC Coated rau LPE PE2061S yog ib qho khoom siv tseem ceeb hauv qhov kub thiab txias uas tsim tshwj xeeb rau LPE PE2061S cov kua epitaxy system. Hauv cov txheej txheem loj hlob ntawm semiconductor LPE siab heev, kev ruaj khov ntawm lub tshuab, kev ntshiab ntawm cov tshuaj lom neeg, thiab kev sib xws ntawm thermal ncaj qha txiav txim siab qhov zoo ntawm cov txheej epitaxial. Kev txhawb nqa SiC-coated no ua kom muaj kev ruaj khov ntawm cov qauv mus sij hawm ntev, txo cov kev pheej hmoo ntawm kev ua qias tuaj, thiab tswj kev ruaj khov ntawm thaj chaw thermal thaum lub sijhawm loj hlob ntawm qhov kub thiab txias rov ua dua.

Cov Txheej Txheem Epitaxy Ua Kua (LPE) muaj kev nkag siab zoo rau qhov kub thiab txias, kev ruaj khov ntawm cov yaj, thiab kev tswj cov khoom tsis huv. Hauv PE2061S system, cov qauv txhawb nqa ua haujlwm ua lub ntsiab lus thauj khoom kub siab, tswj qhov chaw tseeb ntawm theem wafer thiab cov khoom hauv cheeb tsam tshuaj tiv thaiv. Thaum lub sijhawm LPE loj hlob, txawm tias qhov kev hloov pauv me me ntawm cov qauv tuaj yeem ua rau cov yaj tsis ruaj khov lossis cov tuab tsis sib xws. Semixlab's SiC-coated support structure siv cov graphite isostatic siab ua lub substrate, ua ke nrog cov txheej txheem silicon carbide (SiC) tuab, sib xws. Qhov kev teeb tsa no qhia txog kev ruaj khov ntawm qhov ntev hauv qab cov xwm txheej thermal cycling xws li 700 ° C txog ntau dua 1100 ° C, ua kom muaj kev ua tau zoo epitaxial rov ua dua.

Ib qho tseem ceeb uas yuav tsum tau ua rau cov txheej txheem Liquid Phase Epitaxy (LPE) yog kev tswj hwm kev ua qias tuaj. Tsis zoo li Vapor Phase Epitaxy, kev loj hlob ntawm cov kua dej muaj kev sib cuam tshuam ncaj qha nrog cov khoom siv molten. Txhua qhov kev tso tawm ntawm cov khoom tsis huv los ntawm cov khoom siv hauv cov qauv cuam tshuam rau qhov concentration ntawm cov neeg nqa khoom, qhov ceev ntawm cov khoom siv crystal defect, thiab qhov chaw saum npoo. Cov txheej txheem SiC ua haujlwm ua ib txheej txheej tiv thaiv kev sib kis zoo ntawm cov ntaub ntawv graphite substrate thiab ib puag ncig molten. Lawv cov tshuaj lom neeg siab thiab kev tiv thaiv corrosion tiv thaiv kev sib kis carbon thiab cov hlau ua qias tuaj, yog li txhawb nqa kev loj hlob ntawm epitaxial purity siab thiab txhim kho wafer yield sib xws.

Kev tswj hwm thermal kuj tseem ceeb heev rau hauv cov kua theem epitaxy (LPE) systems. Lub txheej SiC ua rau muaj kev ua tau zoo heev ntawm thermal conductivity thiab kev tiv thaiv thermal shock zoo dua, pab txhawb rau kev faib tawm cua sov sib npaug hauv thaj chaw ua haujlwm. Los ntawm kev txo qis qhov kub thiab txias hauv zos, cov qauv txhawb nqa pab tswj kom muaj kev hloov pauv thermal ruaj khov - qhov tseem ceeb rau kev ua tiav cov txheej epitaxial tuab thiab qhov zoo ntawm interface. Hauv PE2061S system, kev rov ua dua ntawm cov txheej txheem yog qhov tseem ceeb rau kev ua haujlwm zoo, nrog rau kev ruaj khov ntawm thaj chaw thermal cuam tshuam ncaj qha rau kev sib xws ntawm cov khoom siv thiab kev ntseeg siab ntawm cov khoom siv mus sij hawm ntev.

Los ntawm kev ua haujlwm, cov qauv txhawb nqa SiC-coated ua rau lub neej ntawm cov khoom siv ntev dua thiab txo qhov zaus txij nkawm. Cov txheej SiC ntom ntom tiv thaiv cov graphite substrate los ntawm kev yaj thiab kev xeb kub siab, yog li ua rau lub neej ua haujlwm ntev dua thiab txo tus nqi tag nrho ntawm kev muaj. Nws lub zog kho tshuab ruaj khov ua kom tsis muaj kev sib txhuam, tawg, lossis kev puas tsuaj ntawm cov qauv tshwm sim thaum lub sijhawm rov ua dua thermal cycling.

Ua ib lub tuam txhab tsim khoom thiab tus muag khoom ntawm cov khoom txhawb nqa SiC-coated hauv Suav teb, txhua qhov kev txhawb nqa Semixlab SiC-coated rau LPE PE2061S yog tsim los ntawm cov qauv tswj hwm zoo kom lav qhov sib xws ntawm cov txheej txheem, qhov tuab sib xws, kev nplaum, thiab qhov tseeb ntawm qhov ntev. Cov khoom no tau tsim los rau kev sib raug zoo nrog cov qauv khoom siv PE2061S, ua rau kev sib koom ua ke ncaj qha rau hauv cov kab ntau lawm uas twb muaj lawm yam tsis muaj kev hloov kho. Nrog nws qhov kev ntseeg siab ntawm cov qauv kub siab, kev tswj hwm kev ua qias tuaj zoo dua, thiab kev ruaj khov ntawm thaj chaw thermal, Semixlab's SiC-coated txhawb nqa cov khoom rau LPE PE2061S muab kev daws teeb meem rau cov ntawv thov LPE epitaxial loj hlob siab heev. Nws ua haujlwm ua ib qho tseem ceeb rau cov tuam txhab tsim khoom semiconductor uas xav tau qhov zoo epitaxial ruaj khov, lub neej ntev ntawm cov khoom, thiab kev ua haujlwm zoo tshaj plaws. Peb tos ntsoov yuav los ua koj tus khub mus sij hawm ntev hauv Suav teb.