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Rau tiam tom ntej ntawm cov khoom siv hluav taws xob, cov silicon carbide (SiC) epi wafers yog cov khoom siv tshwj xeeb. Cov wafers no tshwj xeeb vim tias lawv muaj txiaj ntsig zoo heev rau ntau yam sib txawv. Koj tuaj yeem kawm paub tias dab tsi ua rau lawv tshwj xeeb thiab lawv ua li cas.
Lub SiC epi wafer yog ib yam khoom uas muaj nws qhov zoo tshwj xeeb tshaj yog hais txog cov khoom siv thiab lub zog vim nws yog silicon carbide-based wafer. Qhov ruaj khov ntawm cov hom transistors no ua rau lawv zoo tagnrho rau cov khoom siv hluav taws xob uas xav tau ua haujlwm hauv qhov kub heev lossis tsis zoo. Semixlab sic epi wafer kuj tseem tuaj yeem tso cua sov sai sai, thiab tuaj yeem muab tso rau hauv cov khoom siv hluav taws xob kom pab lawv tsis txhob kub dhau.
Feem ntau ntawm cov khoom siv hluav taws xob thiab cov khoom siv teeb pom kev zoo yuav yog raws li SiC epi wafers. Ib qho txiaj ntsig loj ntawm SiC epi wafers yog tias nws tuaj yeem tiv taus cov hluav taws xob siab thiab cov hluav taws xob siab yam tsis muaj kev puas tsuaj vim yog cov txheej txheem thev naus laus zis ntawm lub cuab yeej. Vim li no hauv lawv, lawv zoo tshaj plaws rau cov tshuab uas xav tau cov tshuab ua haujlwm sai thiab meej.
Nws yog ib qho nyuaj me ntsis, siv tau ntau yam thiab ntau kauj ruam ntawm SiC Semixlab epi waferRau qhov ntawd, ib qho me me ntawm cov pob zeb silicon carbide noob raug muab tso rau hauv ib lub chamber tshwj xeeb nrog cov roj uas muaj cov pa roj carbon thiab silicon. Lub chamber raug cua sov rau qhov kub siab heev uas yuam kom cov silicon carbide loj hlob nyob ib puag ncig cov pob zeb noob. Cov txheej txheem no rov ua dua (ua ntu zus) kaum lossis txawm tias ntau pua zaus los tsim ib txheej tuab ntawm silicon carbide ntawm lub wafer.
SiC uas tau muab tawm ua epi wafer tau kos kev saib xyuas ntau dua vim nws lub zog tawg siab thiab tam sim no rau cov khoom siv hluav taws xob thiab lub teeb. Hauv cov khoom siv hluav taws xob, SiCepi wafers siv rau hauv inverter thiab converter devices uas tswj kev ntws ntawm lub zog hluav taws xob. wafer rau lub teeb siv rau hauv lasers thiab LED daim ntawv thov hauv cov ntu teeb.
Nrog rau kev nce qib ntawm thev naus laus zis, yuav muaj ntau tus neeg xav tau SiC epi wafer. SiC-epi-wafers yuav muaj kev cuam tshuam ncaj qha rau cov khoom siv hluav taws xob tshiab thiab cov thev naus laus zis hluav taws xob tshiab. Nws tseem nyob rau cov tuam txhab zoo li Semixlab wafer sic kom paub seb yuav ua li cas nrog SiC epi wafers.
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