Tsev> ua yeeb yam
Kev txiav cov plasma yog ib txoj hauv kev zoo nkauj los ua cov khoom me me hu ua semiconductors. Semiconductors yog cov khoom me me hauv cov khoom siv hluav taws xob xws li xov tooj thiab khoos phis tawj, uas ua rau lawv ua haujlwm. Qhov ntawd txiav thiab loj cov semiconductors, ua rau lawv txoj haujlwm ua tiav zoo.
Semixlab plasma etching hauv semiconductor fabrication yog kev siv cov roj kub hu ua plasma, uas tuaj yeem txiav cov khoom zoo li riam. Cov txheej txheem no yog qhov tseem ceeb rau cov khoom siv hluav taws xob kom ua haujlwm zoo dua.
Xav txog plasma etching ib yam li tus kws kos duab yuav ua tiav ib daim haujlwm ntawm ib daim duab puab zoo kawg nkaus. Nws etching cov khoom me me rau ntawm ib lub semiconductor los pab ua haujlwm. Cov khoom siv hluav taws xob hloov kho rau cov khoom siv uas tsis muaj plasma etching tuaj yeem ua haujlwm tsis zoo.
Semixlab kev txiav plasma muaj ntau qhov zoo hauv kev kawm txog semiconductors. Nws "ua rau cov khoom me dua, ua rau lawv me dua thiab meej dua, yog li cov khoom siv khiav ceev dua thiab siv hluav taws xob tsawg dua. Nws kuj tseem txuag lub sijhawm thiab tus nqi hauv cov txheej txheem ntawm kev tsim khoom.
Muaj ntau txoj hauv kev siv plasma etching hauv kev ua kom tiav cov semiconductors. Qee qhov zoo dua rau kev txiav ib hom khoom lossis lwm yam, lwm qhov rau cov qauv nyuaj. Ib qho kev sib tw yog xyuas kom meej tias cov khoom raug txiav zoo meej, tsis muaj qhov yuam kev.
Txij no mus, cov kws tshawb fawb tab tom ua haujlwm rau txoj hauv kev los ua plasma etching zoo dua. Lawv kuj xav ua kom nws sai dua thiab raug dua kom cov khoom siv hluav taws xob tuaj yeem ua haujlwm tau zoo dua. Cov tswv yim tshiab no nrog Semixlab kev txiav semiconductor thiab plasma etching yuav tso cai rau tej yam kom ua tau zoo dua.