Los ntawm Kev Tswj Xyuas Cov Khoom Me Me mus rau Kev Txhim Kho Cov Khoom Noj Hauv Cov Txheej Txheem Epitaxy

Cov khoom me me li cov khoom me me me tuaj yeem ua rau cov wafers puas tsuaj Epitaxy kev loj hlob kev tsim khoom thiab yog li ntawd ua rau koj cov txiaj ntsig puas tsuaj. Txawm tias ib qho khoom me me uas tsis pom hauv lub reactor tuaj yeem ua rau qhov tsis zoo ntawm lub wafer kom nws tsis dhau. Yog li ntawd kev tswj cov khoom me me yog ib kauj ruam tseem ceeb rau cov khoom ruaj khov thiab zoo.

Ntau yam kev daws teeb meem ntawm cov khoom me me yog raws li cov khoom tawg, kev ntxuav tsis zoo lossis kev siv tsis raug ntawm cov khoom. Nws tuaj yeem ua qhov sib txawv zoo kawg nkaus rau cov txiaj ntsig yog tias qhov teeb meem raug daws los ntawm kev kho cov khoom me me no.

Yuav ua li cas qhov Roughness ntawm qhov chaw ua rau muaj teeb meem ntawm cov khoom me me hauv Epitaxy Production

Qhov teeb meem uas koj muaj tam sim no yog qhov chaw ntxhib uas ua rau cov khoom me me tawm vim yog kev ua haujlwm kub siab.

Cov qhov me me uas muaj nyob rau ntawm cov khoom piv txwv li thaum raug rau qhov kub thiab txias rov ua dua, thaum kawg tuaj yeem tsim mus rau hauv cov kab nrib pleb me me, thiab cov khoom me me pib mus ncig sab hauv ntawm lub tshuab nqus tsev. Nws yog cov khoom me me no uas poob rau ntawm cov wafers thiab ua rau muaj qhov tsis zoo.

Qhov teeb meem feem ntau pom zoo li no hauv Graphite qhov chaw yog qhov twg graphite tsis tau coated zoo vim hnav, thaum lub txheej tiv thaiv hnav tawm, nws tuaj yeem nthuav tawm cov graphite ntxhib hauv qab thiab qhov ntawd yuav poob cov khoom me me yooj yim dua.

Cov nto ntxhib yuav cuam tshuam rau cov pa roj ntws hauv lub reactor, uas yuav yooj yim ua rau cov khoom me me mus rau hauv thaj chaw ua haujlwm.

Kev kuaj xyuas tsis tu ncua yuav pom cov chaw nyob rau hauv lub xeev no ua ntej lawv dhau los ua qhov phem heev, yog tias cov khoom tau rov pleev xim lossis txhuam qhov no yuav pab tswj cov khoom siv tau ntev. Kev ceev faj thaum tuav cov khoom ntawm theem no kuj tseem yuav txo qhov khawb uas yuav ua rau muaj cov khoom me me tom qab.

Maj mam ua kom sov thiab txias maj mam thiab ceev faj yuav ua rau muaj kev ntxhov siab tsawg dua rau cov txheej txheej thiab ua rau qhov chaw hauv qab no.

Kev xyuas kom meej tias txhua qhov chaw du, yav dhau los, tau txhim kho ntau lub Hoobkas ua wafer hauv lawv txoj kev sib ntaus sib tua nrog cov khoom me me, thiab yog li ntawd ua rau lawv cov wafer ntau ntxiv.

Cov Txuj Ci Txheej Txheem CVD SiC Siab Tshaj Plaws rau Cov Chav Reactor Huv Si

cov Cvd sic txheej , ua ib txheej tshuaj resistant, tawv thiab du, tiv thaiv cov khoom me me tsim thaum lub sijhawm ua haujlwm reactor thiab yog li tiv thaiv cov khoom me me los ntawm kev ua qias tuaj ntawm cov wafers.

Hauv cov txheej txheem qub, qhov tuab ntawm cov txheej tsis sib xws thiab cov ces kaum thiab cov chaw zoo li nyuaj feem ntau yuav hnav tawm yooj yim tom qab cua sov, tsim cov khoom me me thiab ua rau cov wafers paug.

Cov txheej txheem CVD SiC niaj hnub no thiab Kev loj hlob ntawm Epitaxial semiconductor sim ua kom tau ib daim zaj duab xis sib npaug ntawm qhov chaw los ntawm kev tswj qhov kub thiab cov pa roj ntws zoo zoo, tsim cov zaj duab xis ruaj khov thiab ruaj khov dua nrog tsawg dua qhov ua tau hnav thiab cov khoom me me. Qee lub Hoobkas pom muaj tsawg dua cov khoom me me hauv lub reactor tom qab txhim kho lub kaw lus txheej. Lawv lub neej txheej ntev dua thiab cov khoom me me tau txo qis thaum lub sijhawm tag nrho.

Qhov du ntawm zaj duab xis kuj yog ib qho ntawm cov yam ntxwv tseem ceeb rau kev tiv thaiv cov khoom me me thiab cov pa phem. Ua kom zoo nkauj rau saum npoo ntawm zaj duab xis. Qhov no yuav txo qhov me me ntawm qhov chaw uas cov khoom me me lossis cov khoom seem yuav sib sau ua ke. Ntxiv mus, qhov chaw du ntawm cov txheej txheej kuj tseem tuaj yeem tiv thaiv kev sib sau ua ke ntawm cov khoom me me nyob ib puag ncig ntawm lub reactor uas kuj tseem yuav cuam tshuam rau cov roj ntws thiab tuaj yeem pab cov khoom me me kom deb ntawm cov wafers.

Saib xyuas seb xim txheej, qhov chaw thiab tuab ntawm txheej puas tseem ceeb. Yog tias koj pom muaj kev hloov xim, daim zaj duab xis yuav poob nws cov khoom, qhov chaw yuav ntxhib dua, thiab yog tias qhov tuab ntawm txheej nyias dua, tej zaum yuav yog lub sijhawm los hloov cov khoom seem.

Cov Txheej Txheem Kho Qhov Chaw Rau Cov Khoom Siv Epitaxial Ua Haujlwm Zoo

Qhov no tseem ceeb heev rau kev ua kom lub neej ntawm cov khoom siv ntev dua thiab txo cov khoom me me. Yog tias qhov chaw tsis tau npaj kom raug, cov txheej yuav muaj kev sib txuas tsis muaj zog thiab yuav tawg thaum siv rau hauv kev pabcuam.

Qhov no suav nrog kev tshem tawm cov plua plav, roj thiab cov cim machining, ua ntej daim ntawv thov ntawm cov txheej thiab Kev loj hlob ntawm Epitaxial hauv kev tsim cov ic Kuj tseem muaj lwm yam kev npaj ntxiv rau saum npoo av. Kev ua kom lub zog ua haujlwm yuav ua rau muaj txheej txheej zoo dua, ua rau nws tiv taus kub thiab kev hloov pauv mus los.

Qhov zoo ntawm qhov chaw yog qhov tseem ceeb; yog tias qhov chaw ntxhib dhau lawm ces cov txheej yuav tsis tuav tau zoo, lossis du dhau lawm thiab nws tsis muaj zog sib txuas. Thaum cov khoom raug tshem tawm ntawm kev tsim khoom lawv yuav tsum tau ua tib zoo saib xyuas vim tias hmoov av lossis roj yuav lo rau ntawm qhov chaw los ntawm tes lossis cov cuab yeej.

Qee cov kab ntau lawm tau kho lawv cov teeb meem me me los ntawm kev tsom mus rau lawv qhov kev npaj nto, thiab lwm tus kho qhov chaw siv plasma los txo cov kab mob me me.

Txhim Kho Kev Ruaj Ntseg ntawm Cov Khoom Siv hauv AIXTRON thiab Veeco EPIK Platforms

Qhov ruaj khov ntawm cov wafer yield yog tswj hwm nrog kev huv ntawm lub reactor thiab nws cov khoom. Qhov teeb meem feem ntau yog qhov xwm txheej tom qab ntxuav. Txawm tias qhov me me ntawm cov seem seem tuaj yeem tawg tawm hauv lub chamber thaum lub sijhawm ua tiav los tsim cov khoom me me, thaum kawg tsim cov wafer defects.

Qhov teeb meem thib ob yog nrog kev hnav thiab hnub nyoog ntawm cov khoom graphite coated. Txawm hais tias tsis muaj teeb meem pom tseeb ntawm cov graphite coated tom qab ntau lub voj voog, cov kab nrib pleb me me tuaj yeem tsim nyob rau hauv lub txheej uas yuav tsim cov khoom me me thaum lub sijhawm ua haujlwm. Cov pa roj ntws tuaj yeem ua tsis ruaj khov thaum cov chaw laus thiab ntxhib dhau sijhawm uas yuav ua rau cov khoom tsis sib xws lossis nkag mus rau hauv cov dej ntws wafer.

Txhawm rau txhim kho kev ruaj khov, ntau lub Hoobkas siv lub cuab yeej taug qab lub neej ntawm cov khoom. Lawv tuaj yeem txheeb xyuas seb cov khoom siv tau ua haujlwm ntev npaum li cas, kwv yees thaum twg yuav tsum tau hloov cov khoom, thiab ua cov kev ntsuas tiv thaiv kom txhim kho cov txiaj ntsig. Txawm hais tias kev ntxuav huv yog qhov zoo, kev ntxuav hnyav dhau tuaj yeem ua rau cov txheej tiv thaiv puas tsuaj thiab ua rau qhov chaw ntxhib. Feem ntau, kev saib xyuas tiv thaiv thiab cov sijhawm hloov pauv kom raug tuaj yeem txhim kho cov txiaj ntsig ntawm wafer.

Kev Tshawb Fawb Txog Kev Ua Tsis Zoo ntawm Cov Cheebtsam Graphite Uas Muaj Kev Huv Si

Cov khoom siv graphite ntshiab yog ua los kom tiv taus qhov kub siab, tab sis kev ua qias tuaj yeem ua rau tsis ua haujlwm ntev.

Kev ua qias tuaj yeem tshwm sim los ntawm kev sib cuag ua qias thaum ua haujlwm nrog cov khoom siv. Yog tias cov cuab yeej uas ua haujlwm nrog graphite, lub hnab looj tes lossis thaj chaw uas graphite khaws cia qias neeg, cov hmoov av yuav tshwm sim ntawm qhov chaw thiab tom qab ntawd thaum lub sijhawm ua haujlwm kub siab yuav ua rau muaj kev cuam tshuam nrog graphite. Tsis tas li ntawd, thaum lub sijhawm kho kub siab sab hauv cov qhov me me ntawm graphite cov tshuaj lom neeg yuav nyob sab hauv. Cov tshuaj no tom qab ntawd nthuav dav thiab / lossis ua rau muaj kev cuam tshuam thiab tso cov khoom me me.

Piv txwv li: Thaum lub sijhawm tsim khoom ib zaug, qhov tsis zoo ntawm lub wafer tau nce ntxiv tas li hauv lub sijhawm ob peb lub lis piam. Thaum kuaj xyuas nws pom tias muaj kev ua qias tuaj hauv cov graphite liners uas sib raug rau qhov chaw ntawm cov khoom me me ntawm lub wafer. Kev hloov pauv kub ua rau qhov teeb meem hnyav dua. Txhua qhov cua sov thiab txias ua rau muaj kev ntxhov siab rau cov chaw ua qias tuaj. Graphite huv feem ntau ua haujlwm zoo, tab sis cov chaw ua qias tuaj nthuav dav ntawm ntau qhov sib txawv, uas maj mam tsim cov kab nrib pleb me me.

Muaj ob peb kauj ruam uas siv tau los txo qhov kev pheej hmoo no. Kev khaws cia kom zoo hauv cov thawv huv thiab kaw kom ruaj yuav pab tiv thaiv kev ua qias tuaj thaum ntxov. Kev siv cov cuab yeej yuav tsum tsuas yog siv rau cov khoom uas huv si xwb. Thaum lub sijhawm saib xyuas, cov txheej txheem ntxuav maj mam ua haujlwm zoo dua li cov tshuaj lom neeg lossis cov kauj ruam abrasive, vim tias kev kho tsis zoo tuaj yeem qhib cov qhov tshiab ntawm qhov chaw.

Kev taug qab keeb kwm ntawm ib feem kuj pab tau. Thaum ib feem tau dhau los ntawm ntau lub voj voog lossis ntau kauj ruam ntxuav, nws yog ib qho tseem ceeb kom tshuaj xyuas nws kom zoo dua ua ntej siv dua. Kev hloov me me ntawm cov xim lossis cov qauv ntawm qhov chaw tuaj yeem ua rau muaj kev sib kis tob dua.

Raws li lub sijhawm dhau los, kev tswj cov ntsiab lus me me no pab kom cov khoom graphite ruaj khov thiab txo cov xwm txheej tsis tau xav txog hauv cov kab ke epitaxy.