Lub Luag Haujlwm ntawm SiC-Coated Susceptors hauv Veeco LED Epitaxy Processes

Ib puag ncig LED epitaxy yog ib qho chaw kub heev thiab rhiab heev, thiab kev hloov pauv me ntsis ntawm ib puag ncig yuav ua rau qhov zoo ntawm wafer sib txawv. Susceptor yog ib feem tseem ceeb uas nyob hauv lub reactor. Nws txhawb nqa lub wafer thaum lub sijhawm loj hlob epitaxy, nws kuj ua lub luag haujlwm tseem ceeb hauv kev faib cov cua sov rau tag nrho wafer sib npaug. Feem ntau ntawm Veeco LED epitaxy systems siv graphite susceptor coated nrog SiC txheej. SiC txheej tuaj yeem tiv thaiv graphite los ntawm kev puas tsuaj los ntawm cua sov thiab tshuaj lom neeg, thiab muab cov LED zoo sib xws.

Yuav ua li cas CVD SiC Txheej Txhim Kho Thermal Uniformity hauv Veeco EPIK Tools

Khaws cov wafer ntawm qhov kub thiab txias thaum lub sijhawm tsim cov LEDs zoo yog qhov tseem ceeb xav txog. Qhov no Cvd ib txheej tsim ib qho chaw ruaj khov ntawm graphite susceptor uas faib cov cua sov sib npaug thaum lub sijhawm loj hlob ntawm SiC LED substrate.

Txawm tias thaum tsis muaj Cvd sic txheej Yog siv, qhov sib txawv me ntsis ntawm cov graphite ib leeg tuaj yeem ua rau muaj qhov sib txawv ntawm cov yam ntxwv hloov pauv cua sov ntawm qhov chaw, txawm li cas los xij nrog cov txheej txheem CVD SiC zoo dua, cov yam ntxwv hloov pauv cua sov ntawm qhov chaw tau txhim kho ntau dua thiab yog li ntawd cov qauv thermal zoo sib xws. Ib lub chaw muaj teeb meem nrog cov xim tsis sib xws thoob plaws nws cov wafers, ua rau muaj cua sov tsis sib xws thoob plaws nws qhov chaw. Txawm li cas los xij, siv cov CVD SiC tuab dua, zoo dua thiab CVD TSI txheej txheem kov yeej qhov tsis ruaj khov no.

Qhov tsis zoo ntawm qhov chaw thiab khawb ntawm CVD SiC txheej thiab High purity CVD SiC raw khoom tej zaum yuav ua rau muaj kev hloov pauv ntau ntxiv vim tias lawv tsim cov nqi tsis sib xws ntawm cov khoom loj hlob, lossis tej zaum 'qhov kub kub' ntawm qhov chaw txheej. Cov txheej txheem raug kuaj xyuas tsis tu ncua rau kev hnav thiab tawg los ntawm ntau lub tuam txhab tsim khoom los ntawm kev saib xyuas qhov xwm txheej ntawm CVD SiC txheej tom qab ntau lub voj voog cua sov. Lub susceptor tuaj yeem tig tau thoob plaws hauv CVD txheej txheem txhawm rau ua kom muaj kev sib xws thiab ruaj khov ntawm CVD SiC txheej.

Txawm li cas los xij, kev siv CVD SiC txheej tsis tuaj yeem tshem tawm txhua qhov kev hloov pauv tab sis ua rau nws ua tau ntau dua los tsim cov ntaub ntawv tseem ceeb rau kev tsim khoom LED ntawm qhov loj.

Lub luag haujlwm ntawm High-Purity Graphite Susceptors hauv LED Epitaxy

Tus susceptor txhawb nqa thiab ua kom lub wafer nyob rau ntawm qhov kub thiab txias ruaj khov thaum lub txheej siv lead ua loj hlob. Feem ntau siv graphite, thiab qhov tseeb yuav tsum siv graphite purity siab vim nws tuaj yeem siv rau hauv qhov kub thiab txias heev thiab yuav tsis cuam tshuam.

Qhov kev ua kom sov siab no pab hloov cov cua sov los ntawm cov khoom cua sov mus rau lub wafer thiab ua kom qhov kub ntawm lub wafer ruaj khov thaum lub txheej loj hlob. Vim tias qhov kub me me ua rau kev loj hlob ntawm cov siv lead ua hloov pauv nws yuav tsum tsis tu ncua li sai tau.

Qhov huv si yog ib qho tseem ceeb hauv cov graphite siv. Cov graphite uas muaj kuab lom muaj hlau thiab lwm yam tsis huv uas yuav tawm ntawm cov susceptor thaum lub sijhawm cua sov thiab tso rau ntawm lub wafer ua rau muaj qhov tsis zoo ntawm cov siv lead ua.

Qee cov chaw tsim khoom pom tias muaj kev nce ntxiv ntawm cov LEDs uas tsis zoo siv cov graphite uas tsis huv. Cov graphite uas huv siab thiab kev tshuaj xyuas nruj dua tau ua rau muaj txiaj ntsig zoo dua. Lwm qhov teeb meem yog qhov tiaj tus ntawm lub susceptor.

Tom qab ntau zaus ua kom sov thiab txias, tus susceptor yuav deform. Qhov kev cuam tshuam no cuam tshuam rau cov pa roj thiab qhov chaw ntawm wafer, uas ob qho tib si cuam tshuam rau kev ruaj khov ntawm kev loj hlob ntawm cov txheej.

Txo cov teeb meem ntawm cov khoom me me hauv Epitaxy los ntawm kev tsim qauv nto zoo tshaj plaws

Feem ntau ntawm cov teeb meem me me pib nrog cov nplaim uas cov khoom thiab cov pa roj sib cuag. Cov khoom siv los ntawm cov khoom siv, cov khoom siv hauv pem teb thiab lwm yam tuaj yeem tso cov khoom me me maj mam tawm thaum lawv cov nplaim raug khawb lossis hnav.

Hauv cov pa roj kub siab, cov kab nrib me me lossis hnav ntawm cov txheej txheej yuav tsim cov khoom me me uas yuav mus ncig los ntawm lub reactor thiab tso rau ntawm cov wafers. Nrog lub cheeb loj txaus, ib qho khoom me me ntawm ib qho wafer nto yuav ua rau muaj ib qho tsis zoo ntawm LED kawg.

Qhov du yuav txo qhov muaj feem yuav muaj cov khoom me me tawm, txawm li cas los xij nws yuav tsum muaj peev xwm sawv ntsug rov qab ua dua. Qee cov txheej txheej yuav zoo li muaj qhov chaw zoo hauv chav tsev kub thaum nws tsim cov kab nrib pleb me me tom qab ntau zaus khiav. Cov teeb meem ntawm cov khoom me me feem ntau tshwm sim maj mam thaum cov khoom txheej raug hnav.

Rau ntau qhov txheej txheem, kev puas tsuaj yog nyob ntawm ntug vim tias qhov no muaj kev ntxhov siab ntau tshaj plaws. Los ntawm kev tswj qhov zoo, tuab ntawm txheej thiab kev ntxhov siab ntawm ntug, peb tuaj yeem txo qhov hnav.

Yog li ntawd, txhawm rau tiv thaiv kom cov txheej txheej tsis txhob tev tawm tom qab txhua zaus khiav, qhov kev sib txuas ntawm cov txheej txheej thiab cov graphite substrates yuav tsum zoo. Kev tshuaj xyuas ntau zaus hauv lub teeb ci ntsa iab lossis kev kuaj yuav ua rau muaj kev ceeb toom txog cov teeb meem no.

Piv Txwv Cov Graphite Liab Qab thiab SiC-Coated Susceptors hauv LED Ntau Lawm

Txawm hais tias ob qho tib si graphite liab qab thiab SiC coated susceptors siv rau hauv LED fabrication, lawv ua haujlwm sib txawv heev hauv lawv cov kev ua haujlwm.

Cov laj thawj uas siv cov graphite liab qab yog vim nws ua haujlwm tau zoo hauv kev hloov pauv cua sov thiab muaj thaj chaw loj uas raug tshav kub, thiab muaj cov khoom me me tso tawm qeeb qeeb los ntawm nws qhov chaw tom qab ob peb teev khiav, txawm hais tias nws muaj lwm yam tsis zoo. Cov no yog, kev faib tawm cua sov tsis zoo thiab thaj chaw siab ua rau nws muaj kev cuam tshuam ntau dua rau cov pa hauv chav thiab yog li yuav muab cov khoom me me nrog kev ceev dua, txawm hais tias qhov kev sib sau ua ke qeeb no yog kev pauv pauv hauv ntau kis.

Tus neeg sawv cev uas muaj SiC coated kov yeej qee qhov teeb meem no nrog kev ntxiv cov txheej tiv thaiv tawv.

Ib tug yuav saib cov LED fabs uas ua haujlwm ntau heev los ntawm cov voj voog ntau lawm uas xav tau kev hloov pauv ntev dua. Qee lub fabs pom tias dhau sijhawm ntev nrog graphite liab qab uas maj mam hloov pauv ntawm wafer uniformity tshwm sim tom qab ntau lub voj voog thermal. Qhov saum npoo ntawm susceptor zoo li hloov pauv qeeb thiab yog li ntawd qhov kev faib tawm cua sov dhau los ua tsis ruaj khov.

Kev siv cov khoom siv SiC coated rau kev khiav ntev txhais tau tias qhov kev hloov pauv ntawm wafer uniformity no tsawg dua, piv txwv li Nrog ib lub Hoobkas, hloov mus rau SiC coated txhais tau tias lawv cov kab tsis tas yuav tsum tau kho ntau zaus thaum hloov los ntawm cov pawg sib txawv.

Cov khoom siv thermal tuaj yeem tshawb nrhiav tau. Cov graphite liab qab zoo li tsim qee qhov tsis ruaj khov ntawm qhov kub ntawm nws qhov chaw. Qhov no xav tias yog ib qho tseem ceeb ntawm kev hloov pauv qeeb ntawm qhov chaw thiab kuj yog ib qho tseem ceeb ntawm qee yam tsis paub ntawm cov txheej.

Lub txheej SiC xauv qhov chaw, nws tiv thaiv kev hloov pauv, uas txhais tau tias qhov hloov pauv cua sov yog tas li. Qhov cuam tshuam no muaj rau LEDs yog tias yog tias txheej loj hlob raug rau qhov kub thiab txias hloov pauv, qhov wavelength / qhov ci kuj tseem yuav hloov pauv.

Muaj, qhov tsis zoo ntawm kev siv SiC coated susceptors; lawv tus nqi thiab qhov ntawd, txawm hais tias lawv tsis muaj cov khoom me me, lawv yuav tso tawm cov khoom me me yog tias lawv tawg, thiab yog li ntawd tuaj yeem qhia cov khoom me me es tsis txhob txo lawv.

Yog li ntawd, yuav tsum tau saib xyuas thiab saib xyuas lawv cov txheej txheem kom zoo kom tiv thaiv kev puas tsuaj ua ntej qhov tsis zoo tshwm sim, txawm hais tias, nrog kev siv cov txheej txheem tiv thaiv kev hnav lawv yuav tsum kav ntev rau qee lub sijhawm, thaum ntawd lawv yuav raug hloov.

Cov Tswv Yim Txog Kev Txij Nkawm thiab Kev Ntxuav Rau Cov Khoom Siv Veeco Uas Siv Tau Ntev

Kev ua kom cov khoom Veeco nyob rau hauv qhov zoo yuav ua rau lub neej ntawm cov khoom ntev dua thiab tswj kom muaj kev ruaj khov ntawm cov txheej txheem epitaxy. Cov seem seem sib sau ua ke dhau sijhawm ntawm cov susceptors, liners thiab cov nplhaib coated. Cov seem seem sib sau ua ke, txawm tias nyob rau hauv cov khaubncaws sab nraud povtseg nyias li cov uas tuaj yeem txheeb xyuas tau, tuaj yeem cuam tshuam rau qhov kub thiab txias thoob plaws qhov chaw thiab ua rau cov txheej txheem tsis sib xws.

Muaj ib tug engineer tau tshaj tawm tias pom qhov ci ntawm LED tsis sib npaug lossis cov wafer tsis zoo thiab tom qab ntawd tshawb xyuas cov khoom seem ua qhov teeb meem. Yuav tsum tsim cov txheej txheem ntxuav sib txawv rau cov ntaub ntawv sib txawv. Cov khoom siv graphite uas muaj cov khoom huv si yuav tsum tsis txhob raug cov tshuaj abrasive lossis cov txheej txheem txhuam abrasive vim tias cov txheej txheem no tuaj yeem ua rau qhov khoom puas.

Muaj ntau txoj kab ntau lawm tsuas yog siv cov tshuaj ntxuav plasma raws sijhawm lossis cov tshuaj siv tshuaj uas zoo dua los tshem tawm cov khoom sib sau ua ke. Nws tseem ceeb heev uas yuav tsum ua tib zoo tuav cov khoom uas muaj SiC. Txawm hais tias qhov no muaj zog heev, cov qhov me me thiab cov khawb uas tshwm sim thaum lub sijhawm ntxuav yuav ua rau muaj cov kab nrib me me uas tuaj yeem yog cov khoom me me. Ib txoj kab ntau lawm tau daws qhov teeb meem no los ntawm kev siv cov khoom siv ntxuav mos dua thiab tsim cov txheej txheem zoo dua rau cov khoom no.

Kev tswj lub neej ntawm ib feem kuj tseem yuav ua tom qab ntxuav tas. Tsuas yog luam theej duab sai sai seb puas muaj xim tsis zoo, tawg me me lossis tsis sib npaug ntawm cov xim ci ntsa iab tuaj yeem pom thawj qhov pov thawj ntawm qhov tsis ua haujlwm ntawm ib feem. Ntau lub tuam txhab siv kev saib xyuas lub neej ntawm ib feem es tsis txhob cia siab rau kev hloov cov khoom raws li qhov tsis ua haujlwm. Cov khoom yuav raug hloov ua ntej qhov teeb meem pom tseeb.

Kev khaws cia kuj feem ntau tsis tseem ceeb npaum li cas. Txawm hais tias huv si los xij, cov khoom no yooj yim muaj plua plav thiab dej noo thaum khaws cia rau hauv qhov chaw qhib thiab yuav tsum tau kaw rau hauv cov thawv huv ua ntej siv tom ntej.

Nyob rau lub sijhawm dhau los nws pom tseeb tias qhov tseem ceeb rau lub neej ntev yog cov khoom me me, ua tiav tau zoo txhua hnub. Tias txoj hauv kev maj mam ntawm cov txheej txheem ntxuav, kev ua tib zoo, thiab kev saib xyuas tas li ntawm lub neej ib feem tuaj yeem cuam tshuam rau kev ruaj khov hauv cov txheej txheem epitaxy.