Vim li cas TaC Coated Tubes tseem ceeb rau High-Purity SiC Ib Leeg Crystal Loj Hlob

Kev loj hlob ntawm cov khoom siv silicon carbide (SiC) uas muaj cov khoom siv ntshiab heev tsis yooj yim. Qhov kub hauv lub cub tawg loj hlob yog siab heev thiab txawm tias me me ntawm cov khoom tsis huv tuaj yeem ua rau tag nrho cov khoom puas tsuaj. Cov raj xa dej TaC coated nyob ntawm no. Cov raj no ua haujlwm ua ib qho kev tiv thaiv kom tswj tau qhov huv thaum lub sijhawm ua haujlwm thiab tiv taus cov cua sov thiab cov pa roj uas muaj zog. Hauv kev xyaum, cov engineers tau pom tias cov khoom me me raug tso tawm los ntawm cov khoom lossis lawv hnav tawm sai sai hauv cov ntawv thov tsim khoom uas tsis muaj txheej. Hauv qab cov xwm txheej zoo li no, qhov zoo ntawm cov siv lead ua kom txo qis. Cov siv lead ua SiC raug loj hlob nrog tsawg dua qhov tsis zoo thiab zoo dua los ntawm kev tswj hwm lub raj kom ruaj khov, huv thiab kev ntseeg siab nrog Tac txheej .

Cov Txheej Txheem thiab Cov Teeb Meem Khoom Siv hauv SiC Ib Leeg Crystal Loj Hlob

Cov xwm txheej ntawm kev loj hlob ntawm cov siv lead ua ib leeg ntawm SiC yog qhov hnyav heev. Qhov kub ntawm lub cub tawg yog siab heev, feem ntau tshaj 2000 ° C, thiab nyob ntawm qhov kub no rau lub sijhawm ntev. Kev hloov pauv ntawm cov khoom siv lossis cov pa roj txawm tias nyob rau theem no tuaj yeem cuam tshuam rau qhov zoo ntawm cov siv lead ua. Lub chamber loj hlob feem ntau yog puv nrog cov pa roj uas cuam tshuam nrog cov khoom siv, thiab cov khoom siv carbon-based raug rau cov tshuaj lom neeg siab heev. Qhov ntawd ua rau muaj teeb meem rau kev ruaj khov ntawm cov khoom siv. Kev ua qias tuaj yog ib qho teeb meem tshwm sim. Thaum lub raj sab hauv lossis sab hauv ntawm lub cub tawg pib lwj, cov khoom me me ntawm lub raj tuaj yeem poob rau hauv thaj chaw loj hlob. Cov khoom me me no yuav yog qhov tsis zoo hauv cov siv lead ua, thiab cov txiaj ntsig yuav raug txo qis. Qhov no feem ntau yog pom thaum lub sijhawm tsim khoom hauv cov qauv siv lead ua tsis sib xws lossis kev sib cais tsis xav tau uas cuam tshuam rau kev ua haujlwm wafer tom qab ntawd. Kev ntxhov siab thermal yog lwm qhov teeb meem. Kev ua kom sov thiab txias hauv cov khoom siv ua rau lawv nthuav dav thiab ntsws dua. Dhau sijhawm tawg lossis kev puas tsuaj ntawm qhov chaw yuav tshwm sim yog tias cov khoom siv tsis coj qhov kev ntxhov siab no zoo. Thaum kev puas tsuaj pib nws nyuaj dua los ua tiav cov xwm txheej loj hlob ruaj khov. Cov tshuaj tiv thaiv uas muaj cov pa roj kuj tseem ceeb. Cov pa roj xws li silicon thiab carbon muaj cov tshuaj sib xyaw siv rau hauv Sic txheej kev loj hlob. Cov pa roj no tuaj yeem cuam tshuam nrog cov khoom siv ib txwm muaj ntawm qhov kub siab, thiab ua rau lawv qeeb qeeb. Qhov no yuav cuam tshuam rau lub neej ntawm cov khoom siv thiab qhov muaj feem yuav ua rau muaj kuab paug. Sab hauv, cov engineers tau pom tias qee zaum, txawm tias qhov kev txhim kho me me hauv kev ruaj khov ntawm lub raj tuaj yeem ua rau muaj kev sib npaug ntawm cov siv lead ua hauv cov chaw tsim khoom tiag tiag. Piv txwv li, kev saib xyuas lub voj voog nce ntxiv thiab cov qhov tsis zoo ntawm wafer txo qis tom qab ntau qhov kev khiav thaum siv cov txheej sab hauv uas tiv taus ntau dua. Yog vim li cas nws thiaj li tseem ceeb uas yuav tsum xaiv cov khoom siv zoo hauv thaj chaw kub. Kev txias tsis yog qhov yuav tsum tau ua xwb; nws tseem ceeb heev kom ntseeg tau tias muaj kev ruaj khov ntawm tshuaj lom neeg, kev tiv thaiv kev hnav thiab kom muaj ib puag ncig huv si thoob plaws lub neej ntawm cov tshuab.

Kev Ruaj Ntseg Tshuaj ntawm TaC Coatings hauv Cov Chaw Loj Hlob Kub Siab

Hauv SiC ib leeg siv lead ua ke, sab hauv lub cub tawg kuj raug cua sov thiab muaj tshuaj lom neeg heev. Ntau yam khoom siv feem ntau yuav maj mam ua rau lossis lwj thaum muaj cov pa roj silicon thiab carbon uas raug pub rau hauv thaj chaw kub heev. Qhov no yog qhov uas TaC (tantalum carbide) txheej txheem sawv tawm. Cov qauv tshuaj lom neeg ntawm TaC muaj zog heev thiab nws nyuaj rau ua rau feem ntau cov pa roj uas yuav loj hlob siv lead ua ke. Nws tswj nws cov duab thiab tsis tso cov khoom tsis xav tau yooj yim rau hauv chav txawm tias kub tshaj 2000 ° C. Qhov kev ruaj khov no tuaj yeem pab txhawb rau qhov huv ntawm SiC siv lead ua ke. Kev txo cov sijhawm ib puag ncig tuaj yeem ua qias tuaj los ntawm kev ua puas rau qhov chaw txo qhov muaj feem yuav ua qias tuaj. Nyob rau hauv cov xwm txheej tiag tiag ntawm kev tsim khoom, cov khoom tsis tau coated lossis cov khoom coated me me yuav pib puas tsuaj tom qab ob peb lub voj voog cua sov. Raws li lub sijhawm, cov engineers yuav pom qhov roughness ntawm qhov chaw, thinning lossis txawm tias shedding ntawm cov khoom me me. Tom qab ntawd, cov khoom siv lead ua ke kuj nce thiab cov khoom lag luam tsis sib xws lawm. CVD TSI txheej yuav qeeb cov txheej txheem no los ntawm kev muab ib qho kev tiv thaiv ntawm cov khoom siv hauv paus thiab cov pa roj reactive. Kev tiv thaiv rau cov pa roj nplua nuj silicon yog lwm qhov tseem ceeb. Silicon yuav tshwm sim ua pa thaum lub sijhawm loj hlob thiab yuav cuam tshuam nrog cov khoom siv hauv lub cub tawg. Hauv qab cov xwm txheej no, ntau cov ntaub ntawv feem ntau tsim cov tshuaj tsis xav tau dhau sijhawm. Hauv qhov xwm txheej ntawm TaC, txawm li cas los xij, cov ntawv cog lus muaj zog thiab txheej ntawm kev cuam tshuam tsis yooj yim tsim. Qhov no yuav pab tswj hwm qhov chaw huv dua. Hauv kev siv tiag tiag, cov fabs nrog TaC txheej feem ntau tshaj tawm cov sijhawm txij nkawm ntev dua. Cov nplaim coated yog ntev dua thiab tsis tas yuav hloov pauv qhov chaw rov ua dua raws li feem ntau pom nrog lwm cov phiaj xwm. Qhov no kuj pab tswj hwm qhov chaw cub tawg ruaj khov dua uas yog qhov tseem ceeb rau kev tsim cov siv lead ua SiC uas muaj tsawg dua qhov tsis zoo. Txoj cai rau cov engineers yog qhov yooj yim heev: Hauv qhov chaw reactive no, nws tsis yog tsuas yog hais txog kev tiv thaiv cua sov xwb. Nws kuj txhais tau tias tseem tshuav cov tshuaj tsis hloov pauv hauv nruab nrab ntawm txhua qhov kev cuam tshuam uas tab tom tshwm sim nyob ib puag ncig nws.

Txo Kev Ua Phem thiab Kev Tsim Qhov Tsis Zoo thaum Lub Caij Siv Crystal Loj Hlob

Hauv kev loj hlob ntawm SiC ib leeg siv lead ua ke, txawm tias qhov me me tshaj plaws ntawm kev ua qias tuaj yeem tsim teeb meem ntev. Yog tias lub cub tawg muaj cov hmoov av me me lossis cov khoom me me ntawm kev ua qias tuaj, nws tuaj yeem dhau los ua qhov tsis zoo hauv cov qauv siv lead ua ke. Qhov tsis zoo no thaum tsim tau tuaj yeem kis mus rau hauv lub wafer thiab cuam tshuam rau lawv cov kev ua haujlwm hauv cov khoom siv fais fab yav tom ntej. Cov khoom rooj tog yog cov ua rau muaj kev ua qias tuaj. Hauv qab qhov kub siab heev, cov nplaim yuav maj mam lwj lossis poob cov khoom me me. Cov khoom me me no tuaj yeem koom ua ke rau hauv thaj chaw loj hlob thiab lawv tuaj yeem raug ntes hauv cov siv lead ua ke loj hlob. Hauv qhov chaw ua haujlwm tiag tiag, cov engineers feem ntau pom cov khoom tsis zoo ntau dua thaum cov khoom pib laus lossis lwj hauv thaj chaw kub. Hauv txoj hauv kev yooj yim tab sis tseem ceeb, lub raj nrog TaC txheej pab txo qhov kev pheej hmoo no. Cov txheej tsim ib qho chaw ruaj khov thiab ruaj khov uas tiv taus kev tawg thiab tawg thaum raug cua sov. Qhov no yog vim tias tus lej ntawm cov khoom me me uas tawm hauv lub chamber thaum lub sijhawm tsim khoom ntev raug txo qis. Kev loj hlob ntawm cov siv lead ua ke hauv lub cub tawg ua rau cov siv lead ua ke huv dua. Kev ua qias tuaj ntawm cov tshuaj kuj yog ib qho teeb meem tshwm sim. Qee cov ntaub ntawv yuav cuam tshuam nrog cov pa roj txheej txheem los tsim cov khoom tsis xav tau. Cov no tuaj yeem rov qab mus rau lwm qhov ntawm qhov chaw ntawm cov siv lead ua ke lossis nyob ze. Qhov no ua rau muaj kev loj hlob tsis tu ncua dhau sijhawm, lossis rau cov teeb meem me me. Qhov chaw ruaj khov ntawm TaC pab txo lawv thiab tswj hwm ib puag ncig ntawm cov pa roj. Txawm tias kev nce qib me me hauv kev tswj hwm kev ua qias tuaj yeem muaj kev cuam tshuam loj heev hauv cov kab ntau lawm. Piv txwv li, thaum siv nrog cov khoom coated, tsawg dua kev cuam tshuam rau kev ntxuav thiab tsawg dua cov wafers tsis lees paub feem ntau pom. Qhov no ua rau muaj kev sib xws thiab kev ua haujlwm zoo, thaum tswj hwm cov txheej txheem loj hlob. Hauv cov lus yooj yim, cov raj coated nrog TaC zoo li lub tsho tiv thaiv. Lawv tsis tsuas yog muaj sia nyob hauv ib puag ncig nyuaj, lawv kuj pab tswj kev huv ntawm tag nrho lub cev, uas yog qhov tseem ceeb rau kev loj hlob zoo ntawm SiC nrog cov qib tsis zoo tsawg kawg nkaus.

Lub luag haujlwm hauv kev txhim kho cov qoob loo thiab cov khoom siv Crystal zoo sib xws

Rau SiC ib leeg siv lead ua ntau lawm, cov txiaj ntsig thiab kev sib xws yog qhov tseem ceeb npaum li kev ua tau zoo ntawm kev loj hlob nyoos. Yog tias nws ua tau los tsim cov siv lead ua hauv lub cub tawg, txoj haujlwm nyuaj dua yog xyuas kom meej tias txhua pawg muaj qhov zoo sib xws. Kev hloov pauv hauv thaj chaw kub tuaj yeem ua rau muaj kev hloov pauv ntawm cov nqi tsis zoo, kev loj hlob siv lead ua, thiab / lossis wafers uas tsis ua raws li cov lus qhia ntawm lub cuab yeej. Cov kev hloov pauv no tuaj yeem txo qis los ntawm kev tswj hwm qhov chaw loj hlob ruaj khov dua lub sijhawm nrog kev siv cov raj TaC coated. Yog tias cov khoom hauv lub cub tawg tseem huv thiab tsis hnav, cov xwm txheej hauv lub cub tawg tsis hloov pauv sai. Qhov kev ruaj khov no kuj txhais tau tias qhov kub thiab txias thiab ib puag ncig roj ntawm cov siv lead ua yog sib xws ntau dua hauv ntau qhov kev khiav. Ib qho teeb meem uas cov engineers ntsib hauv cov kab ntau lawm tiag tiag yog tias qhov zoo ntawm cov pawg thawj zaug tom qab kev saib xyuas yuav zoo siab, tab sis nws tom qab ntawd maj mam txo qis nrog kev laus ntawm cov khoom. Feem ntau qhov no yog vim qhov roughening lossis shedding ntawm cov khoom me me los ntawm sab hauv. Cov kev hloov pauv no tsis loj tab sis lawv cuam tshuam rau tus cwj pwm loj hlob siv lead ua. Cov raj TaC coated muab qhov chaw du thiab ruaj khov dua rau ntev dua, ua rau muaj cov txiaj ntsig sib xws ntau dua. Kev rov ua dua kuj yog ib qho tseem ceeb. Cov chaw tsim khoom tsis txaus siab rau ib lub siv lead ua zoo, lawv xav tau ntau pua lub wafers uas zoo ib yam. TaC coatings pab rau qhov no los ntawm kev txo qhov kev hloov pauv random vim yog kev puas tsuaj ntawm cov khoom siv. Yog tias cov xwm txheej ntawm lub cub tawg tau tswj hwm tas li, yuav muaj kev loj hlob ntawm cov siv lead ua sib xws dua thiab yuav muaj qhov tsis zoo ntawm cov qauv uas ua rau muaj ntau lub wafers siv tau ib zaug. Los ntawm kev npaj txij nkawm, ib yam nkaus. Cov raj coated kav ntev dua, thiab yog li cov kab ntau lawm tsis tas yuav hloov pauv ntau zaus. Kev cuam tshuam tsawg dua txhais tau tias muaj tsawg dua lub sijhawm rau kev hloov pauv ntawm cov txheej txheem vim muaj qhov sib txawv ntawm kev rov sib dhos lossis kev ntxuav. Hais yooj yim, TaC coated raj muab ib puag ncig ruaj khov dua rau txhua hnub. Qhov no ua rau cov txheej txheem ntawm kev tswj hwm qhov zoo ntawm cov siv lead ua hauv qhov ntau thiab tsawg thiab yog li ntawd ncaj qha ua rau cov txiaj ntsig tag nrho thaum tseem txo cov khoom siv pov tseg dhau sijhawm, vim nws yooj yim dua rau cov engineers los tswj nws hauv qhov ntau thiab tsawg.