Vim Li Cas High-Purity Graphite Tseem Ceeb Rau SiC Epitaxy Defect Control

Qhov zoo ntawm cov silicon carbide (SiC) wafer tsim tawm yog cuam tshuam los ntawm kev hloov pauv me me hauv qhov chaw loj hlob. Ib qho chaw uas ntau tus tsis xav txog yog graphite hauv lub reactor. Nws sawv qhov kev xeem ntawm qhov kub siab heev pom hauv lub reactor thaum nws txhawb nqa thiab tso lub wafer thaum lub sijhawm epitaxy. Yog tias graphite tsis huv lossis muaj cov qauv tsis sib xws, cov khoom me me ntawm cov khoom siv lossis cov tshuaj tiv thaiv tsis xav tau tuaj yeem tso rau thoob plaws hauv cov txheej txheem loj hlob. Cov teeb meem me me ntawm qhov chaw graphite tuaj yeem tawg mus rau hauv cov teeb meem loj wafer, ua rau muaj kev ua haujlwm ntau dua thiab cov txiaj ntsig qis dua rau cov tuam txhab tsim chip. Yog li qhov xwm txheej thiab kev huv ntawm Graphite susceptor yog ib qho teeb meem tseem ceeb dua li feem ntau xav.

Yuav ua li cas Graphite Purity cuam tshuam cov teeb meem ntawm cov khoom me me hauv Epitaxy Chambers?

Cov khoom me me yog qhov tsis zoo ntawm cov wafer hauv SiC epitaxy chambers, thiab feem ntau muaj graphite hauv cov txheej txheem. Cov khoom graphite nyob hauv thaj chaw kub ntawm SiC reactor, nqa cov wafer thiab cuam tshuam rau cov thermal contours. Nrog rau kev siv cov graphite tsis huv, cov khoom tsis huv, xws li cov hlau tsis huv, tshauv, lossis cov txheej txheem seem, tuaj yeem tawm ntawm graphite qeeb qeeb dhau sijhawm thaum lub sijhawm kub siab. Cov khoom tsis huv uas tawm hauv feem ntau tsis pom hauv chamber, tab sis thaum kawg lawv tsaws rau ntawm qhov chaw wafer, lossis dhau los ua ib feem ntawm cov roj theem. Piv txwv li, hauv ib daim ntawv thov ib lub fab xaiv rau qib qis dua graphite rau kev txuag nqi. Txawm hais tias tsis muaj teeb meem pom tseeb thaum lub sijhawm luv luv thaum pib, tom qab ntau lub voj voog ntawm Sib epitaxy , cov qhov me me thiab cov qhov ntxhib tau pom ntawm qhov chaw wafer. Qhov chaw ntawm cov qhov tsis zoo no tau raug taug qab mus rau cov khoom me me uas tawm los ntawm cov tuav graphite lossis susceptor. Cov khoom me me yuav nkag mus rau hauv chav loj hlob thiab ua haujlwm ua noob hauv txoj kev tsis xav tau. Qhov ceev tsis sib xws ntawm qhov graphite kuj tseem yuav ua rau muaj kev tawg me me ntawm qhov chaw thaum cua sov, ua rau cov khoom me me poob rau hauv chav dhau sijhawm, txawm tias qhov chaw yuav zoo li huv. Yog li, kev saib xyuas qhov chaw ntawm graphite thiab nws keeb kwm yog ib txoj haujlwm niaj hnub hauv fabs kom tsis txhob muaj qhov tsis zoo cuam tshuam nrog cov khoom me me. Lub graphite purity siab nrog cov tshauv tswj tau feem ntau yog qhov xav tau, tshwj xeeb tshaj yog rau kev tsim khoom ntev. Kev suav ntawm cov voj voog thermal ntawm cov khoom kuj raug saib xyuas vim tias cov ntaub ntawv yuav poob cov khoom me me txawm tias tom qab ua tiav thawj zaug zoo. Tsis tas li ntawd, txoj kev saib xyuas rau cov khoom graphite cuam tshuam rau qhov tsis zoo. Piv txwv li, cov txheej txheem ntxuav hnyav yuav ua rau graphite nto puas tsuaj thiab ua rau muaj cov kab nrib pleb me me. Txoj kev nyiam yog cov txheej txheem ntxuav me me, tswj tau nrog kev sib cuam tshuam tsawg kawg nkaus nrog cov khoom graphite. Vim yog kev lag luam, kev hloov cov khoom sai dua li qhov xav tau yuav zoo dua li kev daws teeb meem nrog kev poob qis ntawm cov theem tom qab. Hauv kev luv luv, kev tswj hwm ntawm cov khoom me me hauv cov txheej txheem SiC epitaxy ib txwm muaj nyob ib puag ncig cov ntsiab lus me me ntawm cov khoom zoo thiab kev coj ua. Qhov teeb meem ntawm graphite zoo yog qhov tseem ceeb ntawm qhov teeb meem.

Cov Khoom Siv Yuav Tsum Tau Rau Cov Khoom Siv SiC Epitaxial Qib Siab Thiab Cov Susceptors

Rau SiC epitaxy, cov khoom hauv lub reactor tsis yog tsuas yog 'tuav' lub wafer xwb. Cov khoom siv susceptors, cov khoom siv graphite thiab cov khoom siv kub hauv lub reactor ncaj qha cuam tshuam rau kev loj hlob ntawm cov siv lead ua. Qhov no yog vim li cas cov ntaub ntawv thiaj li xav tau heev thiab qhov tsis zoo me me yuav thaum kawg tshwm sim ua qhov tsis zoo ntawm lub wafer. Kev ruaj khov thermal siab yog qhov yuav tsum tau ua. Cov khoom raug cua sov rau qhov kub siab heev rau lub sijhawm ntev (qee zaum rov ua dua qhov cua sov / txias). Cov khoom siv uas tsis tuaj yeem tswj tau qhov ruaj khov ntawm cov kub no yuav cuam tshuam thiab thaum kawg yuav tawg. Kev hloov pauv me me hauv geometry tuaj yeem hloov pauv cov roj ntws thiab kev faib cua sov ua rau cov siv lead ua tsis sib xws ntawm qhov chaw wafer. Kev huv huv yog lwm qhov tseem ceeb. Cov txheej txheem SiC siab kawg xav tau cov hlau tsawg heev thiab cov tshauv qis heev hauv cov khoom siv graphite. Thaum lub sijhawm ua haujlwm cov hlau tsis pom yuav leach maj mam tawm ntawm cov khoom, cov pa phem tuaj yeem diffuse mus rau hauv lub chamber thiab ua rau muaj kev paug ntawm cov khoom me me lossis cov khoom siv lead ua hauv zos. Hauv qee lub fabs, qhov yuam kev stacking random tau raug taug qab mus rau ib pawg ntawm cov susceptor paug. Cov qauv nto yog qhov yuav tsum tau ua tseem ceeb. Ib qho chaw du thiab sib npaug yuav pab txo qhov poob ntawm cov khoom me me thaum lub sijhawm ua kom sov/txias. Ib qho chaw tsis sib xws, lossis cov qhov hauv cov qauv ntawm qhov chaw, yuav tawg tas li thaum lub sijhawm ua haujlwm thiab yog li ntawd tsim cov khoom me me mus rau hauv chav. Qhov zoo ntawm cov txheej txheem kuj yog lwm qhov tseem ceeb. Ntau cov khoom siv siab siv SiC txheej ua ib txheej tiv thaiv. Cov txheej txheem yuav tsum lo rau cov khoom siv hauv paus thiab yuav tsum tiv taus kev ua haujlwm ntev. Kev sib txuas tsis zoo thiab kev tshem tawm cov lamination yuav ua rau lub hauv paus graphite raug rau qhov chaw ua haujlwm hnyav. Peb feem ntau pom qhov no hauv kev siv tiag tiag: piv txwv li, lub wafer fab khiav rau ntau lawm ntev yuav pom tias qhov tsis zoo nce ntxiv tas li tom qab ntau pua lub voj voog. Kev tshuaj xyuas cov khoom siv yuav qhia txog kev hnav me ntsis ntawm cov txheej txheem thiab kev puas tsuaj ntawm ntug. Kev hloov lossis hloov cov khoom yuav rov qab ua rau qhov tsis zoo rov qab mus rau qib uas tau txais. Kev xaiv cov khoom siv zoo tsis yog tsuas yog hais txog kev ua haujlwm pib ntawm cov khoom xwb, tab sis kev ruaj khov ntawm cov khoom siv hauv cov voj voog rov ua dua.

Cov teebmeem ntawm cov qauv ntawm cov noob rau kev ruaj khov ntawm thermal hauv AIXTRON G10 Systems

Cov qauv ntawm cov khoom graphite hauv SiC kub siab Epitaxy kev loj hlob lub kaw lus, xws li AIXTRON G10, muaj feem cuam tshuam loj heev rau kev ruaj khov ntawm thermal. Qhov no cuam tshuam txog kev hloov pauv ntawm qhov ntev, kev khaws cia cov duab, thiab kev teb rau kev hloov pauv thermal. Graphite tsis yog cov khoom monolithic. Nws muaj ntau lub crystallites lossis cov noob. Cov crystallites ib leeg yuav muaj kev taw qhia sib txawv. Thaum muaj kev tswj hwm tsis zoo ntawm qhov loj ntawm cov noob hauv cov khoom graphite, kev faib tawm cua sov tsis sib xws tshwm sim. Cov cheeb tsam ntawm cov khoom kub thiab txias ntawm cov nqi sib txawv. Qhov no tsim kev ntxhov siab sab hauv ntawm qib micro. Maj mam dhau sijhawm qhov kev ntxhov siab sab hauv no ua rau warp lossis distortion hauv cov khoom xws li susceptor lossis lub wafer carrier. Cov txheej txheem no yooj yim pom thaum lub sijhawm tsim khoom. Nws feem ntau tshwm sim thaum cov kab wafer ua haujlwm ntawm qhov kub siab. Qhov zoo ntawm wafer pib ploj mus tom qab ntau pua lub voj voog thermal. Kev hloov pauv ntawm qhov tuab nce ntxiv, thiab cov qhov tsis zoo ntawm ntug pib tshwm sim ntau dua. Thaum cov khoom no raug tshuaj xyuas lawv feem ntau muaj cov cim ntawm warping lossis cov khoom siv qaug zog. Cov qauv noob zoo nrog kev faib tawm crystallite tswj hwm yuav muaj kev ruaj khov thermal zoo dua li cov noob ntxhib lossis cov qauv random. Qhov no yuav ua rau muaj kev hloov pauv cua sov ntau dua thiab txo cov ntsiab lus kev ntxhov siab hauv zos. Yog tias muaj cov qauv noob zoo, cov khoom yuav tiv taus warp txawm tias ntau pua lub voj voog thermal. Cov qauv ntxhib lossis cov qauv noob tsis zoo ua rau muaj qhov tsis muaj zog hauv cov khoom, ua rau microcracking thiab thaum kawg tso tawm cov khoom me me rau hauv lub chamber. Lwm qhov teeb meem tseem ceeb uas yuav tsum xav txog yog kev tiv taus thermal shock. Muaj cov ntsiab lus uas cov khoom hloov pauv qhov kub thiab txias xws li kev thauj khoom rau hauv lub reactor lossis thaum tshem tawm. Yog tias muaj cov ciam teb tsis muaj zog ntawm cov noob ces cov kab me me yuav tsim raws cov kab noob. Txawm hais tias qhov no feem ntau tsis ua rau ib feem tsis ua haujlwm, nws tso cai rau cov qhov tsis muaj zog no los tsim hauv cov khoom siv, ua rau muaj teeb meem kev ntseeg siab yav tom ntej. Feem ntau cov fabs taug qab lub neej ntawm cov khoom ob qho tib si los ntawm cov sijhawm siv, thiab tus lej ntawm cov voj voog thermal thiab kev kho cua sov tag nrho. Cov khoom nrog cov qauv noob zoo-tsim muaj lub neej ntev dua, cov txiaj ntsig zoo sib xws dua sijhawm.

Txo Cov Khoom Siv Hlau Uas Muaj Kev Ua Phem Hauv Cov Khoom Siv Graphite Uas Muaj Kev Ntshiab Siab

Ib qho teeb meem "tsis pom" tab sis tseem ceeb hauv txhua qhov graphite, suav nrog hauv SiC epitaxy txheej txheem, yog qhov ua rau muaj kev sib kis ntawm cov hlau. Txawm tias cov hlau me me hauv ib feem graphite tuaj yeem nkag mus rau hauv cov txheej txheem thiab ua rau muaj qhov tsis zoo hauv SiC epitaxy reactor zoo li AIXTRON G10. Cov hlau no feem ntau yog los ntawm cov khoom siv raw lossis ntau yam txheej txheem ua haujlwm koom nrog kev tsim cov khoom graphite. Cov ntsiab lus xws li Hlau, Nickel, Calcium thiab Sodium yog cov khoom siv thiab tseem nyob hauv feem ntau ntawm graphite ntawm chav tsev kub, txawm li cas los xij, ntawm qhov kub siab ntawm cov txheej txheem siv hauv SiC epitaxy, cov ntsiab lus no yuav dhau los ua mobile. Cov hlau no thaum kawg tuaj yeem raug tawm lossis tsiv mus rau saum npoo thaum lub sijhawm ua kom sov / txias dua hauv thaj chaw kub, uas yog tus susceptor lossis tus neeg nqa khoom wafer nws tus kheej. Ib qho xwm txheej ib txwm yuav zoo li no: lub fab pib ua cov khoom siv siv cov khoom graphite tshiab. Ob peb wafers thawj zaug zoo thiab tsis muaj qhov tsis zoo, tab sis tom qab ib lub sijhawm, cov qhov tsis zoo me me pib tshwm sim. Lawv feem ntau yog cov qhov me me, cov teeb meem random stack, lossis cov xwm txheej tsis meej. Nws yooj yim heev rau kev xav tsis raug tias muaj cov pa roj tsis raug lossis muaj kev ua qias tuaj thaum lub sijhawm ntxuav chav. Tab sis kev tshuaj xyuas kom ntxaws feem ntau ua rau qeeb qeeb ntawm cov hlau me me los ntawm cov khoom graphite. Kev tswj hwm qhov huv ntawm graphite yog ib qho tseem ceeb. Rau cov khoom tseem ceeb, cov graphite kub siab uas muaj cov tshauv tsawg yog qhov zoo dua. Cov kauj ruam ntxuav no tshem tawm feem ntau ntawm cov hlau seem. Cov graphite zoo li no tuaj yeem ua rau cov ntsiab lus raug kaw ntev dua txawm tias nyob hauv kev ua kom sov / txias dua. Kev tshuaj xyuas cov khoom graphite kuj tseem ceeb heev hauv qee lub fabs. Kev sim cov khoom graphite nrog cov txheej txheem xws li ICP-OES lossis XRF tuaj yeem tiv thaiv kev siv cov khoom ua qias tuaj. Nws kuj tseem yuav tiv thaiv kev sib xyaw cov khoom los ntawm ntau qhov chaw sib txawv hauv tib qho txheej txheem. Cov txheej txheem xws li SiC lossis TaC kuj pab daws qhov teeb meem los ntawm kev ua haujlwm ua ib qho thaiv ntawm cov khoom graphite thiab cov txheej txheem ib puag ncig. Tsuav yog cov txheej txheem tau tso zoo thiab sib txuas nrog cov khoom graphite hauv qab nws yuav txo qhov kev sib cuam tshuam ntawm cov khoom graphite nrog cov txheej txheem ib puag ncig. Qhov kawg tab sis tsis tsawg tshaj plaws yog kev tuav thiab khaws cia cov khoom graphite. Cov khoom graphite tuaj yeem ua qias tuaj thaum tuav nrog cov hnab looj tes qias neeg, cov cuab yeej lossis los ntawm kev khaws cia rau ntawm lub txee tsis huv. Qhov kev ua qias tuaj ntawm qhov chaw no ces tuaj yeem nkag mus rau hauv lub cub tawg thaum lub sijhawm ua kom sov. Txhawm rau kom txo tau cov hlau ua qias tuaj ntawm cov khoom graphite, nws yog kev sib sau ua ke ntawm ntau yam kev siv zog me me. Yuav tsum muaj cov khoom siv huv si ua ke nrog kev coj ua zoo thiab kev tswj hwm cov txheej txheem nruj.

Vim li cas Veeco EPIK Systems thiaj xav tau cov khoom siv Graphite uas muaj qhov porosity tsawg heev?

Cov khoom siv graphite hauv Veeco EPIK Systems platform raug kev txom nyem los ntawm ib qho ntawm cov txheej txheem nyuaj tshaj plaws hauv kev tsim khoom semiconductor. Cov xwm txheej ntawm qhov kub siab, cov pa roj hnyav thiab cov txheej txheem ntev yog qhov tshwm sim los ntawm cov khoom no. Yog li ntawd, graphite porosity tsawg heev yog qhov tseem ceeb rau kev tswj hwm SiC epitaxy kev ncaj ncees thiab kev huv. Porosity txhais tau hais tias cov qhov me me, sab hauv uas muaj nyob hauv lub cev graphite nws tus kheej. Txawm hais tias nws yog qhov chaw du zoo, cov qhov hauv sab hauv tuaj yeem muaj cov pa roj txheej txheem, cov khoom seem thiab cov tshuaj ntxuav. Porosity siab txhais tau tias muaj ntau qhov ntim sab hauv rau kev ntes, qhov twg tom qab raug kub siab, cov khoom siv tuaj yeem maj mam degassed. Qhov degassing no tsis yog ib txwm linear thiab yuav ua rau tawg, ua rau cov txheej txheem nyuaj rau tswj. Hauv SiC epitaxy, qhov no yog qhov tsis zoo tshwj xeeb. Thaum cov pa roj raug tso tawm ntawm lub cev graphite lawv tuaj yeem koom nrog rau hauv cov pa roj hauv epitaxy chamber, ua rau muaj cov khoom tsis xav tau. Cov khoom me me yuav pom lawv txoj kev mus rau ntawm qhov chaw wafer, cuam tshuam rau kev loj hlob ntawm cov siv lead ua thiab tuaj yeem ua rau muaj qhov tsis zoo uas tsis tau xav txog xws li cov qhov tsis sib xws, qhov chaw ntxhib lossis qhov sib txawv hauv zos hauv qhov tuab ntawm wafer. Ib qho xwm txheej ib txwm muaj yog nyob rau hauv cov chaw tsim khoom uas lub Hoobkas huv si tau txais cov khoom siv graphite tshiab rau EPIK system. Cov txiaj ntsig pib yuav raug lees txais, txawm li cas los xij thaum lub voj voog thermal rov ua dua, qhov tsis zoo yuav nce ntxiv thiab kev tshuaj xyuas ntawm cov txheej txheem tsheb ciav hlau suav nrog cov kab roj, cov qhov dej thiab cov theem ntxuav yuav qhia tsis muaj dab tsi pom tseeb. Feem ntau nws tau qhia tias tus neeg ua txhaum yog graphite qis-porosity hauv thaj chaw kub siab. Kev xaiv ntawm ultra qis porosity graphite zoo txo ​​qhov kev pheej hmoo no los ntawm kev txwv cov ntim sab hauv uas cov tsiaj txhu tuaj yeem zais, txo qhov yuav muaj roj tawm sai sai thaum cua sov. Nws kuj tseem cuam tshuam nrog kev ua haujlwm zoo dua. Cov qauv denser ntawm ultra qis porosity graphite feem ntau muab kev tiv thaiv ntau dua rau kev tawg thaum graphite dhau los ntawm kev ua haujlwm thermal rov ua dua. Ntxiv mus, cov chaw porosity qis txhawb kev ua kom zoo dua. Thaum SiC lossis lwm yam khoom siv refractory tau coated rau ntawm cov chaw graphite no, lawv lo rau qhov chaw tsawg dua. Qhov no yuav yog vim muaj kev sib txuas ntawm cov khoom siv coated thiab graphite, uas ua rau lub zog thiab lub neej ntev ntawm cov coatings thiab lawv lub peev xwm los tev lossis flake. Thaum kawg, kev xaiv cov ultra low porosity graphite hauv kev tsim khoom txhua hnub, thaum cov khoom siv, muab cov txiaj ntsig ncaj qha rau kev ua tiav cov txiaj ntsig wafer ruaj khov, huv si, kwv yees tau hauv cov txheej txheem SiC epitaxy siab.